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1. 发明授权

US07972882B2 Microresonator systems and methods of fabricating the same 有权
标题翻译：微谐振器系统及其制造方法
公开(公告)号：US07972882B2
公开(公告)日：2011-07-05
申请号：US12479604
申请日：2009-06-05
申请人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
发明人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
IPC分类号： H01L21/00
CPC分类号： H01S5/1075 , B82Y20/00 , G02B6/12007 , H01S5/021 , H01S5/0215 , H01S5/026 , H01S5/0422 , H01S5/1032 , H01S5/1042 , H01S5/2063 , H01S5/222 , H01S5/3211 , H01S5/34306
摘要： Various embodiments of the present invention are related to microresonator systems and to methods for fabricating the microresonator systems. In one embodiment, a method of fabricating a microresonator system comprises: forming a multilayer system having a bottom layer, a top layer, and an intermediate layer having one or more quantum wells and sandwiched between the bottom layer and the top layer; embedding at least one waveguide in a substrate having a top surface, the at least one waveguide positioned adjacent to the top surface of the substrate; wafer bonding the top layer of the multilayer system to the top surface of the substrate; forming a microresonator in the multilayer system, wherein at least a portion of a peripheral annular region of the microresonator is portioned above the at least one waveguide; and forming a current isolation region in at least a portion of a central region of the microresonator.
摘要翻译：本发明的各种实施例涉及微谐振器系统和用于制造微谐振器系统的方法。在一个实施例中，制造微谐振器系统的方法包括：形成具有底层，顶层和具有一个或多个量子阱并夹在底层和顶层之间的中间层的多层系统; 在具有顶表面的衬底中嵌入至少一个波导，所述至少一个波导定位成与衬底的顶表面相邻; 将多层系统的顶层晶片结合到衬底的顶表面; 在所述多层系统中形成微谐振器，其中所述微谐振器的外围环形区域的至少一部分被分配在所述至少一个波导的上方; 以及在所述微谐振器的中心区域的至少一部分中形成电流隔离区。

2. 发明授权

US07561770B2 Microresonator systems and methods of fabricating the same 有权
标题翻译：微谐振器系统及其制造方法
公开(公告)号：US07561770B2
公开(公告)日：2009-07-14
申请号：US11888016
申请日：2007-07-30
申请人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
发明人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
IPC分类号： G02B6/26 , G02B6/42
CPC分类号： H01S5/1075 , B82Y20/00 , G02B6/12007 , H01S5/021 , H01S5/0215 , H01S5/026 , H01S5/0422 , H01S5/1032 , H01S5/1042 , H01S5/2063 , H01S5/222 , H01S5/3211 , H01S5/34306
摘要： Various embodiments of the present invention are related to microresonator systems that can be used as a laser, a modulator, and a photodetector and to methods for fabricating the microresonator systems. In one embodiment, a microresonator system comprises a substrate having a top surface layer, at least one waveguide embedded within the substrate, and a microdisk having a top layer, an intermediate layer, a bottom layer, current isolation region, and a peripheral annular region. The bottom layer of the microdisk is in electrical communication with the top surface layer of the substrate and is positioned so that at least a portion of the peripheral annular region is located above the at least one waveguide. The current isolation region is configured to occupy at least a portion of a central region of the microdisk and has a relatively lower refractive index and relatively larger bandgap than the peripheral annular region.
摘要翻译：本发明的各种实施方案涉及可用作激光的微谐振器系统，调制器和光电检测器以及用于制造微谐振器系统的方法。在一个实施例中，微谐振器系统包括具有顶表面层，嵌入在衬底内的至少一个波导的衬底和具有顶层，中间层，底层，电流隔离区和外围环形区的微盘。微型盘的底层与衬底的顶表面层电连通并且被定位成使得周边环形区域的至少一部分位于至少一个波导的上方。电流隔离区被配置为占据微型盘的中心区域的至少一部分，并且具有比周边环形区域相对更低的折射率和相对较大的带隙。

