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    • 1. 发明授权
    • Surface inspection tool using a parabolic mirror
    • 表面检查工具使用抛物面镜
    • US06614519B1
    • 2003-09-02
    • US09696864
    • 2000-10-25
    • Milton Russell LattaWai Cheung LeungBob C. RobinsonTimothy Carl StrandAndrew Ching Tam
    • Milton Russell LattaWai Cheung LeungBob C. RobinsonTimothy Carl StrandAndrew Ching Tam
    • G01N2188
    • G01N21/9506
    • An inspection system using laser light directed at an off-axis parabolic mirror which focuses the beam on the surface being inspected and also serves as the collector for scattered and specular light returned from the surface is described. Specular and scattered light returned from the surface onto the parabolic mirror is divided into appropriate fields and directed onto detectors. In the preferred embodiment a polarized laser is used in conjunction with a polarizing beam splitter and a quarter-wave plate to route the reflected beam to a detector while allowing the original beam to be directed through the same optics. The parabolic mirror and selected additional components may be commonly mounted on a translatable stage which is moved along a radius of the disk when the optical inspection is being performed. Other components of the system such as the laser can remain in a fixed position. The system of the invention can be used to inspect one or both planar surfaces of the disk by providing duplication of selected components appropriately oriented with respect to the second surface.
    • 描述了一种使用指向离轴抛物面镜的激光的检查系统,其将光束聚焦在被检查的表面上,并且还用作用于从表面返回的散射和镜面光的收集器。 从表面返回到抛物面镜的镜面和散射光被划分成适当的场并被引导到探测器上。 在优选实施例中,偏振激光器与偏振分束器和四分之一波长板结合使用以将反射光束路由到检测器,同时允许原始光束被引导通过相同的光学器件。 抛物面镜和所选择的附加部件可以通常安装在可平移台上,当可执行光学检查时,抛物面镜沿着盘的半径移动。 诸如激光器的系统的其他部件可以保持在固定位置。 本发明的系统可用于通过提供相对于第二表面适当取向的选定部件的复制来检查盘的一个或两个平面。
    • 2. 发明授权
    • Apparatus for measuring curvature of magnetic read/write head sliders
    • 用于测量磁读/写磁头滑块的曲率的装置
    • US6075604A
    • 2000-06-13
    • US189311
    • 1998-11-10
    • Linden James CrawforthChie Ching PoonAndrew Ching Tam
    • Linden James CrawforthChie Ching PoonAndrew Ching Tam
    • G01B11/255G01B11/24
    • G01B11/255
    • An apparatus for measuring a curvature of an air bearing surface (ABS) of a read/write magnetic head slider. The apparatus has two lasers which direct laser beams toward the ABS. The beams strike the ABS and are specularly reflected. The reflected beams are directed toward a position sensing optical detector. The distance between the points where the beams strike the detector is indicative of the curvature of the ABS. The beams my be alternately pulsed so that the detector outputs a DC-biased square wave signal, the voltage-step difference of which indicates the curvature. In another embodiment, a single laser beam is scanned by a scanner and passed through a scan lens. The scan lens is located one focal length from the scanner. A reflected laser beam is reflected from the ABS and is collected by the scan lens. The reflected laser beam is then directed toward a position sensing optical detector. The detector is located outside the focal plane of the scan lens. The position of the laser beam on the detector is dependent upon the curvature of the ABS. Then the magnitude of the detector output provides a measure of the curvature.
