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1. 发明授权

US09702777B2 Sensor module and method for producing sensor module 有权
公开(公告)号：US09702777B2
公开(公告)日：2017-07-11
申请号：US14993745
申请日：2016-01-12
申请人： NAGANO KEIKI CO., LTD.
发明人： Kaori Miyashita , Eiji Takeda , Yuuji Nagai , Shinya Matsumura
IPC分类号： G01L9/00
CPC分类号： G01L9/0058 , G01L9/0044 , G01L9/0055 , G01L9/006
摘要： A detector is provided by coating a fluid conductive material on a flat portion of a diaphragm. The detector includes: a resistor element; resistor element electrodes, which are overlapped and connected with mutually opposed parts of the resistor element; and a linear conductor connected with the resistor element electrodes. The resistor element electrodes each include: a linear portion having a linear inner side facing an inner side of paired one of the resistor element electrodes; and peripheral portions defined at both ends of the linear portion, at least one of the peripheral portions being connected with the linear conductor. All of the linear portions are arranged so that inner sides are arranged mutually in parallel. The resistor element is connected with the linear portion. The peripheral portions are exposed without being connected with the resistor element.

2. 发明授权

US11940347B2 Pressure sensor 有权
公开(公告)号：US11940347B2
公开(公告)日：2024-03-26
申请号：US17508249
申请日：2021-10-22
申请人： DENSO CORPORATION , NAGANO KEIKI CO., LTD.
发明人： Hiroshi Kodama , Naoki Yoshida , Kaori Miyashita , Eiji Takeda , Nobuaki Yamada , Yoshihiro Tomomatsu , Yasushi Yanagisawa , Yusuke Midorikawa , Shirou Kamanaru , Kenichi Yokoyama , Inao Toyoda , Hisayuki Takeuchi , Naohisa Niimi , Masao Takahashi , Yasutake Ura , Kouji Asano , Yukihiro Kamada
IPC分类号： G01L9/14 , G01L9/00 , G01L9/04 , G01L19/00 , G01L19/14 , G01L23/18 , G01L1/22 , G01L9/06
CPC分类号： G01L9/04 , G01L19/0061 , G01L19/147 , G01L19/148
摘要： A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.

3. 发明授权

US10067010B2 Strain detector and manufacturing method thereof 有权
公开(公告)号：US10067010B2
公开(公告)日：2018-09-04
申请号：US15614708
申请日：2017-06-06
申请人： NAGANO KEIKI CO., LTD.
发明人： Hiroshi Kodama , Eiji Takeda , Takamitsu Yoshizawa
IPC分类号： G01L1/22
CPC分类号： G01L1/2287 , G01L9/0051
摘要： A strain detector includes a strain-causing portion, an insulation film formed on the strain-causing portion, a strain gauge formed on the insulation film and configured to detect the strain generated by the strain-causing portion as electric signals, an electrode connected to the strain gauge, a bonding pad extending from the electrode, a bonding wire connected to the bonding pad, and an insulative resin layer covering the strain gauge without covering the bonding pad and the bonding wire.

4. 发明授权

US09903775B2 Sensor module and method for producing sensor module 有权
公开(公告)号：US09903775B2
公开(公告)日：2018-02-27
申请号：US14978592
申请日：2015-12-22
申请人： NAGANO KEIKI CO., LTD.
发明人： Yukihiko Hata , Kaori Miyashita , Eiji Takeda
IPC分类号： G01L9/00
CPC分类号： G01L9/0051
摘要： A detector provided on a flat portion of a diaphragm includes a plurality of strain gauges, resistor element connectors connecting adjacent ones of the strain gauges, and an electric conductor covering a part of the resistor element connectors. First linear portions and second linear portions of the resistor element connectors exposed from the electric conductor are orthogonal to the edges of the electric conductor extending across the first linear portions and the second linear portions. Even when a pattern of the resistor element connector and a pattern of electric conductor are misaligned in X direction or in Y direction, an area of the resistor element connector exposed from the electric conductor does not change.

