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1. 发明申请

US20110254578A1 SPACE TRANSFORMER COMPRISING AN ISOLATION RESISTOR FOR A PROBE CARD, AND METHOD FOR MANUFACTURING SAME 审中-公开
标题翻译：包含探针卡的隔离电阻器的空间变压器及其制造方法
公开(公告)号：US20110254578A1
公开(公告)日：2011-10-20
申请号：US13121826
申请日：2009-09-24
申请人： Min Soo Kim , Sung Man Yoon
发明人： Min Soo Kim , Sung Man Yoon
IPC分类号： G01R31/00 , H01F41/00
CPC分类号： G01R3/00 , G01R1/07378 , Y10T29/4902
摘要： The invention provides a space transformer for a probe card including an isolation resistor for isolating electrical effects between adjacent channels to perform tests on a plurality of devices under test (DUTs) formed on a wafer at one time, the space transformer including: a plurality of ceramic layers on which circuits for testing the DUTs are printed and which are stacked on one another; an isolation resistor disposed between the ceramic layers and formed by printing a resistance material so as not to be exposed to the outside. The invention also provides a method of manufacturing a space transformer for a probe card including an isolation resistor for isolating electrical effects between adjacent channels to perform tests on a plurality of devices under test (DUTs) formed on a wafer at one time, the method including the steps of: printing a resistance material to form the isolation resistor in a ceramic sheet; stacking a ceramic sheet on the ceramic sheet on which the resistance material is printed such that the resistance material is disposed between the ceramic sheets; and sintering the stacked ceramic sheets.
摘要翻译：本发明提供一种用于探针卡的空间变压器，其包括用于隔离相邻通道之间的电气效应的隔离电阻器，以一次对在晶片上形成的多个待测器件（DUT）进行测试，所述空间变压器包括：多个在其上印刷用于测试DUT的电路并且彼此堆叠的陶瓷层; 隔离电阻器，设置在陶瓷层之间并通过印刷电阻材料形成，以便不暴露于外部。本发明还提供了一种制造用于探针卡的空间变压器的方法，该探针卡包括用于隔离相邻通道之间的电气效应的隔离电阻器，以一次对在晶片上形成的多个待测器件（DUT）进行测试，所述方法包括以下步骤：印刷电阻材料以在陶瓷片中形成隔离电阻器; 将陶瓷片堆叠在其上印刷有电阻材料的陶瓷片上，使得电阻材料设置在陶瓷片之间; 并烧结层叠的陶瓷片。

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