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    • 1. 发明申请
    • MANUFACTURING METHOD OF MASTER DISK FOR PATTERNED MEDIUM AND MAGNETIC RECORDING DISK MANUFACTURING METHOD
    • 图形磁盘和磁记录磁盘制造方法主磁盘的制造方法
    • US20120118853A1
    • 2012-05-17
    • US13356936
    • 2012-01-24
    • Munehiro OGASAWARAYoshiyuki KAMATAAkira KIKITSU
    • Munehiro OGASAWARAYoshiyuki KAMATAAkira KIKITSU
    • C23F1/02B29C59/16C23C14/00B29C33/38
    • G11B5/855
    • According to one embodiment, a method for manufacturing a master disk for discoid patterned medium having a plurality of sectors arranged in a circumferential direction, the plurality of sectors including a recording data portion and a servo data portion that includes a sector identification region having gaps formed in a linear pattern is provided. An imprint master disk having a linear pattern which is common to the sectors before the gaps are formed in the sector identification region and including at least one pattern of the sector is prepared, imprinting is repeated in the circumferential direction by using the imprint master disk to form patterns of a discoid patterned medium on a substrate, and a sector identification pattern is formed in each sector by forming gaps in the linear pattern of each sector identification region among the patterns formed on the substrate.
    • 根据一个实施例,一种用于制造具有沿圆周方向布置的多个扇区的盘状图案化介质的母盘的方法,所述多个扇区包括记录数据部分和伺服数据部分,所述伺服数据部分包括形成有间隙的扇区识别区域 提供了线性图案。 准备在扇区识别区域中形成间隙之前的区段共同的线性图案的压印母盘,并且包括扇区的至少一个图案,通过使用压印母盘向周向重复记录 在基板上形成盘状图案化介质的形状图案,并且通过在形成在基板上的图案中的每个扇区识别区域的线性图案中形成间隙,在每个扇区中形成扇区识别图案。
    • 9. 发明申请
    • METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM
    • 制造磁记录介质的方法
    • US20100215989A1
    • 2010-08-26
    • US12705456
    • 2010-02-12
    • Yousuke ISOWAKIKaori KIMURAYoshiyuki KAMATAMasatoshi SAKURAI
    • Yousuke ISOWAKIKaori KIMURAYoshiyuki KAMATAMasatoshi SAKURAI
    • G11B5/33B44C1/22
    • G11B5/865B82Y10/00G11B5/743G11B5/746G11B5/855
    • According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist, etching the second hard mask by using the patterned resist as a mask to transfer the patterns of protrusions and recesses to the second hard mask, etching the first hard mask by using the second hard mask as a mask to transfer the patterns of protrusions and recesses to the first hard mask, subjecting the magnetic recording layer exposed in the recesses to modifying treatment to change an etching rate, and deactivating the magnetic recording layer exposed in the recesses.
    • 根据一个实施例,一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模,第二硬掩模和抗蚀剂,将压模压印到抗蚀剂上,以将凹凸图案转印到抗蚀剂上, 去除残留在图案化抗蚀剂的凹部中的残留物,通过使用图案化抗蚀剂作为掩模蚀刻第二硬掩模以将突起和凹陷的图案转移到第二硬掩模,通过使用第二硬掩模蚀刻第一硬掩模 用于将突起和凹陷的图案转移到第一硬掩模的掩模,对暴露于凹部中的磁记录层进行修改处理以改变蚀刻速率,以及使在凹部中暴露的磁记录层失活。