3. 发明申请

US20090256136A1 MICRORESONATOR SYSTEMS AND METHODS OF FABRICATING THE SAME 有权
标题翻译：微波炉系统及其制造方法
公开(公告)号：US20090256136A1
公开(公告)日：2009-10-15
申请号：US12479589
申请日：2009-06-05
申请人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
发明人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
IPC分类号： H01L29/06
CPC分类号： H01S5/1075 , B82Y20/00 , G02B6/12007 , H01S5/021 , H01S5/0215 , H01S5/026 , H01S5/0422 , H01S5/1032 , H01S5/1042 , H01S5/2063 , H01S5/222 , H01S5/3211 , H01S5/34306
摘要： Various embodiments of the present invention are related to microresonator systems that can be used as a laser, a modulator, and a photodetector and to methods for fabricating the microresonator systems. In one embodiment, a microdisk comprises: a top layer; a bottom layer; an intermediate layer having at least one quantum well, the intermediate layer sandwiched between the top layer and the bottom layer; a peripheral annular region including at least a portion of the top, intermediate, and bottom layers; and a current isolation region configured to occupy at least a portion of a central region of the microdisk including at least a portion of the top, intermediate, and bottom layers and having relatively lower index of refraction than the peripheral annular region.
摘要翻译：本发明的各种实施方案涉及可用作激光的微谐振器系统，调制器和光电检测器以及用于制造微谐振器系统的方法。在一个实施例中，微盘包括：顶层; 底层; 具有至少一个量子阱的中间层，夹在顶层和底层之间的中间层; 包括顶层，中间层和底层的至少一部分的周边环形区域; 以及电流隔离区域，其构造成占据所述微盘的至少一部分包括所述顶层，中间层和底层的至少一部分，并且具有比所述周边环形区域相对较低的折射率。

4. 发明授权

US08175429B2 Microresonator systems and methods of fabricating the same 有权
标题翻译：微谐振器系统及其制造方法
公开(公告)号：US08175429B2
公开(公告)日：2012-05-08
申请号：US12479589
申请日：2009-06-05
申请人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
发明人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
IPC分类号： G02B6/26 , G02B6/42
CPC分类号： H01S5/1075 , B82Y20/00 , G02B6/12007 , H01S5/021 , H01S5/0215 , H01S5/026 , H01S5/0422 , H01S5/1032 , H01S5/1042 , H01S5/2063 , H01S5/222 , H01S5/3211 , H01S5/34306
摘要： Various embodiments of the present invention are related to microresonator systems that can be used as a laser, a modulator, and a photodetector and to methods for fabricating the microresonator systems. In one embodiment, a microdisk comprises: a top layer; a bottom layer; an intermediate layer having at least one quantum well, the intermediate layer sandwiched between the top layer and the bottom layer; a peripheral annular region including at least a portion of the top, intermediate, and bottom layers; and a current isolation region configured to occupy at least a portion of a central region of the microdisk including at least a portion of the top, intermediate, and bottom layers and having relatively lower index of refraction than the peripheral annular region.
摘要翻译：本发明的各种实施方案涉及可用作激光的微谐振器系统，调制器和光电检测器以及用于制造微谐振器系统的方法。在一个实施例中，微盘包括：顶层; 底层; 具有至少一个量子阱的中间层，夹在顶层和底层之间的中间层; 包括顶层，中间层和底层的至少一部分的周边环形区域; 以及电流隔离区域，其构造成占据所述微盘的至少一部分包括所述顶层，中间层和底层的至少一部分，并且具有比所述周边环形区域相对较低的折射率。

5. 发明授权

US07764852B2 Microresonantor systems and methods of fabricating the same 有权
标题翻译：微谐振器系统及其制造方法
公开(公告)号：US07764852B2
公开(公告)日：2010-07-27
申请号：US11888015
申请日：2007-07-30
申请人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
发明人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
IPC分类号： G02B6/26
CPC分类号： H01S5/1075 , B82Y20/00 , G02B6/12007 , H01S5/026 , H01S5/0424 , H01S5/1032 , H01S5/1042 , H01S5/34306
摘要： Various embodiments of the present invention are related to microresonator systems and to methods of fabricating the microresonator systems. In one embodiment, a microresonator system comprises a substrate having a top surface layer and at least one waveguide embedded in the substrate and positioned adjacent to the top surface layer of the substrate. The microresonator system also includes a microresonator having a top layer, an intermediate layer, a bottom layer, a peripheral region, and a peripheral coating. The bottom layer of the microresonator is attached to and in electrical communication with the top surface layer of the substrate. The microresonator is positioned so that at least a portion of the peripheral region is located above the at least one waveguide. The peripheral coating covers at least a portion of the peripheral surface and has a relatively lower index of refraction than the top, intermediate, and bottom layers of the microresonator.
摘要翻译：本发明的各种实施例涉及微谐振器系统和制造微谐振器系统的方法。在一个实施例中，微谐振器系统包括具有顶表面层和嵌入在衬底中的至少一个波导并且邻近衬底的顶表面层定位的衬底的衬底。微谐振器系统还包括具有顶层，中间层，底层，周边区域和外围涂层的微谐振器。微谐振器的底层附着到衬底的顶表面层并与其电连通。定位微谐振器使得周边区域的至少一部分位于至少一个波导的上方。周边涂层覆盖周边表面的至少一部分，并且具有比微谐振器的顶层，中间层和底层更低的折射率。

