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1. 发明申请

US20050166681A1 Pressure sensor having a metal diaphragm responsive to pressure 有权
标题翻译：压力传感器具有响应于压力的金属隔膜
公开(公告)号：US20050166681A1
公开(公告)日：2005-08-04
申请号：US11019264
申请日：2004-12-23
申请人： Michitoshi Onoda , Michihiro Makita , Takeshi Ninomiya , Hirokazu Kubo
发明人： Michitoshi Onoda , Michihiro Makita , Takeshi Ninomiya , Hirokazu Kubo
IPC分类号： G01L19/06 , G01L9/00 , G01L9/04 , F17D3/00
CPC分类号： G01L19/0645 , G01L19/143
摘要： A pressure sensor is composed of a cylindrical connector case firmly connected to a housing and a pressure-detecting chamber formed between the connector case and the housing. The pressure-detecting chamber is confined by a metal diaphragm, an outer peripheral portion of which is firmly held at a portion connecting the connector case and the housing. A relatively thick ring plate is connected to a mounting surface of the housing, and the outer peripheral portion of the metal diaphragm is sandwiched between the ring plate and a pushing plate placed on and connected to the ring plate. Thus, the pressure-detecting chamber containing a sensing element therein is surely sealed even if the housing is made of a material, such as aluminum, which is different from that of the metal diaphragm.
摘要翻译：压力传感器由牢固地连接到壳体的圆筒形连接器壳体和形成在连接器壳体和壳体之间的压力检测室组成。压力检测室被金属隔膜限制，金属隔膜的外周部牢固地保持在连接壳体和壳体的部分。相对厚的环板连接到壳体的安装表面，并且金属隔膜的外周部分夹在环板和放置在环板上并与环板连接的推板之间。因此，即使壳体由与金属隔膜的材料不同的材料制成，也可以确保密封容纳有感应元件的压力检测室。

2. 发明授权

US07121144B2 Pressure sensor having a metal diaphragm responsive to pressure 有权
标题翻译：压力传感器具有响应于压力的金属隔膜
公开(公告)号：US07121144B2
公开(公告)日：2006-10-17
申请号：US11019264
申请日：2004-12-23
申请人： Michitoshi Onoda , Michihiro Makita , Takeshi Ninomiya , Hirokazu Kubo
发明人： Michitoshi Onoda , Michihiro Makita , Takeshi Ninomiya , Hirokazu Kubo
IPC分类号： G01F7/08
CPC分类号： G01L19/0645 , G01L19/143
摘要： A pressure sensor is composed of a cylindrical connector case firmly connected to a housing and a pressure-detecting chamber formed between the connector case and the housing. The pressure-detecting chamber is confined by a metal diaphragm, an outer peripheral portion of which is firmly held at a portion connecting the connector case and the housing. A relatively thick ring plate is connected to a mounting surface of the housing, and the outer peripheral portion of the metal diaphragm is sandwiched between the ring plate and a pushing plate placed on and connected to the ring plate. Thus, the pressure-detecting chamber containing a sensing element therein is surely sealed even if the housing is made of a material, such as aluminum, which is different from that of the metal diaphragm.
摘要翻译：压力传感器由牢固地连接到壳体的圆筒形连接器壳体和形成在连接器壳体和壳体之间的压力检测室组成。压力检测室被金属隔膜限制，金属隔膜的外周部牢固地保持在连接壳体和壳体的部分。相对厚的环板连接到壳体的安装表面，并且金属隔膜的外周部分夹在环板和放置在环板上并与环板连接的推板之间。因此，即使壳体由与金属隔膜的材料不同的材料制成，也可以确保密封容纳有感应元件的压力检测室。

