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1. 发明授权

US07408172B2 Charged particle beam apparatus and charged particle beam irradiation method 有权
标题翻译：带电粒子束装置和带电粒子束照射法
公开(公告)号：US07408172B2
公开(公告)日：2008-08-05
申请号：US11841411
申请日：2007-08-20
申请人： Mitsugu Sato , Hideo Todokoro , Yoichi Ose , Makoto Ezumi , Noriaki Arai , Takashi Doi
发明人： Mitsugu Sato , Hideo Todokoro , Yoichi Ose , Makoto Ezumi , Noriaki Arai , Takashi Doi
IPC分类号： H01J37/317
CPC分类号： H01J37/153 , H01J2237/1506 , H01J2237/1534 , H01J2237/28
摘要： A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam 4 is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses 6 and 7 off the axes thereof. A means is provided to control the off-axis trajectory of the beam such than an aberration produced by the objective lens 7 when the beam is inclined can be canceled by an aberration produced by the other lens 6.
摘要翻译：当束相对于样品倾斜时，带电粒子束装置的分辨率几乎不降低。主光束4的轨迹被偏转器偏转或者被可动孔径改变，使得光束入射到多个透镜6和7的轴线上。提供了一种用于控制光束的离轴轨迹的装置，例如当光束倾斜时由物镜7产生的像差可以被另一透镜6产生的像差消除。

2. 发明授权

US07282722B2 Charged particle beam apparatus and charged particle beam irradiation method 有权
标题翻译：带电粒子束装置和带电粒子束照射法
公开(公告)号：US07282722B2
公开(公告)日：2007-10-16
申请号：US11185871
申请日：2005-07-21
申请人： Mitsugu Sato , Hideo Todokoro , Yoichi Ose , Makoto Ezumi , Noriaki Arai , Takashi Doi
发明人： Mitsugu Sato , Hideo Todokoro , Yoichi Ose , Makoto Ezumi , Noriaki Arai , Takashi Doi
IPC分类号： H01J37/317
CPC分类号： H01J37/153 , H01J2237/1506 , H01J2237/1534 , H01J2237/28
摘要： A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam 4 is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses 6 and 7 off the axes thereof. A means is provided to control the off-axis trajectory of the beam such that an aberration produced by the objective lens 7 when the beam is inclined can be canceled by an aberration produced by the other lens 6.
摘要翻译：当束相对于样品倾斜时，带电粒子束装置的分辨率几乎不降低。主光束4的轨迹被偏转器偏转或者被可动孔径改变，使得光束入射到多个透镜6和7的轴线上。提供了一种用于控制光束的离轴轨迹的装置，使得当光束倾斜时由物镜7产生的像差可以被另一透镜6产生的像差消除。

3. 发明授权

US06956211B2 Charged particle beam apparatus and charged particle beam irradiation method 有权
标题翻译：带电粒子束装置和带电粒子束照射法
公开(公告)号：US06956211B2
公开(公告)日：2005-10-18
申请号：US10656166
申请日：2003-09-08
申请人： Mitsugu Sato , Hideo Todokoro , Yoichi Ose , Makoto Ezumi , Noriaki Arai , Takashi Doi
发明人： Mitsugu Sato , Hideo Todokoro , Yoichi Ose , Makoto Ezumi , Noriaki Arai , Takashi Doi
IPC分类号： G01Q10/00 , G01Q20/02 , G01Q30/02 , H01J3/14 , H01J29/70 , H01J37/153 , H01J37/28
CPC分类号： H01J37/153 , H01J2237/1506 , H01J2237/1534 , H01J2237/28
摘要： A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam 4 is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses 6 and 7 off the axes thereof. A means is provided to control the off-axis trajectory of the beam such that an aberration produced by the objective lens 7 when the beam is inclined can be canceled by an aberration produced by the other lens 6.
摘要翻译：当束相对于样品倾斜时，带电粒子束装置的分辨率几乎不降低。主光束4的轨迹被偏转器偏转或者被可动孔径改变，使得光束入射到多个透镜6和7的轴线上。提供了一种用于控制光束的离轴轨迹的装置，使得当光束倾斜时由物镜7产生的像差可以被另一透镜6产生的像差消除。

