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    • 3. 发明授权
    • Clean device with clean box-opening/closing device
    • 清洁装置,带有干净的开箱/关闭装置
    • US07674083B2
    • 2010-03-09
    • US10556723
    • 2004-05-11
    • Toshihiko MiyajimaShigeki Ishiyama
    • Toshihiko MiyajimaShigeki Ishiyama
    • B65G1/133
    • H01L21/67751H01L21/67126H01L21/67772Y10S414/14
    • In a load port portion of a conventional clean device, it can happen that cleanliness is reduced by dust caused by wear of bellows and a lid is not separated by its weight from a main body. In order to solve such problems, a clean device is structured as follows: a lid of a clean box has a non-circular reception hole, a load port portion of the clean device has an opening/closing mechanism with a projection fittable in the receiving hole and has a buffer chamber, one end of bellows of the buffer chamber is connected to the bottom surface of the buffer chamber, and the other end of the bellows is fixed, on the outside of the buffer chamber, to raising/lowering means of a port door.
    • 在常规清洁装置的装载口部分中,可能发生由波纹管磨损引起的灰尘的清洁度,并且盖子的重量不与主体分离。 为了解决这些问题,清洁装置的结构如下:清洁箱的盖具有非圆形的接收孔,该清洁装置的装载端口部分具有一开口机构,该开闭机构具有可装配在接收件中的突出部 并具有缓冲室,缓冲室的波纹管的一端连接到缓冲室的底面,波纹管的另一端固定在缓冲室的外侧,用于升降装置 一个港口门。