    • 一种用于测量读/写磁头滑块的空气轴承表面(ABS)的曲率的装置。 该装置具有将激光束引向ABS的两个激光器。 光束撞击ABS并被镜面反射。 反射光束被指向位置感测光学检测器。 光束撞击检测器的点之间的距离表示ABS的曲率。 光束交替脉冲,使得检测器输出一个直流偏置方波信号,其电压阶差表示曲率。 在另一个实施例中,单个激光束被扫描仪扫描并通过扫描透镜。 扫描镜头位于扫描仪的一个焦距处。 反射的激光束从ABS反射并被扫描透镜收集。 然后将反射的激光束导向位置感测光学检测器。 检测器位于扫描透镜的焦平面外。 激光束在检测器上的位置取决于ABS的曲率。 然后检测器输出的幅度提供曲率的量度。
    • 3. 发明授权
    • Method of laser cutting a metal line on an MR head with a laser
    • 用激光切割MR头上的金属线的方法
    • US06049056A
    • 2000-04-11
    • US4693
    • 1998-01-08
    • Hamid BalamaneChie Ching PoonNeil Leslie RobertsonAndrew Ching Tam
    • Hamid BalamaneChie Ching PoonNeil Leslie RobertsonAndrew Ching Tam
    • B23K26/40B23K26/08
    • B23K26/40B23K26/362B23K2203/26B23K2203/50Y10T29/49032
    • A thin film conductive line is formed between MR pads on an MR head for protecting an MR sensor from electrostatic discharge (ESD) during assembly steps between row level fabrication of the head and prior to merge of a head stack assembly with a disk stack assembly. The conductive line may have a reduced thickness delete pad. A laser beam having a fluence sufficient to sever the conductive line at the delete pad but insufficient to damage or cause debris from structure underlying or surrounding the conductive line is used to sever the conductive line. The method traverses minimum energy, short laser pulses at a high pulse rate across the line, the melted material withdrawing from the melted area and being heaped on top of adjacent portions of the delete pad by surface tension and the melted material cooling to room temperature before the next pulse so that there is no cumulative heating and therefore no damage to or debris from the underlying structure. The conductive material of the line is incrementally plowed to each side of a severed path by successive overlapping laser pulses so that when the series of laser pulses has traversed the width of the delete pad the conductive line has been severed.
    • 在MR头上的MR焊盘之间形成薄膜导电线,用于在磁头堆叠组件与磁盘堆叠组件合并之前的组装步骤期间保护MR传感器免受静电放电(ESD)的影响。 导线可以具有减小的厚度删除焊盘。 激光束具有足够的能量来切断在删除焊盘处的导线,但是不足以损坏或者导致来自导电线下面或周围的结构的碎屑被切断导线。 该方法穿过线路以高脉冲速度穿过最小能量,短激光脉冲,熔化的材料从熔化区域退出,并通过表面张力堆积在删除焊盘的相邻部分的顶部,并将熔融的材料冷却至室温 下一个脉冲,使得没有累积加热,因此没有来自底层结构的损坏或碎屑。 线的导电材料通过连续重叠的激光脉冲逐渐地被切割到切断路径的每一侧,使得当一系列激光脉冲已经穿过删除焊盘的宽度时,导线已被切断。
    • 4. 发明授权
    • Multiple channel acousto-optic modulators
    • 多声道声光调制器
    • US5963569A
    • 1999-10-05
    • US825305
    • 1997-03-28
    • Peter Michael BaumgartJames Hammond BrannonChie Ching PoonAndrew Ching Tam
    • Peter Michael BaumgartJames Hammond BrannonChie Ching PoonAndrew Ching Tam
    • G11B7/085G02F1/11G11B7/135G02F1/33H01S3/10
    • G02F1/113G02F1/332
    • A multichannel acousto-optic modulator (MCAOM) is described which uses a crystal with a plurality of mounting faces for acoustic transducers. The mounting faces are oriented so that the acoustic transducers mounted thereon generate acoustic fields which intersect the incident laser beam at a common angle, i.e., the Bragg angle. A two channel MCAOM uses two transducers. Extension to any higher number of channels follows accordingly. Energizing any of the transducers causes a corresponding first order beam to be diffracted out. Since the acoustic field for each transducer intersects the incident beam with a unique orientation, each first order beam is diffracted out on a unique axis. A system utilizing an MCAOM has electronic means for controlling the driving signals to the transducers to control each channel as required by the application. Amplitude and frequency modulation of the driving signals allows the intensity and angle of the beams to be controlled.
    • 描述了使用具有用于声学换能器的多个安装面的晶体的多声道声光调制器(MCAOM)。 安装面被定向成使得安装在其上的声学换能器产生以入射激光束以相同的角度即布拉格角相交的声场。 双通道MCAOM使用两个换能器。 扩展到任何更多数量的频道都是相应的。 激励任何一个换能器使相应的一阶光束被衍射。 由于每个传感器的声场以独特的取向与入射光束相交,所以每一个第一阶光束在独特的轴上被衍射。 使用MCAOM的系统具有用于控制到换能器的驱动信号的电子装置,以根据应用的要求来控制每个通道。 驱动信号的幅度和频率调制允许控制光束的强度和角度。