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1. 发明申请

US20060157198A1 Member for plasma processing apparatus and plasma processing apparatus 审中-公开
标题翻译：等离子处理装置和等离子体处理装置的成员
公开(公告)号：US20060157198A1
公开(公告)日：2006-07-20
申请号：US11065084
申请日：2005-02-25
申请人： Muneo Furuse , Masanori Kadotani , Hiroho Kitada , Shingo Kimura
发明人： Muneo Furuse , Masanori Kadotani , Hiroho Kitada , Shingo Kimura
IPC分类号： H01L21/306 , C23F1/00 , C23C16/00
CPC分类号： H01J37/3255 , H01J37/32009
摘要： Provided is a plasma processing apparatus, which comprises, as a member facing plasma in a plasma processing chamber, a member composed of a material prepared by incorporating a conductive material in quartz or germanium which is an amorphous base material.
摘要翻译：提供了一种等离子体处理装置，其包括作为在等离子体处理室中面向等离子体的构件，由通过将石英或锗中的导电材料并入作为非晶基材而制备的材料构成的构件。

2. 发明申请

US20090183835A1 ETCHING PROCESS APPARATUS AND MEMBER FOR ETCHING PROCESS CHAMBER 审中-公开
标题翻译：蚀刻工艺设备和蚀刻过程室的成员
公开(公告)号：US20090183835A1
公开(公告)日：2009-07-23
申请号：US12040058
申请日：2008-02-29
申请人： Muneo FURUSE , Shingo Kimura , Masanori Kadotani
发明人： Muneo FURUSE , Shingo Kimura , Masanori Kadotani
IPC分类号： C23F1/02
CPC分类号： H01J37/32495 , H01J2237/3343
摘要： It is an object of the present invention to provide an etching process apparatus which can suppress evolution of foreign matter to improve production yield.An etching process apparatus comprising: a vacuum container and a process chamber inside of the vacuum container, in which a sample set in the process chamber held in the vacuum container is etched by the use of plasma; a member held inside of the process chamber; and a coating film which is formed by spray-coating a given material and covers a surface of the member and is exposed to the plasma, wherein, in a surface thereof, pores therein are sealed by the use of a material same as the given material.
摘要翻译：本发明的目的是提供一种可以抑制异物进化以提高产量的蚀刻处理装置。一种蚀刻处理装置，包括：在真空容器内部的真空容器和处理室，其中通过使用等离子体蚀刻保持在真空容器中的处理室中的样品; 处理室内部的一个成员; 以及涂膜，其通过喷涂给定材料并覆盖构件的表面并暴露于等离子体而形成，其中在其表面中通过使用与给定材料相同的材料密封其中的孔。

3. 发明申请

US20080236744A1 Plasma etching equipment 审中-公开
标题翻译：等离子体蚀刻设备
公开(公告)号：US20080236744A1
公开(公告)日：2008-10-02
申请号：US11896293
申请日：2007-08-30
申请人： Muneo Furuse , Shingo Kimura , Tadayoshi Kawaguchi
发明人： Muneo Furuse , Shingo Kimura , Tadayoshi Kawaguchi
IPC分类号： H01L21/306
CPC分类号： H01J37/32477 , H01J37/32623
摘要： To provide a plasma processing equipment that can reduce the particles or contamination in a sample by suppressing the occurrence of an abnormal electric discharge during processing. The plasma processing equipment that employs a plasma process using a halogen-based gas in fabricating a semiconductor device, wherein a plasma sprayed coating film is applied to a surface of a well, such as a wall in a processing chamber, which plasma is in constant with, and wherein a conductor is incorporated into a material of this plasma sprayed coating film, thereby making the plasma sprayed coating film conductive.
摘要翻译：提供能够通过抑制处理时的异常放电的发生而能够减少样品中的颗粒或污染的等离子体处理设备。在制造半导体器件中采用基于卤素气体的等离子体处理设备的等离子体处理设备，其中将等离子体喷涂的涂膜施加到诸如处理室中的壁的表面，该等离子体处于恒定的状态并且其中将导体结合到该等离子体喷涂涂膜的材料中，从而使等离子体喷涂涂膜成为导电性。

