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    • 1. 发明申请
    • METHOD FOR FABRICATION OF ORGANIC THIN-FILM TRANSISTOR
    • 有机薄膜晶体管的制造方法
    • US20080145966A1
    • 2008-06-19
    • US11923348
    • 2007-10-24
    • Min-Hua YangMeng-Che ChuangWei-Hsiang LinYu-Hsuan ChenChun-Hao HsuWen-Hsin HsiaoChih-Kung LeeWen-Jong Wu
    • Min-Hua YangMeng-Che ChuangWei-Hsiang LinYu-Hsuan ChenChun-Hao HsuWen-Hsin HsiaoChih-Kung LeeWen-Jong Wu
    • H01L51/40
    • H01L51/0021H01L51/0023
    • A method for fabricating organic thin-film transistors is disclosed. The method includes the steps of: providing a mold and a flexible substrate, wherein the mold comprises microstructures for defining source/drain electrode patterns on the substrate and at least an opening for feeding a solution material; forming an adhesive layer on the flexible substrate such that the mold is attached to the flexible substrate via the adhesive layer; feeding a solution material for forming source/drain electrodes via the opening of the mold and curing the solution material so as to form source/drain electrodes; removing the mold and forming a semiconductor layer on the source/drain electrodes; forming an insulator layer on the semiconductor layer and on the source/drain electrodes; forming a gate electrode on the insulator layer; and forming a protective layer for covering the organic thin-film transistor. The channel length of the thin film transistor is determined by the resolution of the microstructures of the mold.
    • 公开了一种用于制造有机薄膜晶体管的方法。 该方法包括以下步骤:提供模具和柔性基底,其中所述模具包括用于限定所述基底上的源/漏电极图案的微结构和用于馈送溶液材料的至少一个开口; 在所述柔性基板上形成粘合剂层,使得所述模具经由所述粘合剂层附接到所述柔性基板; 通过模具的开口供给用于形成源/漏电极的溶液,并固化溶液材料以形成源/漏电极; 去除模具并在源/漏电极上形成半导体层; 在所述半导体层和所述源极/漏极上形成绝缘体层; 在所述绝缘体层上形成栅电极; 以及形成用于覆盖有机薄膜晶体管的保护层。 薄膜晶体管的沟道长度由模具的微结构的分辨率确定。