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1. 发明授权

US6130748A Chemical sensor based on porous silicon 失效
标题翻译：基于多孔硅的化学传感器
公开(公告)号：US6130748A
公开(公告)日：2000-10-10
申请号：US142423
申请日：1998-09-04
申请人： Michael Kruger , Michael Berger , Markus Thonissen , Rudiger Arens-Fischer , Hans Luth
发明人： Michael Kruger , Michael Berger , Markus Thonissen , Rudiger Arens-Fischer , Hans Luth
IPC分类号： G01N21/01 , G01N21/41 , G01N21/45 , G01B9/02
CPC分类号： G01N21/41
摘要： In an analytic process using porous silicon, a substance is detected or its concentration in a fluid is determined based on the change in the optical property of porous silicon as a function of the refractive index of the substance present in the pores of the porous silicon, or of the fluid containing the substance. An analytic device for detecting a substance or for determining the concentration of a substance in a fluid with the use of porous silicon comprises a component at least partly consisting of porous silicon, the optical property of which is dependent upon the refractive index of the substance or of the fluid containing the substance, whereby a change in the optical property of the porous silicon is measurable to indicate detection of the substance or to determine the concentration of such substance in the pores of the porous silicon.
摘要翻译： PCT No.PCT / DE97 / 00361 Sec。 371日期：1998年9月4日 102（e）1998年9月4日PCT PCT 1997年2月28日提交PCT公布。出版物WO97 / 33147 日期1997年9月12日在使用多孔硅的分析方法中，检测物质或其流体中的浓度基于多孔硅的光学性质的变化而确定，作为存在于孔中的物质的折射率的函数的多孔硅或含有物质的流体。用于检测物质或用于使用多孔硅确定流体中物质浓度的分析装置包括至少部分由多孔硅组成的组分，其多孔硅的光学性质取决于物质的折射率或含有该物质的流体，从而可以测量多孔硅的光学性能的变化，以指示该物质的检测或确定该物质在该多孔硅的孔中的浓度。

2. 发明授权

US5935410A Process and device for the lighting-supported structuring of porous silicon 失效
标题翻译：用于照明支持的多孔硅结构的工艺和装置
公开(公告)号：US5935410A
公开(公告)日：1999-08-10
申请号：US933540
申请日：1997-09-19
申请人： Markus Thonissen , Michael Kruger , Hans Luth , Michael Gotz Berger , Wolfgang Theiss , Gilles Lerondel , Robert Romestain
发明人： Markus Thonissen , Michael Kruger , Hans Luth , Michael Gotz Berger , Wolfgang Theiss , Gilles Lerondel , Robert Romestain
IPC分类号： H01L21/3063 , H01L33/34 , C25F3/12 , C25F7/00
CPC分类号： H01L33/346 , H01L21/3063
摘要： A process for producing a structured area of porous silicon on a substrate, in which silicon is etched and structured by means of illumination, includes selectively aiming the illumination during or after the formation of the porous silicon directly at a selected area of a p-doped substrate in order to effect etching and structuring of the porous silicon in another area. A device for carrying out the process includes an illuminating system for supporting the etching process and for structuring the porous silicon, in which the illuminating system is selectively aimed during or after the formation of the porous silicon directly at a selected area of p-doped substrate in order to effect etching and structuring of the porous silicon in another area.
摘要翻译：用于在衬底上制造多孔硅的结构化区域的方法，其中通过照明蚀刻和构造硅，包括在多孔硅形成过程中或之后直接在p掺杂的选定区域选择性地瞄准照明衬底，以便在另一个区域中实现多孔硅的蚀刻和结构化。用于执行该方法的装置包括用于支撑蚀刻工艺并用于构造多孔硅的照明系统，其中在直接在p掺杂衬底的选定区域形成多孔硅期间或之后选择性地瞄准照明系统以便在另一区域中实现多孔硅的蚀刻和结构化。

3. 发明授权

US5696629A Optical component comprising layers of porous silicon 失效
标题翻译：包括多孔硅层的光学部件
公开(公告)号：US5696629A
公开(公告)日：1997-12-09
申请号：US564335
申请日：1995-12-04
申请人： Michael Gotz Berger , Herbert Munder , Stephan Frohnhoff , Markus Thonissen , Hans Luth
发明人： Michael Gotz Berger , Herbert Munder , Stephan Frohnhoff , Markus Thonissen , Hans Luth
IPC分类号： G02B5/08 , G02B1/10 , G02B1/11 , G02B5/28 , G02B6/12 , G02B6/122 , H01L31/0216 , H01L31/103 , H01L33/34 , H01L33/44 , H01S5/183 , H01S5/32
CPC分类号： H01L33/44 , H01L31/02165 , H01L31/103 , H01L33/346 , H01S5/183 , H01S5/3227
摘要： The invention relates to an optical component consisting of transparent thin layers of differing thickness and refractive indices. Such optical components are used, for example, as interference filters and mirrors. Optical components made of layers with gradually changing refractive indices are also known as waveguides of anti-reflective coatings. The invention achieves the aim of using, instead of layers of ordinary materials, another material by means of a component in which the layers consist of porous silicon. The special advantages of porous silicon as a coating material arises not only from the ease and economy of manufacture, but also in the facility for obtaining gradual refractive index transitions. It is therefore very easily possible to make waveguides on a silicon chip.
摘要翻译： PCT No.PCT / DE94 / 00635 Sec。 371 1995年12月4日第 102（e）1995年12月4日，PCT PCT 1994年6月8日PCT公布。公开号WO94 / 29757 日期1994年12月22日本发明涉及由不同厚度和折射率的透明薄层组成的光学部件。这样的光学部件例如用作干涉滤光器和反射镜。由具有逐渐变化的折射率的层制成的光学部件也被称为抗反射涂层的波导。本发明的目的是通过其中层由多孔硅组成的组分代替普通材料层而使用另一种材料。多孔硅作为涂层材料的特殊优点不仅在于制造的容易性和经济性，而且在用于获得逐渐折射率转变的设备中也是如此。因此，在硅芯片上制作波导是非常容易的。

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