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    • 1. 发明授权
    • Ion implanting apparatus for forming ion beam shape
    • 用于形成离子束形状的离子注入装置
    • US07791040B2
    • 2010-09-07
    • US12219526
    • 2008-07-23
    • Minoru IkedaToshio Iida
    • Minoru IkedaToshio Iida
    • G21K5/04
    • C23C14/48H01J37/09H01J2237/0451H01J2237/31701
    • Aimed at providing an ion implantation apparatus elongated in period over which failure of a target work, due to deposition and release of ion species typically to and from the inner surface of a through-hole shaping a beam shape of ion beam, may be avoidable, reduced in frequency of exchange of an aperture component, and consequently improved in productivity, an aperture component shaping a beam shape has a taper opposed to the ion beam, in at least a part of inner surface of at least the through-hole, and has a thick thermal-sprayed film formed so as to cover the inner surface and therearound of the through-hole.
    • 旨在提供一种延长的离子注入装置,其中由于离子种类的沉积和释放通常到达和离开形成离子束的束形状的通孔的内表面,在该时间段内可以避免目标工作的故障, 降低孔径分量的交换频率,从而提高生产率,成形波束形状的孔径部件在至少通孔的内表面的至少一部分中具有与离子束相对的锥形,并且具有 形成为覆盖通孔的内表面和周围的厚的热喷涂膜。
    • 3. 发明授权
    • Accessing and checking the validity of control information stored in external storage
    • 访问和检查存储在外部存储器中的控制信息的有效性
    • US08234717B2
    • 2012-07-31
    • US12516789
    • 2007-03-05
    • Minoru IkedaRomuald RousseauKoichi Shirasuka
    • Minoru IkedaRomuald RousseauKoichi Shirasuka
    • G06F9/34G06F9/06
    • G06F21/88G06F21/62G06F21/78G06F2221/2107
    • [PROBLEMS] To more infallibly prevent leak of information because loss or theft. [MEANS FOR SOLVING PROBLEMS] It is judged whether or not read control information stored in a predetermined read control information storage area of an external storage is proper. If the judgment result shows that it is invalid, virtualized data stored in the external storage is decrypted, and genuine read control information virtualized in the virtualized data is extracted. It is judged whether or not the extracted genuine read control information is proper. If the extracted genuine read control information is proper, the virtualized genuine data in the virtualized data along with the genuine read control information is made usable by decrypting and creating the virtualized data, and improper read control information is stored in the read control information storage area. The proper genuine read control information and genuine data are encrypted to create virtualized data. The virtualized data is stored in a data storage area of the external storage corresponding to the read control information storage area.
    • [问题]为了更可靠地防止信息泄漏,因为丢失或被盗。 解决问题的手段判断存储在外部存储器的预定读取控制信息存储区域中的读取控制信息是否合适。 如果判断结果为无效,则存储在外部存储器中的虚拟化数据被解密,并且提取虚拟化数据中虚拟化的原始读取控制信息。 判断所提取的真实的读取控制信息是否合适。 如果所提取的真实的读取控制信息正确,则虚拟化数据中的虚拟化的真实数据与真实的读取控制信息一起被解密并创建虚拟化数据可用,并且不正确的读取控制信息被存储在读取的控制信息存储区域 。 适当的正确读取控制信息和正版数据被加密以创建虚拟化数据。 虚拟化数据被存储在与读取控制信息存储区域对应的外部存储器的数据存储区域中。