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    • 5. 发明授权
    • Plasma processing apparatus and plasma processing method
    • 等离子体处理装置和等离子体处理方法
    • US08852389B2
    • 2014-10-07
    • US13233082
    • 2011-09-15
    • Taichi MondenJunichi KitagawaJun YamashitaHideo Nakamura
    • Taichi MondenJunichi KitagawaJun YamashitaHideo Nakamura
    • C23C16/00C23F1/00H01L21/306H01J37/32
    • H01J37/32192
    • There is provided a plasma processing apparatus capable of stably generating plasma by suppressing oscillation of a plasma potential, and capable of preventing contamination caused by sputtering a facing electrode made of metal. A high frequency bias power is applied to an electrode within a mounting table for mounting a target object thereon. An extended protrusion 60 is formed at an inner peripheral surface of a cover member 27. The extended protrusion 60 is formed toward a plasma generation space S and serves as a facing electrode facing an electrode 7 within a mounting table 5 with the plasma generation space S therebetween. A ratio of a surface area of the facing electrode with respect to that of an electrode for bias (facing electrode surface area/bias electrode area) is in a range of from about 1 to about 5.
    • 提供了一种能够通过抑制等离子体电位的振荡来稳定地产生等离子体的等离子体处理装置,并且能够防止溅射由金属制成的面对电极引起的污染。 将高频偏置功率施加到用于在其上安装目标物体的安装台内的电极。 在盖构件27的内周面形成有延伸突起60.延伸突起60朝向等离子体产生空间S形成,并且用作与安装台5内的电极7对置的面对电极,其中等离子体产生空间S 之间。 面对电极的表面积相对于用于偏置的电极(面对电极表面积/偏置电极面积)的表面积的比率在约1至约5的范围内。
    • 10. 发明授权
    • Available input-output power estimating device for secondary battery
    • 二次电池可用的输入 - 输出功率估计装置
    • US07486079B2
    • 2009-02-03
    • US11149558
    • 2005-06-10
    • Daijiro YumotoHideo Nakamura
    • Daijiro YumotoHideo Nakamura
    • G01N27/416
    • G01R31/3648G01R31/3624G01R31/3651
    • An available input-output power estimating device for a secondary battery includes a parameter estimating section substituting a measured current value I and a measured voltage value V into an adaptive digital filter using an equivalent circuit model of the secondary battery for thereby collectively estimating values of parameters in the equivalent circuit model, an open circuit voltage calculator substituting I, V, and the estimated parameter values into the equivalent circuit model for calculating an open circuit voltage {circumflex over (V)}0, an available input power estimating section estimating an available input power Pin of the secondary battery using components (ân,{circumflex over (b)}n), associated with a direct term in the equivalent circuit model, in the estimated parameters, the open circuit voltage estimate value {circumflex over (V)}0 and an upper limit voltage Vmax of the terminal voltage, and an available output power estimating section estimating an available output power Pout for the secondary battery using (ân,{circumflex over (b)}n), {circumflex over (V)}0 and a lower limit voltage Vmin of the terminal voltage.
    • 用于二次电池的可用输入 - 输出功率估计装置包括参数估计部分,其使用二次电池的等效电路模型将测量的电流值I和测量的电压值V代入自适应数字滤波器,从而共同估计参数值 在等效电路模型中,开路电压计算器将I,V和估计的参数值代入用于计算开路电压(V(V)} 0的开路电压的等效电路模型),可用输入功率估计部分估计可用的 输入功率二次电池的引脚使用组件(â,âlex(b)} n),与等效电路模型中的直接项相关联,在估计参数中,开路电压估计值{ } 0和终端电压的上限电压Vmax,以及估计可用输出的可用输出功率估计部 使用(â,{circumflex over(b)} n),{circumflex over(V)} 0和端子电压的下限电压Vmin来实现二次电池的功率Pout。