4. 发明申请

US20050253083A1 Charged particle beam apparatus and charged particle beam irradiation method 有权
公开(公告)号：US20050253083A1
公开(公告)日：2005-11-17
申请号：US11185871
申请日：2005-07-21
申请人： Mitsugu Sato , Hideo Todokoro , Yoichi Ose , Makoto Ezumi , Noriaki Arai , Takashi Doi
发明人： Mitsugu Sato , Hideo Todokoro , Yoichi Ose , Makoto Ezumi , Noriaki Arai , Takashi Doi
IPC分类号： G01Q10/00 , G01Q20/02 , G01Q30/02 , H01J3/14 , H01J29/70 , H01J37/153 , H01J37/28
CPC分类号： H01J37/153 , H01J2237/1506 , H01J2237/1534 , H01J2237/28
摘要： A charged particle beam apparatus produces little reduction in resolution when the beam is inclined with respect to a sample. The trajectory of a primary beam 4 is deflected by a deflector or changed by a movable aperture such that the beam is incident on a plurality of lenses 6 and 7 off the axes thereof. A means is provided to control the off-axis trajectory of the beam such that an aberration produced by the objective lens 7 when the beam is inclined can be canceled by an aberration produced by the other lens 6.

5. 发明授权

US07838827B2 Monochromator and scanning electron microscope using the same 有权
标题翻译：单色器和扫描电子显微镜使用相同
公开(公告)号：US07838827B2
公开(公告)日：2010-11-23
申请号：US11987018
申请日：2007-11-26
申请人： Yoichi Ose , Shunroku Taya , Hideo Todokoro , Tadashi Otaka , Mitsugu Sato , Makoto Ezumi
发明人： Yoichi Ose , Shunroku Taya , Hideo Todokoro , Tadashi Otaka , Mitsugu Sato , Makoto Ezumi
IPC分类号： H01J37/05
CPC分类号： H01J37/05 , H01J37/153 , H01J37/28
摘要： An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.
摘要翻译：本发明提供一种扫描电子显微镜，该扫描电子显微镜由能够高分辨率，单色化能量和降低色差的单色仪组成，而不会显着降低一次电子束的电流强度。扫描电子显微镜安装有一对具有相反偏转方向的扇形磁场和电场，以聚焦电子束，然后通过狭缝限制能量宽度，并且安装相同形状的另一对扇形磁场和电场在与包含狭缝的表面形成对称镜的位置处。该结构用于抵消物点和对称镜位置的能量分散，并通过会聚透镜系统空间收缩点聚光点光束，提高扫描电子显微镜的图像分辨率。

6. 发明授权

US5608218A Scanning electron microscope 失效
标题翻译：扫描电子显微镜
公开(公告)号：US5608218A
公开(公告)日：1997-03-04
申请号：US359761
申请日：1994-12-20
申请人： Mitsugu Sato , Yoichi Ose , Satoru Fukuhara , Hideo Todokoro , Makoto Ezumi
发明人： Mitsugu Sato , Yoichi Ose , Satoru Fukuhara , Hideo Todokoro , Makoto Ezumi
IPC分类号： H01J37/22 , H01J37/05 , H01J37/244 , H01J37/28
CPC分类号： H01J37/28 , H01J2237/225 , H01J2237/24495 , H01J2237/281
摘要： A scanning electron microscope suitable for producing an image of high resolution by detecting secondary electrons and backscattered electrons generated from a specimen at a low accelerating voltage in a separate or synthesis fashion. In the scanning electron microscope electric and magnetic fields for separating trajectories of backscattered electrons and secondary electrons generated from a specimen are established, and a backscattered electron detector for detecting generated backscattered electrons is disposed on the trajectory of the backscattered electrons. According to the microscope, since secondary electrons and backscattered electrons can be detected efficiently in a separate fashion even at a low accelerating voltage of several kilovolts or less and besides the detector does not exert the deflection action on a primary electron beam, backscattered and secondary electron images of high resolution can be obtained.
摘要翻译：一种扫描电子显微镜，其适用于通过以单独或合成的方式检测由低速加速电压下的样品产生的二次电子和反向散射电子来产生高分辨率的图像。在扫描电子显微镜中，建立用于分离由样品产生的背散射电子和二次电子的轨迹的电场和磁场，并且用于检测产生的反向散射电子的反向散射电子检测器设置在背散射电子的轨迹上。根据显微镜，由于二次电子和后向散射电子可以以几千伏或更小的低加速电压以单独的方式被有效地检测，此外，检测器不会对一次电子束，后向散射和二次电子施加偏转作用可以获得高分辨率的图像。