5. 发明申请

US20160202136A1 SENSOR MODULE AND METHOD FOR PRODUCING SENSOR MODULE 有权
标题翻译：传感器模块和生产传感器模块的方法
公开(公告)号：US20160202136A1
公开(公告)日：2016-07-14
申请号：US14993745
申请日：2016-01-12
申请人： NAGANO KEIKI CO., LTD.
发明人： Kaori Miyashita , Eiji Takeda , Yuuji Nagai , Shinya Matsumura
IPC分类号： G01L9/00
CPC分类号： G01L9/0058 , G01L9/0044 , G01L9/0055 , G01L9/006
摘要： A detector is provided by coating a fluid conductive material on a flat portion of a diaphragm. The detector includes: a resistor element; resistor element electrodes, which are overlapped and connected with mutually opposed parts of the resistor element; and a linear conductor connected with the resistor element electrodes. The resistor element electrodes each include: a linear portion having a linear inner side facing an inner side of paired one of the resistor element electrodes; and peripheral portions defined at both ends of the linear portion, at least one of the peripheral portions being connected with the linear conductor. All of the linear portions are arranged so that inner sides are arranged mutually in parallel. The resistor element is connected with the linear portion. The peripheral portions are exposed without being connected with the resistor element.
摘要翻译：通过在隔膜的平坦部分上涂布流体导电材料来提供检测器。检测器包括：电阻元件; 电阻元件电极，其与电阻元件的相对的部分重叠并连接; 以及与电阻元件电极连接的线状导体。电阻元件电极各自包括：直线部分，其具有面对成对的电阻元件电极的内侧的线性内侧; 以及限定在所述线状部的两端的周缘部，所述周缘部中的至少一方与所述线状导体连接。所有直线部分被布置成使得内侧彼此平行布置。电阻元件与线性部分连接。周边部分暴露而不与电阻元件连接。

6. 发明公开

US20240288326A1 SENSOR MODULE AND METHOD FOR MANUFACTURING SENSOR MODULE 审中-公开
公开(公告)号：US20240288326A1
公开(公告)日：2024-08-29
申请号：US18574386
申请日：2022-06-24
申请人： NAGANO KEIKI CO., LTD.
发明人： Hiroshi Kodama , Eiji Takeda , Takamitsu Yoshizawa
IPC分类号： G01L9/04
CPC分类号： G01L9/04
摘要： A sensor module includes: a diaphragm including a first region and a second region that includes a position at which a strain ε that occurs by an effect of a physical quantity caused by a measurement target fluid is zero and has a smaller effect of the physical quantity caused by the measurement target fluid than the first region; strain detecting elements disposed in the first region; and an electric conductor that is at least partially disposed in the second region and electrically couples the strain detecting elements to each other to configure a bridge circuit. The electric conductor includes a resistance adjuster, at a position corresponding to the second region, that adjusts a resistance of the electric conductor.

7. 发明申请

US20170356814A1 STRAIN DETECTOR AND MANUFACTURING METHOD THEREOF 审中-公开
公开(公告)号：US20170356814A1
公开(公告)日：2017-12-14
申请号：US15614708
申请日：2017-06-06
申请人： NAGANO KEIKI CO., LTD.
发明人： Hiroshi Kodama , Eiji Takeda , Takamitsu Yoshizawa
IPC分类号： G01L1/22
CPC分类号： G01L1/2287 , G01L9/0051
摘要： A strain detector includes a strain-causing portion, an insulation film formed on the strain-causing portion, a strain gauge formed on the insulation film and configured to detect the strain generated by the strain-causing portion as electric signals, an electrode connected to the strain gauge, a bonding pad extending from the electrode, a bonding wire connected to the bonding pad, and an insulative resin layer covering the strain gauge without covering the bonding pad and the bonding wire.

8. 发明申请

US20160187216A1 SENSOR MODULE AND METHOD FOR PRODUCING SENSOR MODULE 有权
标题翻译：传感器模块和生产传感器模块的方法
公开(公告)号：US20160187216A1
公开(公告)日：2016-06-30
申请号：US14978592
申请日：2015-12-22
申请人： NAGANO KEIKI CO., LTD.
发明人： Yukihiko Hata , Kaori Miyashita , Eiji Takeda
IPC分类号： G01L9/00
CPC分类号： G01L9/0051
摘要： A detector provided on a flat portion of a diaphragm includes a plurality of strain gauges, resistor element connectors connecting adjacent ones of the strain gauges, and an electric conductor covering a part of the resistor element connectors. First linear portions and second linear portions of the resistor element connectors exposed from the electric conductor are orthogonal to the edges of the electric conductor extending across the first linear portions and the second linear portions. Even when a pattern of the resistor element connector and a pattern of electric conductor are misaligned in X direction or in Y direction, an area of the resistor element connector exposed from the electric conductor does not change.
摘要翻译：设置在隔膜的平坦部分上的检测器包括多个应变仪，连接相邻的应变仪的电阻元件连接器和覆盖电阻元件连接器的一部分的电导体。从电导体露出的电阻元件连接器的第一直线部分和第二直线部分垂直于延伸穿过第一直线部分和第二直线部分的电导体的边缘。即使当电阻元件连接器的图案和电导体图案在X方向或Y方向上不对准时，从电导体露出的电阻元件连接器的面积也不变化。

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