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1. 发明授权

US07337670B2 Physical quantity sensor having multiple through holes 有权
标题翻译：物理量传感器具有多个通孔
公开(公告)号：US07337670B2
公开(公告)日：2008-03-04
申请号：US11649254
申请日：2007-01-04
申请人： Minoru Murata , Kenichi Yokoyama , Makoto Asai
发明人： Minoru Murata , Kenichi Yokoyama , Makoto Asai
IPC分类号： G01P15/00
CPC分类号： G01C19/5719 , G01P15/125
摘要： A semiconductor physical quantity sensor includes: a substrate; a semiconductor layer supported on the substrate; a trench disposed in the semiconductor layer; and a movable portion disposed in the semiconductor layer and separated from the substrate by the trench. The movable portion includes a plurality of through-holes, each of which penetrates the semiconductor layer in a thickness direction. The movable portion is capable of displacing on the basis of a physical quantity applied to the movable portion so that the physical quantity is detected by a displacement of the movable portion. The movable portion has a junction disposed among the through-holes. The junction has a trifurcate shape.
摘要翻译：半导体物理量传感器包括：基板; 支撑在基板上的半导体层; 设置在所述半导体层中的沟槽; 以及可移动部分，其设置在所述半导体层中并且通过所述沟槽与所述衬底分离。可动部包括在厚度方向上贯穿半导体层的多个贯通孔。可移动部分能够基于施加到可移动部分的物理量来移位，使得通过可移动部分的位移来检测物理量。可动部分具有设置在通孔中的接合部。交界处有三叉形。

2. 发明申请

US20070120205A1 Physical quantity sensor having multiple through holes 有权
标题翻译：物理量传感器具有多个通孔
公开(公告)号：US20070120205A1
公开(公告)日：2007-05-31
申请号：US11649254
申请日：2007-01-04
申请人： Minoru Murata , Kenichi Yokoyama , Makoto Asai
发明人： Minoru Murata , Kenichi Yokoyama , Makoto Asai
IPC分类号： G01P15/08
CPC分类号： G01C19/5719 , G01P15/125
摘要： A semiconductor physical quantity sensor includes: a substrate; a semiconductor layer supported on the substrate; a trench disposed in the semiconductor layer; and a movable portion disposed in the semiconductor layer and separated from the substrate by the trench. The movable portion includes a plurality of through-holes, each of which penetrates the semiconductor layer in a thickness direction. The movable portion is capable of displacing on the basis of a physical quantity applied to the movable portion so that the physical quantity is detected by a displacement of the movable portion. The movable portion has a junction disposed among the through-holes. The junction has a trifurcate shape.
摘要翻译：半导体物理量传感器包括：基板; 支撑在基板上的半导体层; 设置在所述半导体层中的沟槽; 以及可移动部分，其设置在所述半导体层中并且通过所述沟槽与所述衬底分离。可动部包括在厚度方向上贯穿半导体层的多个贯通孔。可移动部分能够基于施加到可移动部分的物理量来移位，使得通过可移动部分的位移来检测物理量。可动部分具有设置在通孔中的接合部。交界处有三叉形。

3. 发明申请

US20050229704A1 Physical quantity sensor having multiple through holes 有权
标题翻译：物理量传感器具有多个通孔
公开(公告)号：US20050229704A1
公开(公告)日：2005-10-20
申请号：US11095469
申请日：2005-04-01
申请人： Minoru Murata , Kenichi Yokoyama , Makoto Asai
发明人： Minoru Murata , Kenichi Yokoyama , Makoto Asai
IPC分类号： B81B3/00 , G01C19/56 , G01P15/125
CPC分类号： G01C19/5719 , G01P15/125
摘要： A semiconductor physical quantity sensor includes: a substrate; a semiconductor layer supported on the substrate; a trench disposed in the semiconductor layer; and a movable portion disposed in the semiconductor layer and separated from the substrate by the trench. The movable portion includes a plurality of through-holes, each of which penetrates the semiconductor layer in a thickness direction. The movable portion is capable of displacing on the basis of a physical quantity applied to the movable portion so that the physical quantity is detected by a displacement of the movable portion. The movable portion has a junction disposed among the through-holes. The junction has a trifurcate shape.
摘要翻译：半导体物理量传感器包括：基板; 支撑在基板上的半导体层; 设置在所述半导体层中的沟槽; 以及可移动部分，其设置在所述半导体层中并且通过所述沟槽与所述衬底分离。可动部包括在厚度方向上贯穿半导体层的多个贯通孔。可移动部分能够基于施加到可移动部分的物理量来移位，使得通过可移动部分的位移来检测物理量。可动部分具有设置在通孔中的接合部。交界处有三叉形。

4. 发明授权

US07178400B2 Physical quantity sensor having multiple through holes 有权
公开(公告)号：US07178400B2
公开(公告)日：2007-02-20
申请号：US11095469
申请日：2005-04-01
申请人： Minoru Murata , Kenichi Yokoyama , Makoto Asai
发明人： Minoru Murata , Kenichi Yokoyama , Makoto Asai
IPC分类号： G01P15/00 , G01P15/125
CPC分类号： G01C19/5719 , G01P15/125
摘要： A semiconductor physical quantity sensor includes: a substrate; a semiconductor layer supported on the substrate; a trench disposed in the semiconductor layer; and a movable portion disposed in the semiconductor layer and separated from the substrate by the trench. The movable portion includes a plurality of through-holes, each of which penetrates the semiconductor layer in a thickness direction. The movable portion is capable of displacing on the basis of a physical quantity applied to the movable portion so that the physical quantity is detected by a displacement of the movable portion. The movable portion has a junction disposed among the through-holes. The junction has a trifurcate shape.

