专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20080268183A1 RETICLE CARRIER 审中-公开
公开(公告)号：US20080268183A1
公开(公告)日：2008-10-30
申请号：US11971277
申请日：2008-01-09
申请人： Ming Lung CHIU
发明人： Ming Lung CHIU
IPC分类号： B32B1/00
CPC分类号： H01L21/67353 , H01L21/67359 , H01L21/67393
摘要： A reticle carrier is disclosed in the invention, which may be combined with an inflator. The reticle carrier comprises a lid and a base; a combination of the lid and the base forms an internal space for receiving at least a reticle. The base includes a body having a plurality of through holes; each of the through holes has an inner-opening at one end and an outer opening at another end thereof; a plurality of tongues are disposed on the inner-opening of the through holes for elastically sealing the through holes. The inflator allows gases to fill into the reticle carrier via the through holes, so that the reticle carrier may be effectively cleaned by allowing gases to be filled into the reticle carrier, thus making the reticle carrier safer for storage.
摘要翻译：在本发明中公开了一种标线载体，其可以与充气机组合。标线架载体包括盖和基座; 盖和底座的组合形成用于接收至少一个掩模版的内部空间。底座包括具有多个通孔的主体; 每个通孔在一端具有内开口，在另一端具有外开口; 在通孔的内部开口上设置多个舌片，用于弹性地密封通孔。充气机允许气体通过通孔填充到标线载体中，使得通过允许气体填充到标线载体中，可以有效地清洁标线载体，从而使得掩模版载体更安全地存放。

IPRDB

热门服务

关于我们

友情链接

联系方式