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1. 发明授权

US06284312B1 Method and apparatus for chemical vapor deposition of polysilicon 失效
标题翻译：多晶硅化学气相沉积的方法和装置
公开(公告)号：US06284312B1
公开(公告)日：2001-09-04
申请号：US09507711
申请日：2000-02-18
申请人： Mohan Chandra , Ijaz Hussain Jafri , Kedar Prasad Gupta , Vishwanath Prasad , Jonathan A. Talbott
发明人： Mohan Chandra , Ijaz Hussain Jafri , Kedar Prasad Gupta , Vishwanath Prasad , Jonathan A. Talbott
IPC分类号： B05D722
CPC分类号： C01B33/027 , C23C16/045 , C23C16/24
摘要： A method and apparatus, and product by process, for the production of bulk polysilicon by broad area chemical vapor deposition, consisting of a quartz envelope and base plate forming a reactor enclosure, with external radiant heaters providing the heat source. A thin wall, edge-defined film fed growth (EFG) silicon tube section is used as the deposition casing and reaction chamber wall. The tube is capped at the top and sealed to the base plate to form the reaction chamber. External heaters radiate heat through the quartz enclosure to heat the tube wall to deposition temperature. A through flow of process gas is introduced to initiate the deposition. A uniform wide surface area deposit occurs on the inside surface of the tube, causing the diameter to become increasingly smaller as the yield accumulates. In a two tube reactor, a smaller core tube is uniformly spaced and supported inside the outer tube for full flow of process gas around the core tube so that deposition occurs on both the outside and inside surface of the core tube. The outer tube may be configured for preheating by a flow of electrical current from the base plate to the cover plate.
摘要翻译：一种用于通过广泛化学气相沉积生产大块多晶硅的方法和装置，以及由形成反应器外壳的石英壳和基板组成的产品，外部辐射加热器提供热源。使用薄壁边缘限定薄膜进料生长（EFG）硅管部分作为沉积套管和反应室壁。管被顶盖顶盖并密封到基板上以形成反应室。外部加热器通过石英外壳辐射热量，以将管壁加热至沉积温度。引入工艺气体的流动以引发沉积。在管的内表面上发生均匀的宽表面积沉积，导致直径随着收率积累而变得越来越小。在双管反应器中，较小的芯管被均匀间隔并支撑在外管内，用于使芯管周围的工艺气体完全流动，从而在芯管的外表面和内表面上均发生沉积。外管可以被配置为通过电流从基板到盖板的预热。

2. 发明授权

US06365225B1 Cold wall reactor and method for chemical vapor deposition of bulk polysilicon 失效
标题翻译：冷壁反应堆和大量多晶硅的化学气相沉积方法
公开(公告)号：US06365225B1
公开(公告)日：2002-04-02
申请号：US09642735
申请日：2000-08-17
申请人： Mohan Chandra , Kedar P. Gupta , Jonathan A. Talbott , Ijaz Jafri , Vishwanath Prasad
发明人： Mohan Chandra , Kedar P. Gupta , Jonathan A. Talbott , Ijaz Jafri , Vishwanath Prasad
IPC分类号： B05D722
CPC分类号： C01B33/027 , C23C16/045 , C23C16/24
摘要： A method and apparatus, and product by process, for the production of bulk polysilicon by a chemical vapor deposition process on a removable tube section. A quartz envelope and base plate form a CVD reactor enclosure, with external radiant heaters providing process heat through the wall of the reactor, and with process gas inlet and outlet ports located in the base plate. A tube section, preferably an EFG silicon tube-section, vertically emplaced on the base plate and capped to close the top is used as the reaction chamber. During the CVD process, deposition occurs on the inside surface of the chamber tube, the inner diameter of the deposit layer becoming increasingly smaller as the yield accumulates. In a two tube reactor, a smaller diameter, vertical middle tube is uniformly spaced and supported inside the chamber tube for fall flow of process gas over and under the middle tube so that deposition occurs on the three exposed tube surfaces. A co-axial core tube and heater mounted on the base plate provides yet more deposition surface area, improved thermal gradient in the reaction chamber, and greater thermal efficiency to the process. The full, double sided deposit on the middle tube and exterior deposit on the core tube are unique products of the process.
摘要翻译：一种用于通过化学气相沉积工艺在可移除管部分上生产大块多晶硅的方法和装置以及产品。石英壳和基板形成CVD反应器外壳，外部辐射加热器通过反应器的壁提供工艺热，并且具有位于基板中的工艺气体入口和出口。垂直放置在基板上并封盖以封闭顶部的管段，优选EFG硅管段用作反应室。在CVD工艺期间，在室管的内表面上发生沉积，沉积层的内径随着屈服积累而变得越来越小。在双管反应器中，较小直径的垂直中间管被均匀地间隔开并且被支撑在腔室管内，用于使处理气体在中间管和下管下方流动，使得在三个暴露的管表面上发生沉积。安装在基板上的同轴芯管和加热器提供更多的沉积表面积，改善反应室中的热梯度，并提供更高的热效率。中管的全双面沉积物和芯管上的外部沉积物是该工艺的独特产物。