5. 发明授权

US07662668B2 Method for separating a semiconductor substrate into a plurality of chips along with a cutting line on the semiconductor substrate 有权
标题翻译：将半导体衬底与半导体衬底上的切割线分离成多个芯片的方法
公开(公告)号：US07662668B2
公开(公告)日：2010-02-16
申请号：US11591496
申请日：2006-11-02
申请人： Kazuhiko Sugiura , Kenichi Yokoyama , Muneo Tamura , Tetsuo Fujii , Makoto Asai
发明人： Kazuhiko Sugiura , Kenichi Yokoyama , Muneo Tamura , Tetsuo Fujii , Makoto Asai
IPC分类号： H01L21/00
CPC分类号： H01L21/78 , B23K26/16 , B23K26/40 , B23K26/53 , B23K2101/40 , B23K2103/50 , H01L21/6835 , H01L21/6836 , H01L2221/68318 , H01L2221/68327 , H01L2221/68336 , H01L2924/3025
摘要： A separating device for separating a semiconductor substrate includes: a cutting element for cutting the semiconductor substrate into a plurality of chips along with a cutting line on the semiconductor substrate; an adsorbing element for adsorbing a dust on a surface of the semiconductor substrate by using electrostatic force; and a static electricity generating element for generating static electricity and for controlling the static electricity in order to remove the dust from the adsorbing element.
摘要翻译：用于分离半导体衬底的分离装置包括：用于将半导体衬底与半导体衬底上的切割线一起切割成多个芯片的切割元件; 用于通过使用静电力吸附在所述半导体衬底的表面上的灰尘的吸附元件; 以及用于产生静电并用于控制静电以便从吸附元件去除灰尘的静电发生元件。

6. 发明申请

US20070111476A1 Separating device for separating semiconductor substrate and method for separating the same 有权
标题翻译：用于分离半导体衬底的分离装置及其分离方法
公开(公告)号：US20070111476A1
公开(公告)日：2007-05-17
申请号：US11591496
申请日：2006-11-02
申请人： Kazuhiko Sugiura , Kenichi Yokoyama , Muneo Tamura , Tetsuo Fujii , Makoto Asai
发明人： Kazuhiko Sugiura , Kenichi Yokoyama , Muneo Tamura , Tetsuo Fujii , Makoto Asai
IPC分类号： H01L21/00
CPC分类号： H01L21/78 , B23K26/16 , B23K26/40 , B23K26/53 , B23K2101/40 , B23K2103/50 , H01L21/6835 , H01L21/6836 , H01L2221/68318 , H01L2221/68327 , H01L2221/68336 , H01L2924/3025
摘要： A separating device for separating a semiconductor substrate includes: a cutting element for cutting the semiconductor substrate into a plurality of chips along with a cutting line on the semiconductor substrate; an adsorbing element for adsorbing a dust on a surface of the semiconductor substrate by using electrostatic force; and a static electricity generating element for generating static electricity and for controlling the static electricity in order to remove the dust from the adsorbing element.
摘要翻译：用于分离半导体衬底的分离装置包括：用于将半导体衬底与半导体衬底上的切割线一起切割成多个芯片的切割元件; 用于通过使用静电力吸附在所述半导体衬底的表面上的灰尘的吸附元件; 以及用于产生静电并用于控制静电以便从吸附元件去除灰尘的静电发生元件。

7. 发明授权

US08279028B2 Electromagnetic relay 失效
标题翻译：电磁继电器
公开(公告)号：US08279028B2
公开(公告)日：2012-10-02
申请号：US12540732
申请日：2009-08-13
申请人： Kenichi Yokoyama , Shigemitsu Aoki
发明人： Kenichi Yokoyama , Shigemitsu Aoki
IPC分类号： H01H9/02 , H01H13/04
CPC分类号： H01H50/14 , H01H50/047 , H01H2001/5888 , H05K3/3415 , H05K3/3421 , H05K3/3447 , H05K2201/10659 , Y02P70/613
摘要： An electromagnetic relay including a body, a plurality of first surface-mount terminals projecting from the body, and at least one second terminal projecting from the body. Each first terminal includes a distal end portion adapted to be mounted on a surface of a circuit board. The second terminal includes a distal end portion adapted to be inserted into a through-hole of a circuit board. The distal end portion of the second terminal is positioned farther away from the body than the distal end portion of the first terminal.
摘要翻译：一种电磁继电器，包括主体，从主体突出的多个第一表面安装端子和从主体突出的至少一个第二端子。每个第一端子包括适于安装在电路板的表面上的远端部分。第二端子包括适于插入电路板的通孔中的远端部分。第二端子的远端部分比第一端子的远端部分远离主体定位。