6. 发明申请

US20090239323A1 Microresonator Systems And Methods Of Fabricating The Same 有权
标题翻译：微谐振器系统及其制造方法
公开(公告)号：US20090239323A1
公开(公告)日：2009-09-24
申请号：US12479604
申请日：2009-06-05
申请人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
发明人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
IPC分类号： H01L21/00
CPC分类号： H01S5/1075 , B82Y20/00 , G02B6/12007 , H01S5/021 , H01S5/0215 , H01S5/026 , H01S5/0422 , H01S5/1032 , H01S5/1042 , H01S5/2063 , H01S5/222 , H01S5/3211 , H01S5/34306
摘要： Various embodiments of the present invention are related to microresonator systems and to methods for fabricating the microresonator systems. In one embodiment, a method of fabricating a microresonator system comprises: forming a multilayer system having a bottom layer, a top layer, and an intermediate layer having one or more quantum wells and sandwiched between the bottom layer and the top layer; embedding at least one waveguide in a substrate having a top surface, the at least one waveguide positioned adjacent to the top surface of the substrate; wafer bonding the top layer of the multilayer system to the top surface of the substrate; forming a microresonator in the multilayer system, wherein at least a portion of a peripheral annular region of the microresonator is portioned above the at least one waveguide; and forming a current isolation region in at least a portion of a central region of the microresonator.
摘要翻译：本发明的各种实施例涉及微谐振器系统和用于制造微谐振器系统的方法。在一个实施例中，制造微谐振器系统的方法包括：形成具有底层，顶层和具有一个或多个量子阱并夹在底层和顶层之间的中间层的多层系统; 在具有顶表面的衬底中嵌入至少一个波导，所述至少一个波导定位成与衬底的顶表面相邻; 将多层系统的顶层晶片结合到衬底的顶表面; 在所述多层系统中形成微谐振器，其中所述微谐振器的外围环形区域的至少一部分被分配在所述至少一个波导的上方; 以及在所述微谐振器的中心区域的至少一部分中形成电流隔离区。

7. 发明申请

US20090032805A1 Microresonator systems and methods of fabricating the same 有权
公开(公告)号：US20090032805A1
公开(公告)日：2009-02-05
申请号：US11888016
申请日：2007-07-30
申请人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
发明人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
IPC分类号： H01L29/06 , H01L21/30
CPC分类号： H01S5/1075 , B82Y20/00 , G02B6/12007 , H01S5/021 , H01S5/0215 , H01S5/026 , H01S5/0422 , H01S5/1032 , H01S5/1042 , H01S5/2063 , H01S5/222 , H01S5/3211 , H01S5/34306
摘要： Various embodiments of the present invention are related to microresonator systems that can be used as a laser, a modulator, and a photodetector and to methods for fabricating the microresonator systems. In one embodiment, a microresonator system comprises a substrate having a top surface layer, at least one waveguide embedded within the substrate, and a microdisk having a top layer, an intermediate layer, a bottom layer, current isolation region, and a peripheral annular region. The bottom layer of the microdisk is in electrical communication with the top surface layer of the substrate and is positioned so that at least a portion of the peripheral annular region is located above the at least one waveguide. The current isolation region is configured to occupy at least a portion of a central region of the microdisk and has a relatively lower refractive index and relatively larger bandgap than the peripheral annular region.

8. 发明申请

US20090034905A1 Microresonantor systems and methods of fabricating the same 有权
标题翻译：微谐振器系统及其制造方法
公开(公告)号：US20090034905A1
公开(公告)日：2009-02-05
申请号：US11888015
申请日：2007-07-30
申请人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
发明人： Michael Renne Ty Tan , Shih-Yuan Wang , Duncan Stewart , David A. Fattal
IPC分类号： G02B6/12
CPC分类号： H01S5/1075 , B82Y20/00 , G02B6/12007 , H01S5/026 , H01S5/0424 , H01S5/1032 , H01S5/1042 , H01S5/34306
摘要： Various embodiments of the present invention are related to microresonator systems and to methods of fabricating the microresonator systems. In one embodiment, a microresonator system comprises a substrate having a top surface layer and at least one waveguide embedded in the substrate and positioned adjacent to the top surface layer of the substrate. The microresonator system also includes a microresonator having a top layer, an intermediate layer, a bottom layer, a peripheral region, and a peripheral coating. The bottom layer of the microresonator is attached to and in electrical communication with the top surface layer of the substrate. The microresonator is positioned so that at least a portion of the peripheral region is located above the at least one waveguide. The peripheral coating covers at least a portion of the peripheral surface and has a relatively lower index of refraction than the top, intermediate, and bottom layers of the microresonator.
摘要翻译：本发明的各种实施例涉及微谐振器系统和制造微谐振器系统的方法。在一个实施例中，微谐振器系统包括具有顶表面层和嵌入在衬底中的至少一个波导并且邻近衬底的顶表面层定位的衬底的衬底。微谐振器系统还包括具有顶层，中间层，底层，周边区域和外围涂层的微谐振器。微谐振器的底层附着到衬底的顶表面层并与其电连通。定位微谐振器使得周边区域的至少一部分位于至少一个波导的上方。周边涂层覆盖周边表面的至少一部分，并且具有比微谐振器的顶层，中间层和底层更低的折射率。