3. 发明授权

US6113473A Method and apparatus for improved wire saw slurry 失效
标题翻译：线锯浆料改良方法及装置
公开(公告)号：US6113473A
公开(公告)日：2000-09-05
申请号：US65769
申请日：1998-04-24
申请人： Michael A. Costantini , Jonathan A. Talbott , Mohan Chandra , Vishwanath Prasad , Allison Caster , Kedar P. Gupta , Philippe Leyvraz
发明人： Michael A. Costantini , Jonathan A. Talbott , Mohan Chandra , Vishwanath Prasad , Allison Caster , Kedar P. Gupta , Philippe Leyvraz
IPC分类号： B28D1/02 , B28D5/00 , C07K14/59 , B24B7/19 , B24B7/30
CPC分类号： C07K14/59 , B28D1/025 , B28D5/007
摘要： A slurry recycle process for use in free-abrasive machining operations such as for wire saws used in wafer slicing of ingots, where the used slurry is separated into kerf-rich and abrasive-rich components, and the abrasive-rich component is reconstituted into a makeup slurry. During the process, the average particle size of the makeup slurry is controlled by monitoring the condition of the kerf and abrasive components and making necessary adjustments to the separating force and dwell time of the separator apparatus. Related pre-separator and post separator treatments, and feedback of one or the other separator slurry output components for mixing with incoming used slurry and recirculation through the separator, provide further effectiveness and additional control points in the process. The kerf-rich component is eventually or continually removed; the abrasive-rich component is reconstituted into a makeup slurry with a controlled, average particle size such that the products of the free-abrasive machining method using the recycled slurry process of the invention are of consistent high quality with less TTV deviation from cycle to cycle for a prolonged period or series of machining operations.
摘要翻译：用于自由磨料加工操作的浆料循环方法，例如用于锭的晶片切片的线锯，其中将所用浆料分离成富含切屑且富含磨料的组分以及富含磨料的组分重新构成化妆浆。在该过程中，通过监测切口和研磨部件的状况并对分离装置的分离力和停留时间进行必要的调整来控制补充浆料的平均粒度。相关的预分离器和后分离器处理以及用于与进入的浆料混合并通过分离器再循环的一个或另一个分离器浆料输出组分的反馈在该过程中提供进一步的有效性和附加的控制点。最终或连续地除去富含切屑的组分; 将磨料丰富的组分重构成具有受控平均粒度的补充浆料，使得使用本发明的再循环浆料方法的自由磨料加工方法的产品具有一致的高质量，并且具有较少的TTV周期循环偏差长时间或一系列加工操作。