4. 发明授权

US08731706B2 Vacuum processing apparatus 有权
标题翻译：真空加工设备
公开(公告)号：US08731706B2
公开(公告)日：2014-05-20
申请号：US12388617
申请日：2009-02-19
申请人： Shingo Kimura , Shouji Okiguchi , Akira Kagoshima , Shinji Obama
发明人： Shingo Kimura , Shouji Okiguchi , Akira Kagoshima , Shinji Obama
IPC分类号： H01L21/67
CPC分类号： H01L21/67745 , H01L21/67778
摘要： A vacuum processing apparatus includes a plurality of vacuum containers; a vacuumized transfer unit connected with the vacuum containers and having a transfer chamber; a plurality of lock chambers connected to the vacuumized transfer unit; a vacuumized transferring section arranged in the transfer chamber to transfer the sample between each of the lock chambers and each of the processing chambers inside the plurality of vacuum containers; an atmospheric transfer container having a space through which the sample is transferred under the atmospheric pressure; an atmospheric transfer unit arranged in the atmospheric transfer container and adapted to transfer the sample from a cassette; and a controller operative on the basis of schedule information of a plurality of operations to adjust the operations, the information including times of stagnation of the plurality of samples and set therefor.
摘要翻译：真空处理装置包括多个真空容器; 与真空容器连接并具有传送室的真空转印单元; 连接到所述真空转印单元的多个锁定室; 设置在所述传送室中的抽真空转印部分，用于将所述样品在每个所述锁定室与所述多个真空容器内的所述处理室内传送; 具有空气的大气转移容器，样品在大气压下通过该空间传送; 大气转移单元，布置在大气转移容器中并适于从样品盒传送样品; 以及控制器，其基于多个操作的调度信息进行操作以调整操作，所述信息包括所述多个样本的停滞时间并为此设置。

5. 发明申请

US20090324367A1 VACUUM PROCESSING APPARATUS 有权
标题翻译：真空加工设备
公开(公告)号：US20090324367A1
公开(公告)日：2009-12-31
申请号：US12203168
申请日：2008-09-03
申请人： Masakazu Isozaki , Akitaka Makino , Shingo Kimura , Minoru Yatomi
发明人： Masakazu Isozaki , Akitaka Makino , Shingo Kimura , Minoru Yatomi
IPC分类号： H01L21/677
CPC分类号： H01L21/6719 , H01L21/67017 , H01L21/67196
摘要： A vacuum processing apparatus includes vacuum processing vessels each having a processing chamber with a pressure-reduced interior space, a vacuum transfer vessel which is coupled to the vacuum vessels disposed therearound and which has a low-pressure interior space in which a to-be-processed workpiece is conveyed, an atmospheric air transfer vessel which is coupled to the front side of the vacuum transfer vessel and which includes on its front face side cassette tables mounting thereon a cassette with the workpiece received therein for conveying the workpiece in an interior space under an atmospheric pressure, a position-aligning machine disposed within the atmospheric air transfer vessel at one of right and left ends for adjusting a position of the workpiece, and an adjuster disposed between lower part of this machine and a floor face for adjusting the supply of a fluid being fed to the vacuum processing vessels.
摘要翻译：真空处理装置包括各自具有具有减压内部空间的处理室的真空处理容器，耦合到设置在其周围的真空容器并具有低压内部空间的真空转移容器，被输送的处理过的工件;大气转移容器，其连接到真空传送容器的前侧，并且其前表面上包括安装在其上的工作台，其中工件被接收在其中，用于将工件传送到内部空间中大气压力的位置调整机构，位于左右两端的大气输送容器内，用于调整工件的位置;以及调节器，其配置在该机器的下部与底面之间，流体被供给到真空处理容器。