3. 发明授权

US4833912A Flow measuring apparatus 失效
标题翻译：流量计
公开(公告)号：US4833912A
公开(公告)日：1989-05-30
申请号：US145118
申请日：1988-01-19
申请人： Minoru Ohta , Michitoshi Onoda , Kazuhiko Miura , Tadashi Hattori
发明人： Minoru Ohta , Michitoshi Onoda , Kazuhiko Miura , Tadashi Hattori
IPC分类号： G01F1/68 , G01F1/692 , G01F1/696 , G01F1/698 , G01F9/00 , G01F9/02
CPC分类号： G01F1/698 , G01F1/692 , G01F1/6965 , G01F1/6983 , G01F9/001 , G01F9/023
摘要： A flow measuring apparatus includes a resistance layer for detecting a flow rate within a passage and an additional resistance layer for burning off deposits formed by suspended particles the like, and both of the resistance layers are formed on only one substrate. When suspended particles are deposited on the substrate to form deposits thereon, the deposits are burned off and removed from the substrate by supplying power to the additional resistance layer.
摘要翻译：流量测量装置包括用于检测通道内的流量的电阻层和用于燃烧由悬浮颗粒等形成的沉积物的附加电阻层，并且两个电阻层仅形成在一个基板上。当悬浮颗粒沉积在基底上以在其上形成沉积物时，通过向附加电阻层供电，将沉积物从基板上烧掉并从基板上除去。

4. 发明授权

US4413502A Gas detecting sensor 失效
标题翻译：气体检测传感器
公开(公告)号：US4413502A
公开(公告)日：1983-11-08
申请号：US352562
申请日：1982-02-26
申请人： Minoru Ohta , Yutaka Hattori , Tomio Kawakami , Michitoshi Onoda
发明人： Minoru Ohta , Yutaka Hattori , Tomio Kawakami , Michitoshi Onoda
IPC分类号： F02B75/02 , G01N27/12
CPC分类号： G01N27/12 , F02B2075/027
摘要： A high sensitive and high responsive gas detecting sensor for detecting the partial pressure of oxygen gas in the exhaust gases is disclosed. The sensor is provided with a sensing element having an electrical characteristic in response to the partial pressure of oxygen gas, a ceramic base member which supports the sensing element so that the sensing element is exposed to the exhaust gases, and electric current conducting means for supplying an electric current to the sensing element. The sensing element is formed of alloy ceramic material composed of 20 to 60 mol percent of cobalt monoxide, 20 to 60 mol percent of magnesium monoxide and 10 to 50 mol percent of nickel monoxide. In the preferred embodiment, the base member is formed into a plate shape and the sensing element is formed on the base member like a film.
摘要翻译：公开了一种用于检测废气中氧气分压的高灵敏度和高响应性气体检测传感器。传感器具有响应于氧气分压而具有电特性的感测元件，支撑感测元件以使感测元件暴露于废气的陶瓷基座部件，以及用于供给到感测元件的电流。传感元件由合金陶瓷材料形成，该合金陶瓷材料由20至60摩尔％的一氧化钴，20至60摩尔％的一氧化碳和10至50摩尔％的一氧化镍组成。在优选实施例中，基底件形成为板状，并且感测元件像薄膜一样地形成在基底构件上。

5. 发明授权

US4761995A Direct-heated flow measuring apparatus having improved sensitivity and response speed 失效
标题翻译：具有提高的灵敏度和响应速度的直接加热流量测量装置
公开(公告)号：US4761995A
公开(公告)日：1988-08-09
申请号：US46938
申请日：1987-05-05
申请人： Minoru Ohta , Kazuhiko Miura , Michitoshi Onoda , Tadashi Hattori
发明人： Minoru Ohta , Kazuhiko Miura , Michitoshi Onoda , Tadashi Hattori
IPC分类号： G01F1/68 , F02D41/18 , G01F1/684 , G01F1/692 , G01F1/698 , G01F15/12 , G01M15/00
CPC分类号： G01F1/692 , F02D41/187 , G01F1/684 , G01F1/698
摘要： In a direct-heated flow measuring apparatus including a thin-plate sensing element supported by a supporting member in a passage, a sensing portion for generating heat and detecting the temperature thereof is positioned on the downstream side of the sensing element with respect to a fluid stream.
摘要翻译：在包括由通道中的支撑构件支撑的薄板感测元件的直接加热流量测量装置中，用于产生热并检测其温度的感测部分相对于流体位于感测元件的下游侧流。

