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    • 9. 发明授权
    • Trench MOS structure and method for forming the same
    • 沟槽MOS结构及其形成方法
    • US08912595B2
    • 2014-12-16
    • US13106852
    • 2011-05-12
    • Chin-Te KuoYi-Nan ChenHsien-Wen Liu
    • Chin-Te KuoYi-Nan ChenHsien-Wen Liu
    • H01L29/78H01L29/423H01L29/66H01L21/308
    • H01L29/7813H01L21/3083H01L29/4236H01L29/66666H01L29/66734H01L29/7827
    • A trench MOS structure is disclosed. The trench MOS structure includes a substrate, an epitaxial layer, a doping well, a doping region and a trench gate. The substrate has a first conductivity type, a first side and a second side opposite to the first side. The epitaxial layer has the first conductivity type and is disposed on the first side. The doping well has a second conductivity type and is disposed on the epitaxial layer. The doping region has the first conductivity type and is disposed on the doping well. The trench gate is partially disposed in the doping region. The trench gate has a bottle shaped profile with a top section smaller than a bottom section, both are partially disposed in the doping well. The bottom section of two adjacent trench gates results in a higher electrical field around the trench MOS structures.
    • 公开了一种沟槽MOS结构。 沟槽MOS结构包括衬底,外延层,掺杂阱,掺杂区和沟槽栅。 衬底具有第一导电类型,第一侧和与第一侧相对的第二侧。 外延层具有第一导电类型并且设置在第一侧。 掺杂阱具有第二导电类型并且设置在外延层上。 掺杂区域具有第一导电类型并且被布置在掺杂阱上。 沟槽栅极部分地设置在掺杂区域中。 沟槽门具有瓶形轮廓,其顶部部分小于底部部分,都部分地设置在掺杂井中。 两个相邻沟槽栅极的底部部分导致沟槽MOS结构周围的较高电场。