6. 发明申请

US20080289796A1 Cooling module 审中-公开
标题翻译：冷却模块
公开(公告)号：US20080289796A1
公开(公告)日：2008-11-27
申请号：US12154184
申请日：2008-05-21
申请人： Norihisa Sasano , Akihiro Maeda , Akira Nakawatase , Ryuji Kanzaka , Yuji Matsubara , Shingo Kimura , Akira Enomoto , Kazuya Tanaka , Kouji Suzuki
发明人： Norihisa Sasano , Akihiro Maeda , Akira Nakawatase , Ryuji Kanzaka , Yuji Matsubara , Shingo Kimura , Akira Enomoto , Kazuya Tanaka , Kouji Suzuki
IPC分类号： F01N5/02
CPC分类号： B60K11/04 , B60K13/02 , F02M35/06 , F02M35/161
摘要： A cooling module includes a heat exchanger, a blower, a fan shroud and an air cleaner unit for filtering air to be introduced into an engine of a vehicle. The fan shroud holds the blower on a downstream side of the heat exchanger with respect to a flow of air passing through the heat exchanger and has an air introducing portion defining an air passage from the heat exchanger to the blower. A front end of the air cleaner unit is offset from the heat exchanger with respect to a horizontal direction. A side wall of the air cleaner unit partly forms the air introducing portion. A clearance is provided between the side wall and the heat exchanger such that air upstream of the heat exchanger is conducted toward a position downstream of the heat exchanger through the clearance.
摘要翻译：冷却模块包括热交换器，鼓风机，风扇罩和用于过滤要引入车辆发动机的空气的空气净化器单元。风扇罩相对于通过热交换器的空气流将风机保持在热交换器的下游侧，并具有限定从热交换器到鼓风机的空气通道的空气引入部。空气滤清器单元的前端相对于水平方向偏离热交换器。空气滤清器单元的侧壁部分地形成空气引入部分。在侧壁和热交换器之间提供间隙，使得热交换器上游的空气通过间隙朝向热交换器下游的位置。

7. 发明授权

US4764494A Dielectric ceramic compositions and process for producing the same 失效
标题翻译：介电陶瓷组合物及其制备方法
公开(公告)号：US4764494A
公开(公告)日：1988-08-16
申请号：US59190
申请日：1987-06-11
申请人： Ken-ichi Sakabe , Shingo Kimura , Kageyasu Akashi
发明人： Ken-ichi Sakabe , Shingo Kimura , Kageyasu Akashi
IPC分类号： C04B35/468 , H01G4/12 , C04B35/46 , C04B35/49
CPC分类号： C04B35/4682 , C04B35/4684 , H01G4/1227
摘要： A dielectric ceramic composition comprising 87.5 to 99.6 mole % of barium titanate as a first component, 0.2 to 7.0 mole % of copper oxide as a second component, 0.2 to 5.5 mole % of at least one member selected from the group consisting of lithium oxide, zinc oxide, cadmium oxide and iron oxide as a third component, and if necessary, at least one complex oxide selected from the group consisting of lead titanate, strontium titanate, calcium titanate, magnesium titanate, barium zirconate, calcium zirconate, strontium zirconate, lead zirconate, magnesium zirconate, lead stannate, calcium stannate, strontium stannate, barium stannate and magnesium stannate, as a fourth component in an amount of 0.3 to 40.0 moles per 100 moles of the sum of the first, second and third components; and a process for producing said dielectric ceramic composition.
摘要翻译：一种介电陶瓷组合物，其包含87.5至99.6摩尔％的钛酸钡作为第一组分，0.2至7.0摩尔％的氧化铜作为第二组分，0.2至5.5摩尔％的至少一种选自氧化锂，氧化锌，氧化镉和氧化铁作为第三组分，如果需要，选自钛酸铅，钛酸锶，钛酸钙，钛酸镁，锆酸锆，锆酸锆，锆酸锶，铅的至少一种复合氧化物锆酸盐，锆酸铅，锡酸铅，锡酸锶，锡酸锶，锡酸钡和锡酸镁，作为第一组分，第二组分和第三组分的总摩尔量为0.3至40.0摩尔的第四组分; 以及制造所述介电陶瓷组合物的方法。

