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    • 1. 发明授权
    • Force detecting sensor and method of making
    • 力检测传感器及其制作方法
    • US5526703A
    • 1996-06-18
    • US934880
    • 1992-08-21
    • Mohammad AslamMichael D. OlingerJerry L. Page
    • Mohammad AslamMichael D. OlingerJerry L. Page
    • G01L1/00G01L1/16
    • G01L1/005
    • A force detecting microsensor comprises a single crystal Si substrate, a single crystal cone formed on the substrate and a resilient electrode mounted above the tip of the Si cone. The space between the tip of the Si cone and the resilient electrode is maintained in a vacuum environment and the distance between the tip and the resilient anode is in the order of a few atomic diameters. The tunneling effect of electrons occurs between the tip of the Si cone and the resilient electrode when a potential is applied to the resilient electrode and the Si cone tip. The resilient electrode deflects as a result of the force acting on the microsensor. The deflection of the resilient electrode alters the electrical characteristics between the resilient electrode and the Si cone tip. The changes in the electrical characteristics can be measured to determine the level of force acting on the microsensor. The process for making the microsensor according to the invention comprises the steps of forming an insulating layer and support layer on the substrate, forming a recess in the insulating layer and aperture in the support layer, depositing a single crystal Si cone on the substrate and fully enclosing the Si cone within the recess of the support layer and the insulating layer.
    • 力检测微传感器包括单晶Si衬底,形成在衬底上的单晶锥体和安装在Si锥体尖端上方的弹性电极。 Si锥形尖端与弹性电极之间的空间保持在真空环境中,尖端与弹性阳极之间的距离为几个原子直径的数量级。 当电势施加到弹性电极和Si锥尖时,电子的隧道效应发生在Si锥体的尖端和弹性电极之间。 弹性电极由于作用在微传感器上的力而偏转。 弹性电极的挠曲改变了弹性电极和Si锥尖之间的电特性。 可以测量电特性的变化以确定作用在微传感器上的力的水平。 根据本发明的制造微传感器的方法包括以下步骤:在衬底上形成绝缘层和支撑层,在绝缘层中形成凹槽和支撑层中的孔,在衬底上沉积单晶Si锥体并完全 将Si锥体包围在支撑层和绝缘层的凹槽内。
    • 2. 发明授权
    • Method of making a force detecting sensor
    • 制造力检测传感器的方法
    • US5424241A
    • 1995-06-13
    • US259395
    • 1994-06-14
    • Mohammad AslamMichael D. OlingerJerry L. Page
    • Mohammad AslamMichael D. OlingerJerry L. Page
    • G01L1/18B81B3/00G01L1/00H01L29/84H01L21/20
    • G01L1/005
    • A force detecting microsensor comprises a single crystal Si substrate, a single crystal cone formed on the substrate and a resilient electrode mounted above the tip of the Si cone. The space between the tip of the Si cone and the resilient electrode is maintained in a vacuum environment and the distance between the tip and the resilient anode is in the order of a few atomic diameters. The tunneling effect of electrons occurs between the tip of the Si cone and the resilient electrode when a potential is applied to the resilient electrode and the Si cone tip. The resilient electrode deflects as a result of the force acting on the microsensor. The deflection of the resilient electrode alters the electrical characteristics between the resilient electrode and the Si cone tip. The changes in the electrical characteristics can be measured to determine the level of force acting on the microsensor. The process for making the microsensor according to the invention comprises the steps of forming an insulating layer and support layer on the substrate, forming a recess in the insulating layer and aperture in the support layer, depositing a single crystal Si cone on the substrate and fully enclosing the Si cone within the recess of the support layer and the insulating layer.