9. 发明授权

US07668420B2 Optical waveguide ring resonator with an intracavity active element 有权
标题翻译：具有腔内有源元件的光波导环形谐振器
公开(公告)号：US07668420B2
公开(公告)日：2010-02-23
申请号：US11829048
申请日：2007-07-26
申请人： Wei Wu , Shih-Yuan Wang , Michael Renne Ty Tan , David A. Fattal , Charles M. Santori , Raymond G. Beausoleil
发明人： Wei Wu , Shih-Yuan Wang , Michael Renne Ty Tan , David A. Fattal , Charles M. Santori , Raymond G. Beausoleil
IPC分类号： G02B6/26
CPC分类号： G02B6/125 , G02B2006/12104 , H01S5/026 , H01S5/1071
摘要： An optical resonator, a photonic system and a method of optical resonance employ optical waveguide segments connected together with total internal reflection (TIR) mirrors to form a closed loop. The optical resonator includes the optical waveguide segments, an intracavity active element coupled to a designated one of the optical waveguide segments, the TIR mirrors and a photo-tunneling input/output (I/O) port. The photo-tunneling I/O port includes one of the TIR mirrors. The method includes propagating and reflecting the optical signal, or a portion thereof, in the optical resonator, transmitting a portion of the optical signal through the I/O port, and influencing the optical signal. The photonic system includes the optical resonator with optical gain and a source of an optical signal.
摘要翻译：光学谐振器，光子系统和光学谐振的方法采用与全内反射（TIR）反射镜连接在一起以形成闭环的光波导段。光谐振器包括光波导段，耦合到指定的一个光波导段的腔内有源元件，TIR镜和光隧道输入/输出（I / O）端口。光隧道I / O端口包括一个TIR镜。该方法包括在光谐振器中传播和反射光信号或其一部分，通过I / O端口传输光信号的一部分，并影响光信号。光子系统包括具有光学增益的光学谐振器和光学信号的源。

10. 发明申请

US20120032140A1 LIGHT-EMITTING DIODE INCLUDING A METAL-DIELECTRIC-METAL STRUCTURE 审中-公开
标题翻译：发光二极管，包括金属 - 电介质金属结构
公开(公告)号：US20120032140A1
公开(公告)日：2012-02-09
申请号：US13259444
申请日：2009-09-18
申请人： Jingjing Li , David A. Fattal , Lars Helge Thylen , Michael Renne Ty Tan , Shih-Yuan Wang
发明人： Jingjing Li , David A. Fattal , Lars Helge Thylen , Michael Renne Ty Tan , Shih-Yuan Wang
IPC分类号： H01L33/04 , H01L33/62
CPC分类号： H01L33/0012 , B82Y20/00 , H01L27/15 , H01L33/06 , H01L33/34 , H01L33/40
摘要： A light-emitting diode (LED) (101). The LED (101) includes a plurality of portions including a p-doped portion (112), an intrinsic portion (114), and a n-doped portion (116). The intrinsic portion (114) is disposed between the p-doped portion (112) and the n-doped portion (116) and forms a p-i junction (130) and an i-n junction (134) The LED (101) also includes a metal-dielectric-metal (MDM) structure (104) including a first metal layer (140), a second metal layer (144), and a dielectric medium disposed between the first metal layer (140) and the second metal layer (144). The metal layers of the MDM structure (104) are disposed about orthogonally to the p-i junction (130) and the i-n junction (134); the dielectric medium includes the intrinsic portion (114); and, the MDM structure (104) is configured to enhance modulation frequency of the LED (101) through interaction with surface plasmons that are present in the metal layers.
摘要翻译：发光二极管（LED）（101）。 LED（101）包括多个部分，包括p掺杂部分（112），本征部分（114）和n掺杂部分（116）。本征部分（114）设置在p掺杂部分（112）和n掺杂部分（116）之间，并形成π结（130）和在结（134）中。LED（101）还包括金属包括第一金属层（140），第二金属层（144）和布置在第一金属层（140）和第二金属层（144）之间的电介质的电 - 金属（MDM）结构（104）。 MDM结构（104）的金属层与p-i结（130）和i-n结（134）正交地设置; 电介质包括本征部分（114）; 并且，MDM结构（104）被配置为通过与存在于金属层中的表面等离子体相互作用来增强LED（101）的调制频率。

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