7. 发明授权

US07315024B2 Monochromator and scanning electron microscope using the same 有权
标题翻译：单色器和扫描电子显微镜使用相同
公开(公告)号：US07315024B2
公开(公告)日：2008-01-01
申请号：US11344529
申请日：2006-02-01
申请人： Yoichi Ose , Shunroku Taya , Hideo Todokoro , Tadashi Otaka , Mitsugu Sato , Makoto Ezumi
发明人： Yoichi Ose , Shunroku Taya , Hideo Todokoro , Tadashi Otaka , Mitsugu Sato , Makoto Ezumi
IPC分类号： G21K7/00 , G01N23/00
CPC分类号： H01J37/05 , H01J37/153 , H01J37/28
摘要： An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.
摘要翻译：本发明提供一种扫描电子显微镜，该扫描电子显微镜由能够高分辨率，单色化能量和降低色差的单色仪组成，而不会显着降低一次电子束的电流强度。扫描电子显微镜安装有一对具有相反偏转方向的扇形磁场和电场，以聚焦电子束，然后通过狭缝限制能量宽度，并且安装相同形状的另一对扇形磁场和电场在与包含狭缝的表面形成对称镜的位置处。该结构用于抵消物点和对称镜位置的能量分散，并通过会聚透镜系统空间收缩点聚光点光束，提高扫描电子显微镜的图像分辨率。

8. 发明申请

US20060219910A1 Monochromator and scanning electron microscope using the same 有权
标题翻译：单色器和扫描电子显微镜使用相同
公开(公告)号：US20060219910A1
公开(公告)日：2006-10-05
申请号：US11344529
申请日：2006-02-01
申请人： Yoichi Ose , Shunroku Taya , Hideo Todokoro , Tadashi Otaka , Mitsugu Sato , Makoto Ezumi
发明人： Yoichi Ose , Shunroku Taya , Hideo Todokoro , Tadashi Otaka , Mitsugu Sato , Makoto Ezumi
IPC分类号： G21K7/00 , G01N23/00
CPC分类号： H01J37/05 , H01J37/153 , H01J37/28
摘要： An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.
摘要翻译：本发明提供一种扫描电子显微镜，该扫描电子显微镜由能够高分辨率，单色化能量和降低色差的单色仪组成，而不会显着降低一次电子束的电流强度。扫描电子显微镜安装有一对具有相反偏转方向的扇形磁场和电场，以聚焦电子束，然后通过狭缝限制能量宽度，并且安装相同形状的另一对扇形磁场和电场在与包含狭缝的表面形成对称镜的位置处。该结构用于抵消物点和对称镜位置的能量分散，并通过会聚透镜系统空间收缩点聚光点光束，提高扫描电子显微镜的图像分辨率。

9. 发明授权

US07075078B2 Scanning electron microscope 失效
标题翻译：扫描电子显微镜
公开(公告)号：US07075078B2
公开(公告)日：2006-07-11
申请号：US11064819
申请日：2005-02-25
申请人： Yoichi Ose , Hideo Todokoro , Makoto Ezumi , Mitsugu Sato
发明人： Yoichi Ose , Hideo Todokoro , Makoto Ezumi , Mitsugu Sato
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/147 , H01J37/1471 , H01J37/153 , H01J37/28 , H01J2237/12 , H01J2237/14 , H01J2237/1516 , H01J2237/244 , H01J2237/2817
摘要： A disclosed scanning electron microscope (SEM) is intended to prevent deterioration of resolution due to increase in off-axis aberration resulting from a deviation of a primary electron bean from the optical axis of the microscope. An example of the SEM has an image shifting deflector system including two deflectors disposed respectively at upper and lower stages. The deflector at the lower stage is a multipole electrostatic deflecting electrode and is disposed in an objective. Even if the distance of image shifting is great, an image of a high resolution can be formed, and dimensions can be measured in a high accuracy. The SEM is able to achieve precision inspection at a high throughput when applied to inspection in semiconductor device fabricating processes that process a wafer having a large area and provided with very minute circuit elements.
摘要翻译：所公开的扫描电子显微镜（SEM）旨在防止由于一次电子束与显微镜的光轴偏离而引起的离轴像差增加而导致的分辨率的劣化。 SEM的示例具有包括分别设置在上部和下部的两个偏转器的图像偏移偏转器系统。下级的偏转器是多极静电偏转电极，并设置在物镜中。即使图像偏移的距离大，也可以形成高分辨率的图像，能够高精度地测量尺寸。当在用于处理具有大面积的晶片并且具有非常微小的电路元件的半导体器件制造工艺中进行检查时，SEM能够以高产量实现精确检查。

10. 发明授权

US07022983B2 Monochromator and scanning electron microscope using the same 失效
公开(公告)号：US07022983B2
公开(公告)日：2006-04-04
申请号：US10751907
申请日：2004-01-07
申请人： Yoichi Ose , Shunroku Taya , Hideo Todokoro , Tadashi Otaka , Mitsugu Sato , Makoto Ezumi
发明人： Yoichi Ose , Shunroku Taya , Hideo Todokoro , Tadashi Otaka , Mitsugu Sato , Makoto Ezumi
IPC分类号： H01J37/05
CPC分类号： H01J37/05 , H01J37/153 , H01J37/28
摘要： An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.

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