6. 发明授权

US5383993A Method of bonding semiconductor substrates 失效
标题翻译：半导体衬底接合方法
公开(公告)号：US5383993A
公开(公告)日：1995-01-24
申请号：US118784
申请日：1993-09-10
申请人： Mitsutaka Katada , Kazuhiro Tsuruta , Seiji Fujino , Michitoshi Onoda
发明人： Mitsutaka Katada , Kazuhiro Tsuruta , Seiji Fujino , Michitoshi Onoda
IPC分类号： H01L21/20 , H01L21/02
CPC分类号： H01L21/2007 , Y10S148/012 , Y10S148/135 , Y10S148/159
摘要： In a method of bonding semiconductor substrates, a plurality of the semiconductor substrates are first prepared. Surfaces of the semiconductor substrates are mirror-polished. The mirror-polished surface of at least one of the semiconductor substrates is then provided with a hydrophilic property in such a way that an oxide layer is formed on the mirror-polished surface by exposing the mirror-polished surface to an atmosphere of at least one of an oxygen ion and an oxygen radical. A water molecule is then adhered to the mirror-polished surface. The semiconductor substrates then contact with each other through the mirror-polished surface. The contacted semiconductor substrates are then heated. According to such a method of bonding, the semiconductor substrates are strongly bonded to each other with hardly an unbonded region even if the semiconductor substrates are heated at a low temperature.
摘要翻译：在半导体基板的接合方法中，首先准备多个半导体基板。对半导体衬底的表面进行镜面抛光。然后，至少一个半导体基板的镜面抛光表面具有亲水特性，使得通过将镜面抛光表面暴露于至少一个的气氛中，在镜面抛光表面上形成氧化物层的氧离子和氧自由基。然后将水分子粘附到镜面抛光的表面上。然后半导体衬底通过镜面抛光表面相互接触。然后将接触的半导体衬底加热。根据这样的接合方法，即使半导体基板在低温下被加热，半导体基板也几乎没有未结合区域而彼此牢固地结合。

7. 发明授权

US4783996A Direct-heated flow measuring apparatus 失效
标题翻译：直热式流量测量仪
公开(公告)号：US4783996A
公开(公告)日：1988-11-15
申请号：US824265
申请日：1986-01-30
申请人： Minoru Ohta , Kazuhiko Miura , Michitoshi Onoda , Yukio Iwasaki , Tadashi Hattori
发明人： Minoru Ohta , Kazuhiko Miura , Michitoshi Onoda , Yukio Iwasaki , Tadashi Hattori
IPC分类号： G01F1/68 , G01F1/684 , G01F1/692 , G01P5/12
CPC分类号： G01P5/12 , G01F1/6845
摘要： A direct-heated flow measuring apparatus including a substrate, a film resistor for generating heat and sensing its temperature, and a feedback control circuit for controlling the heat generated by the film resistor so that the temperature of the film resistor is a predetermined value. Also, provided in the substrate is an aperture or the like for throttling the heat transfer of the film resistor. Further, a reinforced structure is formed on the part of substrate where the aperture or the like is formed.
摘要翻译：一种直流式流量测量装置，包括基板，用于产生热量并感测其温度的薄膜电阻器，以及用于控制由薄膜电阻器产生的热量使得薄膜电阻器的温度为预定值的反馈控制电路。此外，设置在基板中的是用于节流膜电阻器的传热的孔等。此外，在形成有孔等的基板的一部分上形成加强结构。