    • 力检测微传感器包括单晶Si衬底,形成在衬底上的单晶锥体和安装在Si锥体尖端上方的弹性电极。 Si锥形尖端与弹性电极之间的空间保持在真空环境中,尖端与弹性阳极之间的距离为几个原子直径的数量级。 当电势施加到弹性电极和Si锥尖时,电子的隧道效应发生在Si锥体的尖端和弹性电极之间。 弹性电极由于作用在微传感器上的力而偏转。 弹性电极的挠曲改变了弹性电极和Si锥尖之间的电特性。 可以测量电特性的变化以确定作用在微传感器上的力的水平。 根据本发明的制造微传感器的方法包括以下步骤:在衬底上形成绝缘层和支撑层,在绝缘层中形成凹槽和支撑层中的孔,在衬底上沉积单晶Si锥体并完全 将Si锥体包围在支撑层和绝缘层的凹槽内。
    • 3. 发明授权
    • Solid medium optical ring laser rotation sensor
    • 固体介质光环激光旋转传感器
    • US5408492A
    • 1995-04-18
    • US65836
    • 1993-05-21
    • Gerald L. VosslerMichael D. OlingerJerry L. Page
    • Gerald L. VosslerMichael D. OlingerJerry L. Page
    • G01C19/72G01C19/66H01S3/083
    • G01C19/66
    • An optical rotation sensor comprises a light amplification stimulated emission ring laser formed in a solid medium is provided with phase modulator devices which produce push-pull phase modulation of counterpropagating optical waves in the ring thereby enhancing bidirectional lasing in single longitudinal modes in each direction. A frequency selective output coupler couples a predetermined portion of the optical energy at the lasing frequency from the ring to an output waveguide. A substantially U-shaped output waveguide having legs extending away from the ring in opposite directions and toward a common position. Clockwise and counterclockwise light waves are coupled from the ring to the two separate legs of the output waveguide and are directed to the common position to create an interfering light pattern on photodetector apparatus. The interfering light pattern is indicative of the rate of rotation, as defined by the Sagnac effect. Signal processing circuitry connected to the detector derives navigation and flight control information from the detector. In one embodiment, the ring laser and input and output couplers are implemented in a rare earth-doped lithium niobate substrate. In another embodiment, the ring laser and the input and output waveguides are implemented in rare earth-doped optical fibers. In a further embodiment, the ring laser and input and output couplers as well as the phase modulators and the photodetector apparatus are implemented in a single semiconductor substrate and gain electrically supplied to the ring laser.
    • 包括在固体介质中形成的光放大受激发射环形激光器的光学旋转传感器设置有在环中产生反向传播光波的推挽相位调制的相位调制器装置,从而在每个方向上以单纵向模式增强双向激光。 频率选择输出耦合器以激光频率从环到输出波导耦合光能的预定部分。 一个基本上U形的输出波导,其具有沿相反方向远离环的方向并朝着公共位置延伸的腿。 顺时针和逆时针光波从环耦合到输出波导的两个独立的支路,并被引导到公共位置以在光电检测器装置上产生干涉光图案。 干扰光模式表示由Sagnac效应定义的旋转速率。 连接到检测器的信号处理电路从检测器导出导航和飞行控制信息。 在一个实施例中,环形激光器和输入和输出耦合器在稀土掺杂的铌酸锂衬底中实现。 在另一个实施例中,环形激光器和输入和输出波导在稀土掺杂光纤中实现。 在另一个实施例中,环形激光器和输入和输出耦合器以及相位调制器和光电探测器装置被实现在单个半导体衬底中并且被电提供给环形激光器。
    • 5. 发明授权
    • Automatic guided vehicle sensor system and method of using same
    • 自动导向车传感器系统及其使用方法
    • US08761987B2
    • 2014-06-24
    • US13253679
    • 2011-10-05
    • Michael D. OlingerJoseph G. Mickley
    • Michael D. OlingerJoseph G. Mickley
    • G05D1/02B62D1/24G01B7/14
    • G05D1/0261G05D2201/0216
    • An automatic guided vehicle (AGV) system for automatically transporting loads along a predetermined path is provided that includes a plurality of magnets distant from one another, wherein at least a portion of the plurality of magnets represent a positioning point, and a plurality of AGVs, wherein at least one of the plurality of AGVs includes a drive assembly and a sensor system configured to determine guidance information. The sensor system includes a circuit board, a two-dimensional array of giant magneto resistive (GMR) sensors along a surface of the circuit board, the GMR sensors configured to detect at least one of the plurality of embedded magnets when the GMR sensors are proximate thereto, and an electromagnetic coil extending around the circuit board and at least a portion of the GMR sensors, the electromagnetic coil configured to polarize the GMR sensors.
