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    • 4. 发明申请
    • POD CRAMPING UNIT, LOAD PORT EQUIPPED WITH POD CRAMPING UNIT AND MINI-ENVIRONMENT SYSTEM INCLUDING POD AND LOAD PORT
    • POD冲压单元,装有POD冲压单元的负载端口和包括POD和负载端口的微型环境系统
    • US20070231112A1
    • 2007-10-04
    • US11691683
    • 2007-03-27
    • Toshihiko MiyajimaJun EmotoHidetoshi Horibe
    • Toshihiko MiyajimaJun EmotoHidetoshi Horibe
    • B65H1/00
    • H01L21/67379H01L21/67772H01L21/67775Y10S414/14
    • The invention is directed to a pod cramping unit for fixing a pod to a support table in a load port, the pod including a pod body capable of storing a wafer in the interior thereof and having an opening through which the wafer is to be taken out of/brought into the interior and a lid attached to the pod body to close/open the opening, the load port having a pod opener that opens/closes the lid to allow to bring the wafer out of/into the interior of the pod. The pod cramping unit includes a cramp portion that is provided on the support table and adapted to engage with a first engagement portion provided on a lower surface of the pod body to restrict upward movement of the pod relative to the support table, a restriction pin that is movable upwardly and downwardly relative to the support table and adapted to engage with a second engagement portion provided on the lower surface of the pod body to restrict movement of the pod in a disengaging direction that causes disengagement between the first engagement portion and the cramp portion, and a vertically driving portion that moves the restriction pin up to/down from the second engagement portion.
    • 本发明涉及一种用于将容器固定到装载端口中的支撑台上的荚式捣实单元,所述荚包括能够在其内部存储晶片并且具有开口的荚体,所述荚体在晶片内部被取出 进入内部和附接到荚体主体以关闭/打开开口的盖子,负载端口具有打开/关闭盖子的荚果开启器,以允许将晶片带出/进入荚果的内部。 荚式捣实单元包括一个抽吸部分,该部分设置在支撑台上并且适于与设置在荚果体的下表面上的第一接合部分接合,以限制荚果相对于支撑台的向上运动;限制销, 可相对于支撑台向上和向下移动并且适于与设置在荚体主体的下表面上的第二接合部分接合,以限制荚在分离方向上的移动,从而导致第一接合部分和痉挛部分之间的脱离 以及使所述限制销从所述第二接合部向上/向下移动的垂直驱动部。
    • 5. 发明授权
    • Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port
    • 荚式单元装载端口配有荚果装置和迷你环境系统,包括荚和装载端口
    • US07927058B2
    • 2011-04-19
    • US11691683
    • 2007-03-27
    • Toshihiko MiyajimaJun EmotoHidetoshi Horibe
    • Toshihiko MiyajimaJun EmotoHidetoshi Horibe
    • B65G49/07
    • H01L21/67379H01L21/67772H01L21/67775Y10S414/14
    • The invention is directed to a pod clamping unit for fixing a pod to a support table in a load port, the pod including a pod body capable of storing a wafer in the interior thereof and a lid, the load port having a pod opener that opens/closes the lid. The pod clamping unit includes a clamp portion that is provided on the support table and adapted to engage with a first engagement portion provided on a lower surface of the pod body to restrict upward movement of the pod relative to the support table, a restriction pin that is movable upwardly and downwardly relative to the support table and adapted to engage with a second engagement portion provided on the lower surface of the pod body to restrict movement of the pod in a disengaging direction that causes disengagement between the first engagement portion and the clamp portion, and a vertically driving portion that moves the restriction pin up to/down from the second engagement portion.
    • 本发明涉及一种用于将货舱固定到装载端口中的支撑台的吊舱夹紧单元,所述吊舱包括能够在其内部存储晶片的舱体和盖子,所述装载端口具有打开的开启装置 /关闭盖子。 所述荚夹持单元包括夹紧部分,所述夹持部分设置在所述支撑台上并且适于与设置在所述荚果体的下表面上的第一接合部分接合,以限制所述荚相对于所述支撑台的向上移动;限制销, 可相对于支撑台向上和向下移动并且适于与设置在荚体主体的下表面上的第二接合部分接合,以限制荚果在分离方向上的移动,从而导致第一接合部分和夹紧部分之间的脱离 以及使所述限制销从所述第二接合部向上/向下移动的垂直驱动部。