4. 发明申请

US20100101956A1 NANOSCALE DNA DETECTION SYSTEM USING SPECIES-SPECIFIC AND/OR DISEASE- SPECIFIC PROBES FOR RAPID IDENTIFICATION 有权
标题翻译：使用物种特异性和/或疾病特异性检测的纳米级DNA检测系统进行快速鉴定
公开(公告)号：US20100101956A1
公开(公告)日：2010-04-29
申请号：US12518841
申请日：2008-01-30
申请人： Wonbong Choi , Somenath Roy , Kalai Mathee , Vishwanath Prasad
发明人： Wonbong Choi , Somenath Roy , Kalai Mathee , Vishwanath Prasad
IPC分类号： G01N27/447 , G03F7/00
CPC分类号： C12Q1/6825 , G01N27/3278 , Y10T436/143333 , C12Q2563/155
摘要： A method and system for detecting a DNA strand using carbon nanotubes or nanowires. A specific single strand of template DNA serves as a probe for its complementary strand in a solution containing DNA segments to be tested. The single-stranded sequence-specific DNA probe segment, whose ends are modified with amine, is attached between two carbon nanotubes/nanowires. When complementary strands representing DNA segments under test are brought near the probe strands, a dielectrophoresis (DEP) field may enhance the probability of selective hybridization between the complimentary target DNA and probe DNA. A change in electrical conductance in the probe strand occurs upon hybridization of the complementary target DNA with the single probe strand. This conductance change may be measured using the two carbon nanotubes or nano-dimensional electrodes. By exploiting nano-dimensional electrodes and single strand probe DNA, the proposed system is capable of accurately detecting a single molecule of DNA.
摘要翻译：一种使用碳纳米管或纳米线检测DNA链的方法和系统。模板DNA的特定单链用作其含有待测试DNA片段的溶液中的互补链的探针。其末端用胺修饰的单链序列特异性DNA探针片段连接在两个碳纳米管/纳米线之间。当将表示测试中的DNA片段的互补链带到探针链附近时，介电电泳（DEP）场可增强互补靶DNA和探针DNA之间选择性杂交的可能性。当互补靶DNA与单个探针链杂交时，探针链中的电导率发生变化。可以使用两个碳纳米管或纳米尺寸电极测量该电导变化。通过开发纳米尺寸电极和单链探针DNA，所提出的系统能够准确检测单分子DNA。

5. 发明授权

US08597492B2 Nanoscale DNA detection system using species-specific and/or disease-specific probes for rapid identification 有权
标题翻译：使用物种特异性和/或疾病特异性探针的纳米级DNA检测系统进行快速鉴定
公开(公告)号：US08597492B2
公开(公告)日：2013-12-03
申请号：US12518841
申请日：2008-01-30
申请人： Wonbong Choi , Somenath Roy , Kalai Mathee , Vishwanath Prasad
发明人： Wonbong Choi , Somenath Roy , Kalai Mathee , Vishwanath Prasad
IPC分类号： C12Q1/68
CPC分类号： C12Q1/6825 , G01N27/3278 , Y10T436/143333 , C12Q2563/155
摘要： A method and system for detecting a DNA strand using carbon nanotubes or nanowires. A specific single strand of template DNA serves as a probe for its complementary strand in a solution containing DNA segments to be tested. The single-stranded sequence-specific DNA probe segment, whose ends are modified with amine, is attached between two carbon nanotubes/nanowires. When complementary strands representing DNA segments under test are brought near the probe strands, a dielectrophoresis (DEP) field may enhance the probability of selective hybridization between the complimentary target DNA and probe DNA. A change in electrical conductance in the probe strand occurs upon hybridization of the complementary target DNA with the single probe strand. This conductance change may be measured using the two carbon nanotubes or nano-dimensional electrodes. By exploiting nano-dimensional electrodes and single strand probe DNA, the proposed system is capable of accurately detecting a single molecule of DNA.
摘要翻译：一种使用碳纳米管或纳米线检测DNA链的方法和系统。模板DNA的特定单链用作其含有待测试DNA片段的溶液中的互补链的探针。其末端用胺修饰的单链序列特异性DNA探针片段连接在两个碳纳米管/纳米线之间。当将表示测试中的DNA片段的互补链带到探针链附近时，介电电泳（DEP）场可增强互补靶DNA和探针DNA之间选择性杂交的可能性。当互补靶DNA与单个探针链杂交时，探针链中的电导率发生变化。可以使用两个碳纳米管或纳米尺寸电极测量该电导变化。通过开发纳米尺寸电极和单链探针DNA，所提出的系统能够准确检测单分子DNA。

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