    • 提供了一种用于沿着预定路径自动传送载荷的自动导向车辆(AGV)系统,其包括彼此远离的多个磁体,其中所述多个磁体的至少一部分表示定位点,以及多个AGV, 其中所述多个AGV中的至少一个包括被配置为确定引导信息的驱动组件和传感器系统。 传感器系统包括电路板,沿着电路板表面的巨磁阻(GMR)传感器的二维阵列,GMR传感器被配置为当GMR传感器接近时检测多个嵌入式磁体中的至少一个 以及围绕电路板和至少一部分GMR传感器延伸的电磁线圈,电磁线圈被配置为使GMR传感器偏振。
    • 6. 发明授权
    • Network structure for path generation
    • 路径生成的网络结构
    • US5319737A
    • 1994-06-07
    • US890381
    • 1992-05-26
    • Lyle A. ReiblingMichael D. Olinger
    • Lyle A. ReiblingMichael D. Olinger
    • G06F17/50G06N3/04G06F15/46
    • G06F17/509G06N3/04
    • A network structure for path generation includes an operational amplifier circuit (200) implementation. The circuit (200) implements a finite difference approximation template for computing the weighted sum of its four "neighbors." The circuit implementation (200) includes a series of five output operational amplifiers (202, 204, 206, 208 and 210). Each of the output amplifiers includes a feedback path (212) having a feedback resistance, and is connected to the output terminal of its respective operational amplifier and to the negative input terminal (214) of the corresponding amplifier. The positive input terminal (216) of each of the output operational amplifiers is connected to a ground (218). The circuit implementation (200) further includes a series of input operational amplifiers (220, 222, 224, 226 and 228). The output terminals (230) of each of the input operational amplifiers are connected to respective ones of the input terminals (214) of the output operational amplifiers through input impedances. The input amplifiers include conductive feedback paths (232) having feedback resistances and connected to negative input terminals (234) of each of the input operational amplifiers. A positive input terminal (236) of each of the operational amplifiers is connected to a ground (238). Each of the negative input terminals (234) of each of the input operational amplifiers is connected to a series of four input impedances. Each of the input amplifiers includes reference voltage inputs.
    • 用于路径生成的网络结构包括运算放大器电路(200)实现。 电路(200)实现用于计算其四个“邻居”的加权和的有限差分近似模板。 电路实现(200)包括一系列五个输出运算放大器(202,204,206,208和210)。 每个输出放大器包括具有反馈电阻的反馈路径(212),并且连接到其各自的运算放大器的输出端和相应放大器的负输入端(214)。 每个输出运算放大器的正输入端(216)连接到地(218)。 电路实现(200)还包括一系列输入运算放大器(220,222,224,226和228)。 每个输入运算放大器的输出端子(230)通过输入阻抗连接到输出运算放大器的相应输入端(214)。 输入放大器包括具有反馈电阻并且连接到每个输入运算放大器的负输入端子(234)的导电反馈路径(232)。 每个运算放大器的正输入端(236)连接到地(238)。 每个输入运算放大器的每个负输入端子(234)连接到一系列四个输入阻抗。 每个输入放大器包括参考电压输入。
    • 7. 发明申请
    • AUTOMATIC GUIDED VEHICLE SENSOR SYSTEM AND METHOD OF USING SAME
    • 自动导向车辆传感器系统及其使用方法
    • US20120330491A1
    • 2012-12-27
    • US13253679
    • 2011-10-05
    • Michael D. OlingerJoseph G. Mickley
    • Michael D. OlingerJoseph G. Mickley
    • G05D1/02
    • G05D1/0261G05D2201/0216
    • An automatic guided vehicle (AGV) system for automatically transporting loads along a predetermined path is provided that includes a plurality of magnets distant from one another, wherein at least a portion of the plurality of magnets represent a positioning point, and a plurality of AGVs, wherein at least one of the plurality of AGVs includes a drive assembly and a sensor system configured to determine guidance information. The sensor system includes a circuit board, a two-dimensional array of giant magneto resistive (GMR) sensors along a surface of the circuit board, the GMR sensors configured to detect at least one of the plurality of embedded magnets when the GMR sensors are proximate thereto, and an electromagnetic coil extending around the circuit board and at least a portion of the GMR sensors, the electromagnetic coil configured to polarize the GMR sensors.
    • 提供了一种用于沿着预定路径自动传送载荷的自动导向车辆(AGV)系统,其包括彼此远离的多个磁体,其中所述多个磁体的至少一部分表示定位点,以及多个AGV, 其中所述多个AGV中的至少一个包括被配置为确定引导信息的驱动组件和传感器系统。 传感器系统包括电路板,沿着电路板表面的巨磁阻(GMR)传感器的二维阵列,GMR传感器被配置为当GMR传感器接近时检测多个嵌入式磁体中的至少一个 以及围绕电路板和至少一部分GMR传感器延伸的电磁线圈,电磁线圈被配置为使GMR传感器偏振。