8. 发明授权

US4453397A Gas detecting sensor 失效
标题翻译：气体检测传感器
公开(公告)号：US4453397A
公开(公告)日：1984-06-12
申请号：US354794
申请日：1982-03-04
申请人： Minoru Ohta , Yutaka Hattori , Tomio Kawakami , Michitoshi Onoda
发明人： Minoru Ohta , Yutaka Hattori , Tomio Kawakami , Michitoshi Onoda
IPC分类号： G01N27/12
CPC分类号： G01N27/122 , G01N27/12
摘要： A gas detecting sensor for precisely detecting the partial pressure of oxygen gas in the exhaust gases without being affected by the change of the temperature of the environment thereof, is disclosed. The sensor is provided with a ceramic base member, a film-shaped gas sensing element having a characteristic in response to the partial pressure of oxygen gas which is held by the base member so as to be exposed to the exhaust gases, a film shaped temperature sensing element having temperature coefficient of resistance substantially equal to that of the gas sensing element, which is held by the base member so as to be isolated from the exhaust gases, and an electric current wherein the gas and the temperature sensing elements are connected to each other in series to form an electric junction therebetween, from which output voltage is taken. In the preferred embodiment, the temperature sensing element is embedded within the base member and a heating member is further provided for maintaining both elements within a temperature range in which temperature coefficient of resistance of both elements are substantially equal to each other.
摘要翻译：公开了一种气体检测传感器，用于精确地检测废气中氧气的分压而不受其环境温度变化的影响。传感器设置有陶瓷基体部件，膜状气体检测元件，其具有响应于由基底部件保持以暴露于废气的氧气分压的特性，膜状温度感测元件，其温度系数电阻基本上等于由基底构件保持以与排气隔离的气体感测元件的电阻温度系数，以及电流，其中气体和温度感测元件连接到每个串联地形成其间的电连接，从其输出电压。在优选实施例中，温度感测元件嵌入在基座构件内，并且进一步提供加热构件，用于将两个元件保持在两个元件的电阻温度系数彼此基本相等的温度范围内。

9. 发明授权

US4843882A Direct-heated flow measuring apparatus having improved sensitivity response speed 失效
标题翻译：具有提高的灵敏度响应速度的直接加热流量测量装置
公开(公告)号：US4843882A
公开(公告)日：1989-07-04
申请号：US223673
申请日：1988-07-25
申请人： Minoru Ohta , Michitoshi Onoda , Kazuhiko Miura , Seizi Huzino , Tadashi Hattori , Kenji Kanehara , Masanori Fukutani
发明人： Minoru Ohta , Michitoshi Onoda , Kazuhiko Miura , Seizi Huzino , Tadashi Hattori , Kenji Kanehara , Masanori Fukutani
IPC分类号： G01F1/68 , G01F1/684 , G01F1/692 , G01P5/12
CPC分类号： G01F1/684 , G01F1/692 , G01P5/12
摘要： In a direct-heated flow measuring apparatus including a film resistor having a substrate supported by a supporting member in a passage, at least one face of the substrate on the upstream side thereof is sloped with respect to a fluid stream within the passage.
摘要翻译：在包括具有由通道中的支撑构件支撑的基板的膜电阻器的直接加热流量测量装置中，其上游侧的基板的至少一个面相对于通道内的流体流倾斜。

10. 发明授权

US4756190A Direct-heated flow measuring apparatus having uniform characteristics 失效
标题翻译：具有均匀特性的直热式流量测量装置
公开(公告)号：US4756190A
公开(公告)日：1988-07-12
申请号：US894895
申请日：1986-08-08
申请人： Minoru Ohta , Michitoshi Onoda , Kazuhiko Miura , Seizi Huzino , Tadashi Hattori
发明人： Minoru Ohta , Michitoshi Onoda , Kazuhiko Miura , Seizi Huzino , Tadashi Hattori
IPC分类号： G01F1/692 , G01F1/68
CPC分类号： G01F1/692
摘要： In a direct-heated flow measuring apparatus including a film resistor having a substrate and a resistance layer thereon, the substrate is supported by a supporting member in a passage. Provided between the substrate and the supporting member is an adiabatic member for enhancing the adiabatic effect of the resistance layer. The substrate is adhered by adhesives having an excellent thermal conductivity coefficient to the adiabatic member, and the supporting member is also adhered by adhesives having an excellent thermal conductivity coefficient to the adiabatic member.
摘要翻译：在包括具有基板和电阻层的薄膜电阻器的直接加热流量测量装置中，基板由通道中的支撑构件支撑。在基板和支撑部件之间设置有用于增强电阻层的绝热效果的绝热部件。基材通过具有优异导热系数的粘合剂粘合到绝热构件上，并且支撑构件也通过具有优异导热系数的粘合剂粘合到绝热构件上。

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