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    • 7. 发明授权
    • Tunnel magnetoresistance effect device, and a portable personal device
    • 隧道磁阻效应器,以及便携式个人设备
    • US07359163B2
    • 2008-04-15
    • US10884946
    • 2004-07-07
    • Minoru AmanoYoshiaki Saito
    • Minoru AmanoYoshiaki Saito
    • G11B5/33
    • H01L43/08B82Y10/00B82Y25/00G01R33/093G01R33/098G11B5/3906G11B5/3909G11C11/15H01F10/3254H01F10/3268H01F10/3272H01L27/228
    • A TMR device comprising an antiferromagnetic layer made of an antiferromagnetic material containing Mn, a magnetization fixed layer made of a ferromagnetic material, a tunnel barrier layer made of a dielectric material, and a magnetization free layer made of a ferromagnetic material. An insulator material layer is inserted in the magnetization fixed layer at a distance from the antiferromagnetic material layer and the tunnel barrier layer. One material can be expressed by NX, where X is a first element selected from the group consisting of oxygen, nitrogen and carbon; and N is a second element, provided that the bonding energy between the first and the second elements is higher than the bonding energy between manganese and the first element. A second material can be expressed by MX, where M is an element selected from the group consisting of titanium, tantalum, vanadium, aluminum, europium, and scandium; and X is an element selected from the group consisting of oxygen, nitrogen and carbon. The tunnel magnetoresistance effect device suppresses the diffusion of Mn from the Mn based alloy constituting the antiferromagnetic material layer even after heat treatment is performed.
    • 一种TMR装置,包括由含铁的反铁磁材料制成的反铁磁层,由铁磁材料制成的磁化固定层,由介电材料制成的隧道势垒层和由铁磁材料制成的无磁化层。 将绝缘体材料层插入到与反铁磁性材料层和隧道势垒层相隔一定距离的磁化固定层中。 一种材料可由NX表示,其中X是选自氧,氮和碳的第一元素; 并且N是第二元素,条件是第一和第二元素之间的结合能高于锰与第一元素之间的键合能。 第二种材料可以由MX表示,其中M是选自钛,钽,钒,铝,铕和钪的元素; X是选自氧,氮和碳的元素。 隧道磁阻效应器件即使在进行热处理之后也能抑制构成反铁磁体层的Mn基合金的Mn扩散。
    • 8. 发明授权
    • Method for producing magnetic memory device
    • 磁存储器件的制造方法
    • US07247506B2
    • 2007-07-24
    • US11389281
    • 2006-03-27
    • Minoru AmanoTatsuya KishiYoshiaki SaitoTomomasa UedaHiroaki Yoda
    • Minoru AmanoTatsuya KishiYoshiaki SaitoTomomasa UedaHiroaki Yoda
    • H01L21/00
    • G11C11/15Y10T29/49021
    • There is provided a magnetic memory device which has a small switching current for a writing line and which has a small variation therein. A method for producing such a magnetic memory device includes: forming a magnetoresistive effect element; forming a first insulating film so as to cover the magnetoresistive effect element; forming a coating film so as to cover the first insulating film; exposing a top face of the magnetoresistive effect element; forming an upper writing line on the magnetoresistive effect element; exposing the first insulating film on a side portion of the magnetoresistive effect element by removing a part or all of the coating film; and forming a yoke structural member so as to cover at least a side portion of the upper writing line and so as to contact the exposed first insulating film on the side portion of the magnetoresistive effect element.
    • 提供了一种对于写入线具有小的开关电流并且其变化小的磁存储器件。 一种制造这种磁存储器件的方法包括:形成磁阻效应元件; 形成第一绝缘膜以覆盖磁阻效应元件; 形成涂膜以覆盖第一绝缘膜; 暴露磁阻效应元件的顶面; 在磁阻效应元件上形成上部写入线; 通过去除一部分或全部涂膜,将第一绝缘膜暴露在磁阻效应元件的侧面上; 以及形成轭结构件,以便覆盖上部书写线的至少一个侧面部分,以便与该磁阻效应元件侧面上暴露的第一绝缘膜接触。