8. 发明申请

US20060057758A1 Semiconductor physical quantity sensor and method for manufacturing the same 失效
公开(公告)号：US20060057758A1
公开(公告)日：2006-03-16
申请号：US11226248
申请日：2005-09-15
申请人： Kenichi Yokoyama
发明人： Kenichi Yokoyama
IPC分类号： H01L21/00
CPC分类号： B81C1/00952 , B81B2201/0235 , B81B2201/0242 , B81B2203/0136 , B81C2201/0167 , H01L31/18
摘要： A method for manufacturing a semiconductor physical quantity sensor including a support substrate, a movable electrode, a fixed electrode is provided. The method includes the steps of: preparing a multi-layered substrate; forming a compression stress layer on a part of a surface of the semiconductor layer; forming a trench in the semiconductor layer; and releasing the movable electrode from the substrate by removing the insulation film. In the step of releasing, the part of the semiconductor layer, on which the compression stress layer is disposed, is cambered by the compression stress toward a direction apart from the substrate.

9. 发明授权

US4626964A Electrical double layer capacitor and production of the same 失效
标题翻译：电双层电容器和生产相同
公开(公告)号：US4626964A
公开(公告)日：1986-12-02
申请号：US712758
申请日：1985-03-18
申请人： Siro Azuma , Kenichi Yokoyama , Tatsuya Kitai
发明人： Siro Azuma , Kenichi Yokoyama , Tatsuya Kitai
IPC分类号： H01G9/00 , H01G9/155
CPC分类号： H01G9/155 , Y02E60/13 , Y10T29/417
摘要： An electrical double layer capacitor containing at least one electrical double layer unit which comprises a pair of electrodes separated by a separator and positioned between a pair of collecting plates with an insulating ring being provided with around the periphery of the electrodes, wherein the electrode comprises active carbon fiber fabric carrying active carbon powder thereon, which has stable capacitance and longer discharging time due to small internal resistance.
摘要翻译：包含至少一个双电层单元的双电层电容器，其包括由分隔件分隔并且位于一对集电板之间的一对电极，绝缘环围绕电极的周边设置，其中电极包括有源在其上承载活性炭粉末的碳纤维织物由于内阻小而具有稳定的电容和较长的放电时间。

10. 发明申请

US20050095527A1 Radiation-sensitive resin composition 有权
标题翻译：辐射敏感树脂组合物
公开(公告)号：US20050095527A1
公开(公告)日：2005-05-05
申请号：US10679367
申请日：2003-10-07
申请人： Kenichi Yokoyama , Fumihisa Miyajima , Tomoki Nagai , Eiji Yoneda
发明人： Kenichi Yokoyama , Fumihisa Miyajima , Tomoki Nagai , Eiji Yoneda
IPC分类号： G03F7/004 , G03C1/76 , G03F7/038 , G03F7/039 , H01L21/027
CPC分类号： G03F7/0382 , G03F7/0392 , Y10S430/106 , Y10S430/111 , Y10S430/115 , Y10S430/12 , Y10S430/122
摘要： A positive tone radiation-sensitive resin composition comprising (A) a 1-substituted imidazole, (B) a photoacid generator, and (C-a) a resin protected by an acid-dissociable group, insoluble or scarcely soluble in alkali, but becoming soluble in alkali when the acid-dissociable group dissociates or (C-b) an alkali-soluble resin and an alkali solubility controller, and a negative tone radiation-sensitive resin composition comprising (A), (B), (D) an alkali-soluble resin, and (E) a compound that can crosslink the alkali-soluble resin in the presence of an acid. The radiation-sensitive resin composition of the present invention is a chemically amplified resist exhibiting high resolution and high storage stability as a composition, and suitable for microfabrication sensible to active radiations, for example, ultraviolet rays such as g-lines and i-lines, deep ultraviolet rays represented by a KrF excimer laser, ArF excimer laser, F2 excimer laser, and EUV excimer laser, and electron beams.
摘要翻译：一种正色散辐射敏感性树脂组合物，其包含（A）1-取代咪唑，（B）光酸产生剂和（Ca）由酸解离基团保护的树脂，其不溶或几乎不溶于碱，但可溶于（Cb）碱溶性树脂和碱溶性控制剂，以及包含（A），（B），（D）碱溶性树脂的负色调辐射敏感性树脂组合物，和（E）可在酸存在下使碱溶性树脂交联的化合物。本发明的放射线敏感性树脂组合物是作为组合物具有高分辨率和高储存稳定性的化学放大型抗蚀剂，适用于对活性辐射敏感的微细加工，例如，γ-线和i线等紫外线，由KrF准分子激光器，ArF准分子激光器，F 2激子和EUV准分子激光器表示的深紫外线以及电子束。

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