8. 发明授权

US4347326A Foamable glass composition and glass foam 失效
标题翻译：可发泡玻璃组合物和玻璃泡沫
公开(公告)号：US4347326A
公开(公告)日：1982-08-31
申请号：US242547
申请日：1981-03-11
申请人： Isamu Iwami , Shingo Kimura , Toshio Iwasa
发明人： Isamu Iwami , Shingo Kimura , Toshio Iwasa
IPC分类号： C03C3/076 , C03C11/00 , C03C3/04 , C03C3/08 , C03C3/10
CPC分类号： C03C3/076 , C03C11/007
摘要： Foamable glass composition suitable for making glass foam, which starts from water glass material and consisting essentially of 100 parts by weight of anhydrous modified sodium silicate and 0.5-4 parts by weight of CaCO.sub.3 as a foaming agent. A foam in the closed-cell form, which is light is in weight, and excellent water resistance, strength and heat resistance, is obtained, wherein CO.sub.2 in a gas existing in the cell is 50% by volume or more.
摘要翻译：适用于制造玻璃泡沫的可发泡玻璃组合物，其从水玻璃材料开始并且基本上由100重量份的无水改性硅酸钠和0.5-4重量份作为发泡剂的CaCO 3组成。闭孔形式的轻质泡沫体重，得到优异的耐水性，强度和耐热性，其中存在于电池中的气体中的CO 2为50体积％以上。

9. 发明申请

US20130163585A1 TELEPHONE SYSTEM, SERVER APPARATUS, AND CONTROL METHOD USED IN THE SERVER APPARATUS 审中-公开
标题翻译：电话系统，服务器设备和在服务器设备中使用的控制方法
公开(公告)号：US20130163585A1
公开(公告)日：2013-06-27
申请号：US13606450
申请日：2012-09-07
申请人： Shingo Kimura
发明人： Shingo Kimura
IPC分类号： H04L12/66 , H04M11/04
CPC分类号： H04M3/5166 , H04L12/4625
摘要： According to one embodiment, a server apparatus includes a memory, a determination module, a storage controller and a service controller. The memory stores in an authentication management table associating identification information with first authentication information and second authentication information. The determination module determines whether registration is authenticated based on the authentication management table. The storage controller stores the identification information, the attribute information, and the IP addresses in a registration management table. The service controller performs control regarding use of the communication services.
摘要翻译：根据一个实施例，服务器设备包括存储器，确定模块，存储控制器和服务控制器。存储器存储在将识别信息与第一认证信息和第二认证信息相关联的认证管理表中。确定模块基于认证管理表确定是否认证注册。存储控制器将识别信息，属性信息和IP地址存储在注册管理表中。服务控制器执行关于通信服务的使用的控制。

10. 发明申请

US20120120946A1 Telephone Exchange Apparatus, Telephone Exchange Apparatus Control Method, and Telephone System 审中-公开
标题翻译：电话交换设备，电话交换设备控制方法和电话系统
公开(公告)号：US20120120946A1
公开(公告)日：2012-05-17
申请号：US13166703
申请日：2011-06-22
申请人： Kazuhiro Sumi , Shingo Kimura
发明人： Kazuhiro Sumi , Shingo Kimura
IPC分类号： H04L12/66
CPC分类号： H04L65/1069 , H04L61/2514 , H04L65/1053 , H04M3/42314 , H04M7/009 , H04M7/128 , H04M2207/203
摘要： According to one embodiment, a telephone exchange apparatus includes a determining module, a memory and a controller. The determining module determines whether an IP address is transferred through a router, by information notified from the plurality of telephone terminals, when a telephone terminal requests registration. The memory stores a management table associating the terminal ID, the results of determination by the determining module, and the IP address. The controller refers to the management table registered in the memory, and executes one of a first process of establishing connection for communication in a peer-to-peer form between first and second telephone terminals, and a second process of relaying connection by using a relay function, based on a reference results of the management table.
摘要翻译：根据一个实施例，电话交换设备包括确定模块，存储器和控制器。当电话终端请求注册时，确定模块通过从多个电话终端通知的信息来确定IP地址是否通过路由器传送。存储器存储与终端ID相关联的管理表，确定模块的确定结果和IP地址。控制器是指登记在存储器中的管理表，并且执行在第一和第二电话终端之间以对等形式建立用于通信的连接的第一处理中的一个，以及通过使用中继来中继连接的第二处理功能，根据管理表的参考结果。

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