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    • 5. 发明授权
    • Multiple elliptical ball plasma apparatus
    • 多椭圆球等离子体装置
    • US07128805B2
    • 2006-10-31
    • US10640740
    • 2003-08-13
    • Wen-Liang HuangTing-Wei HuangJau-Chyn HuangChing-Sung HsiaoJu-Chia Kuo
    • Wen-Liang HuangTing-Wei HuangJau-Chyn HuangChing-Sung HsiaoJu-Chia Kuo
    • H01L21/306C23C16/00
    • H01J37/32247H01J37/32192H05H1/46
    • A plasma generating device, has a plurality of cavities shaped like half-ellipsoids, a plasma cavity, and microwave sources. The present invention takes advantage of geometrical properties of the propagation of electromagnetic waves by enclosing an electromagnetic field in the microwave range in overlapping cavities that together are shaped like a plurality of half ellipsoids. Each of the cavities has a first focus and a second focus, with the first foci of the cavities place close to each other. Microwaves entering the cavities at the second foci propagate inside the cavity and are focused at the first foci. The area around the first foci of both half ellipsoids forms a plasma cavity, providing a large volume filled with a microwave field. Thereby an increased volume of an electromagnetic field and thus of a plasma is achieved.
    • 等离子体产生装置具有多个形状为半椭圆形的空腔,等离子体腔和微波源。 本发明通过将微波范围内的电磁场包围在一起成形为多个半椭圆的重叠空腔中,利用电磁波传播的几何特性。 每个空腔具有第一焦点和第二焦点,空腔的第一焦点彼此靠近。 进入第二灶处的腔的微波在空腔内传播并聚焦在第一灶。 两个半椭圆体的第一焦点周围的区域形成等离子体空腔,提供充满微波场的大体积。 从而实现了电磁场的增加,从而实现了等离子体的增加。