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    • 3. 发明申请
    • Micro electro-kinetic pump having a nano porous membrane
    • 具有纳米多孔膜的微电动泵
    • US20070068815A1
    • 2007-03-29
    • US11303930
    • 2005-12-19
    • Ming-Chang Lu
    • Ming-Chang Lu
    • F04B37/02
    • F04B19/006
    • An electro-kinetic micro pump having a nano porous membrane is introduced. When a voltage is applied to two opposing sides of the nano porous membrane, an electro-osmotic flow can be induced in each nano pore of the membrane. Since the pore diameter of the nano porous membrane is in the range of nano meters, the fluid inside the nano pore would be almost unipolar. As a result, by compared to a traditional micro electro-kinetic pump, the electro-kinetic micro pump having the nano porous membrane can produce a larger flow rate. Moreover, since the required driving voltage for the present micro pump is much smaller than that for the traditional micro pump, energy conversion efficiency of the present pump can be greatly improved.
    • 引入具有纳米多孔膜的电动微型泵。 当将电压施加到纳米多孔膜的两个相对侧时,可以在膜的每个纳米孔中诱导电渗流。 由于纳米多孔膜的孔径在纳米范围内,纳米孔内的流体几乎是单极的。 结果,与传统的微电动泵相比,具有纳米多孔膜的电动微泵可以产生更大的流速。 此外,由于本微泵所需的驱动电压比传统的微型泵要小得多,所以可大大提高本泵的能量转换效率。
    • 4. 发明申请
    • Sputtering Target Having Alarm Function
    • 具有报警功能的溅射目标
    • US20130206589A1
    • 2013-08-15
    • US13372579
    • 2012-02-14
    • Shu-Hua HuMing-Chang LuPai-Ying SuJung-Sheng ChenHsin-Chun Yin
    • Shu-Hua HuMing-Chang LuPai-Ying SuJung-Sheng ChenHsin-Chun Yin
    • C23C14/54C23C14/34
    • C23C14/3407C23C14/54
    • The present invention provides a sputtering target having alarm function. The sputtering target comprises: a target body including a target material and having a bonding plane; a backing body bonded with the bonding plane of the target body; and at least one alarm body embedded in the target body. Wherein, a length of each alarm body, ratios of an area of each alarm body and the sum of area(s) of the at least one alarm body projected onto the bonding plane relative to an area of the bonding plane are controlled in a suitable range. Thus, the bonding strength and the heat-removing efficiency of the sputtering target can be maintained, and the distinguishable material of the alarm body can evolve a gas component distinguishable from a sputtering environment serving as an alarm signal for stopping the sputtering process in time.
    • 本发明提供具有报警功能的溅射靶。 溅射靶包括:包括目标材料并具有接合平面的靶体; 与目标体的接合面接合的背衬体; 以及至少一个嵌入目标体内的报警体。 其中,每个报警主体的长度,每个报警主体的面积的比率和投影到接合平面上相对于接合平面的区域的至少一个报警体的面积之和被控制在合适的 范围。 因此,可以保持溅射靶的接合强度和除热效率,并且报警体的可区分材料可以放出与作为用于在时间上停止溅射处理的报警信号的溅射环境可区分的气体成分。