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    • 1. 发明授权
    • Micro probing tip made by micro machine method
    • 微型探针微探针法制成
    • US06797528B2
    • 2004-09-28
    • US10053224
    • 2002-01-17
    • Mingo LiuJeng-Han Lee
    • Mingo LiuJeng-Han Lee
    • G01R3126
    • G01R3/00
    • A method and apparatus for forming a micro tip for a micro probe utilized in testing semiconductor integrated circuit devices. A thick oxide layer is deposited upon a substrate initially to form the micro tip. The micro tip for the micro probe can be defined from the thick oxide layer upon the substrate through a plurality of subsequent semiconductor manufacturing operations performed upon the substrate and layers thereof. A plurality of micro tips can be mass produced and efficiently utilized in association with increasingly smaller sizes of semiconductor integrated circuit devices.
    • 一种用于形成用于测试半导体集成电路器件的微探头微尖的方法和装置。 最初将厚氧化层沉积在基底上以形成微尖端。 用于微探针的微尖端可以通过在衬底及其层上执行的多个随后的半导体制造操作从衬底上的厚氧化物层定义。 可以与越来越小尺寸的半导体集成电路器件相关联地大量生产和有效地利用多个微尖端。