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    • 3. 发明授权
    • Memory units and related semiconductor devices including nanowires
    • 存储器单元和包括纳米线的相关半导体器件
    • US08338815B2
    • 2012-12-25
    • US12851268
    • 2010-08-05
    • Moon-Sook LeeByeong-Ok ChoMan-Hyoung RyooTakahiro Yasue
    • Moon-Sook LeeByeong-Ok ChoMan-Hyoung RyooTakahiro Yasue
    • H01L29/04H01L47/00
    • H01L27/11507B82Y10/00H01L27/10H01L27/1021H01L27/24
    • Methods of fabricating a memory unit are provided including forming a plurality of first nanowire structures, each of which includes a first nanowire extending in a first direction parallel to the first substrate and a first electrode layer enclosing the first nanowire, on a first substrate. The first electrode layers are partially removed to form first electrodes beneath the first nanowires. A first insulation layer filling up spaces between structures, each of which includes the first nanowire and the first electrode, is formed on the first substrate. A second electrode layer is formed on the first nanowires and the first insulation layer. A plurality of second nanowires is formed on the second electrode layer, each of which extends in a second direction perpendicular to the first direction. The second electrode layer is partially etched using the second nanowires as an etching mask to form a plurality of second electrodes. Related memory units, methods of fabricating semiconductor devices and semiconductor devices are also provided.
    • 提供了一种制造存储器单元的方法,包括形成多个第一纳米线结构,每个第一纳米线结构包括在第一衬底上沿与第一衬底平行的第一方向延伸的第一纳米线和包围第一纳米线的第一电极层。 第一电极层被部分地去除以在第一纳米线下方形成第一电极。 填充第一基板上形成有第一纳米线和第一电极的结构之间的空间的第一绝缘层。 在第一纳米线和第一绝缘层上形成第二电极层。 多个第二纳米线形成在第二电极层上,每个第二纳米线沿垂直于第一方向的第二方向延伸。 使用第二纳米线作为蚀刻掩模来部分蚀刻第二电极层以形成多个第二电极。 还提供了相关的存储单元,制造半导体器件和半导体器件的方法。
    • 5. 发明申请
    • Memory Units and Related Semiconductor Devices Including Nanowires
    • 包括纳米线的存储单元和相关半导体器件
    • US20100314600A1
    • 2010-12-16
    • US12851268
    • 2010-08-05
    • Moon-Sook LeeByeong-Ok ChoMan-Hyoung RyooTakahiro Yasue
    • Moon-Sook LeeByeong-Ok ChoMan-Hyoung RyooTakahiro Yasue
    • H01L45/00
    • H01L27/11507B82Y10/00H01L27/10H01L27/1021H01L27/24
    • Methods of fabricating a memory unit are provided including forming a plurality of first nanowire structures, each of which includes a first nanowire extending in a first direction parallel to the first substrate and a first electrode layer enclosing the first nanowire, on a first substrate. The first electrode layers are partially removed to form first electrodes beneath the first nanowires. A first insulation layer filling up spaces between structures, each of which includes the first nanowire and the first electrode, is formed on the first substrate. A second electrode layer is formed on the first nanowires and the first insulation layer. A plurality of second nanowires is formed on the second electrode layer, each of which extends in a second direction perpendicular to the first direction. The second electrode layer is partially etched using the second nanowires as an etching mask to form a plurality of second electrodes. Related memory units, methods of fabricating semiconductor devices and semiconductor devices are also provided.
    • 提供了一种制造存储器单元的方法,包括形成多个第一纳米线结构,每个第一纳米线结构包括在第一衬底上沿与第一衬底平行的第一方向延伸的第一纳米线和包围第一纳米线的第一电极层。 第一电极层被部分地去除以在第一纳米线下方形成第一电极。 填充第一基板上形成有第一纳米线和第一电极的结构之间的空间的第一绝缘层。 在第一纳米线和第一绝缘层上形成第二电极层。 多个第二纳米线形成在第二电极层上,每个第二纳米线沿垂直于第一方向的第二方向延伸。 使用第二纳米线作为蚀刻掩模来部分蚀刻第二电极层以形成多个第二电极。 还提供了相关的存储单元,制造半导体器件和半导体器件的方法。
    • 6. 发明授权
    • Methods of manufacturing memory units, and methods of manufacturing semiconductor devices
    • 制造存储器单元的方法以及制造半导体器件的方法
    • US07790610B2
    • 2010-09-07
    • US12339577
    • 2008-12-19
    • Moon-Sook LeeByeong-Ok ChoMan-Hyoung RyooTakahiro Yasue
    • Moon-Sook LeeByeong-Ok ChoMan-Hyoung RyooTakahiro Yasue
    • H01L21/44
    • H01L27/11507B82Y10/00H01L27/10H01L27/1021H01L27/24
    • Methods of fabricating a memory unit are provided including forming a plurality of first nanowire structures, each of which includes a first nanowire extending in a first direction parallel to the first substrate and a first electrode layer enclosing the first nanowire, on a first substrate. The first electrode layers are partially removed to form first electrodes beneath the first nanowires. A first insulation layer filling up spaces between structures, each of which includes the first nanowire and the first electrode, is formed on the first substrate. A second electrode layer is formed on the first nanowires and the first insulation layer. A plurality of second nanowires is formed on the second electrode layer, each of which extends in a second direction perpendicular to the first direction. The second electrode layer is partially etched using the second nanowires as an etching mask to form a plurality of second electrodes. Related memory units, methods of fabricating semiconductor devices and semiconductor devices are also provided.
    • 提供了一种制造存储器单元的方法,包括形成多个第一纳米线结构,每个第一纳米线结构包括在第一衬底上沿与第一衬底平行的第一方向延伸的第一纳米线和包围第一纳米线的第一电极层。 第一电极层被部分地去除以在第一纳米线下方形成第一电极。 填充第一基板上形成有第一纳米线和第一电极的结构之间的空间的第一绝缘层。 在第一纳米线和第一绝缘层上形成第二电极层。 多个第二纳米线形成在第二电极层上,每个第二纳米线沿垂直于第一方向的第二方向延伸。 使用第二纳米线作为蚀刻掩模来部分蚀刻第二电极层以形成多个第二电极。 还提供了相关的存储器单元,制造半导体器件和半导体器件的方法。