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    • 5. 发明授权
    • Image sensor devices and methods for manufacturing the same
    • 图像传感器装置及其制造方法
    • US08557626B2
    • 2013-10-15
    • US12794257
    • 2010-06-04
    • Ming-Kai LiuTzu-Wei HuangJui-Hung ChangChia-Hui HuangTeng-Sheng Chen
    • Ming-Kai LiuTzu-Wei HuangJui-Hung ChangChia-Hui HuangTeng-Sheng Chen
    • H01L31/0232H01L31/0236
    • H01L31/0232H01L27/14623H01L27/14627H01L27/14685H01L31/0216H01L31/02164H01L31/02165
    • Disclosed is a method for forming an image sensor device. First, a lens is provided, and a first sacrificial element is then formed on the lens. Subsequently, an electromagnetic interference layer is formed on the lens and the first sacrificial element, and the first sacrificial element and the electromagnetic interference layer thereon are removed to form an electromagnetic interference pattern having an opening exposing a selected portion of the lens. A second sacrificial element is formed in the opening to cover a center region of the selected portion of the lens, while a peripheral region of the selected portion of the lens remains exposed. Next, a light-shielding layer is formed on the electromagnetic interference pattern, the second sacrificial element, and the peripheral region of the selected portion of the lens. Thereafter, the second sacrificial element and the light-shielding pattern thereon are removed to expose the center region of the selected portion of the lens as a light transmitting region.
    • 公开了一种用于形成图像传感器装置的方法。 首先,提供透镜,然后在透镜上形成第一牺牲元件。 随后,在透镜和第一牺牲元件上形成电磁干涉层,并且去除其上的第一牺牲元件和电磁干涉层,以形成具有暴露透镜的选定部分的开口的电磁干涉图案。 第二牺牲元件形成在开口中以覆盖透镜的所选部分的中心区域,而透镜的选定部分的周边区域保持暴露。 接下来,在电磁干涉图案,第二牺牲元件和透镜的选定部分的周边区域上形成遮光层。 此后,去除第二牺牲元件和其上的遮光图案以将透镜的选定部分的中心区域作为透光区域。
    • 6. 发明申请
    • IMAGE SENSOR DEVICES AND METHODS FOR MANUFACTURING THE SAME
    • 图像传感器装置及其制造方法
    • US20110298073A1
    • 2011-12-08
    • US12794257
    • 2010-06-04
    • Ming-Kai LiuTzu-Wei HuangJui-Hung ChangChia-Hui HuangTeng-Sheng Chen
    • Ming-Kai LiuTzu-Wei HuangJui-Hung ChangChia-Hui HuangTeng-Sheng Chen
    • H01L31/0232H01L31/18
    • H01L31/0232H01L27/14623H01L27/14627H01L27/14685H01L31/0216H01L31/02164H01L31/02165
    • Disclosed is a method for forming an image sensor device. First, a lens is provided, and a first sacrificial element is then formed on the lens. Subsequently, an electromagnetic interference layer is formed on the lens and the first sacrificial element, and the first sacrificial element and the electromagnetic interference layer thereon are removed to form an electromagnetic interference pattern having an opening exposing a selected portion of the lens. A second sacrificial element is formed in the opening to cover a center region of the selected portion of the lens, while a peripheral region of the selected portion of the lens remains exposed. Next, a light-shielding layer is formed on the electromagnetic interference pattern, the second sacrificial element, and the peripheral region of the selected portion of the lens. Thereafter, the second sacrificial element and the light-shielding pattern thereon are removed to expose the center region of the selected portion of the lens as a light transmitting region.
    • 公开了一种用于形成图像传感器装置的方法。 首先,提供透镜,然后在透镜上形成第一牺牲元件。 随后,在透镜和第一牺牲元件上形成电磁干涉层,并且去除其上的第一牺牲元件和电磁干涉层,以形成具有暴露透镜的选定部分的开口的电磁干涉图案。 第二牺牲元件形成在开口中以覆盖透镜的所选部分的中心区域,而透镜的选定部分的周边区域保持暴露。 接下来,在电磁干涉图案,第二牺牲元件和透镜的选定部分的周边区域上形成遮光层。 此后,去除第二牺牲元件和其上的遮光图案以将透镜的选定部分的中心区域作为透光区域。