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    • 4. 发明授权
    • Single disc vapor lubrication
    • 单盘蒸汽润滑
    • US06613151B1
    • 2003-09-02
    • US09798934
    • 2001-03-06
    • Michael Joseph StirnimanPaul Stephen McLeod
    • Michael Joseph StirnimanPaul Stephen McLeod
    • H01L2144
    • B05D1/60B05D5/083G11B5/8408
    • Vapor deposition of a uniform thickness thin film of lubricant on at least one surface of a substrate, comprises the steps of: (a) providing an apparatus comprising: (i) a chamber having an interior space maintained below atmospheric pressure; (ii) a substrate loader/unloader for supplying the interior space with at least one substrate and for withdrawing at least one substrate from the interior space; (iii) at least one lubricant vapor source for supplying the interior space with a stream of lubricant vapor; and (iv) a substrate transporter/conveyor for continuously moving at least one substrate past the stream of vapor from the at least one lubricant vapor source; (b) supplying the interior space with a substrate having at least one surface; (c) continuously moving the substrate past the stream of lubricant vapor and depositing a uniform thickness thin film of the lubricant on the at least one surface; and (d) withdrawing the lubricant-coated substrate from the interior space. The invention has particular utility in depositing thin films of polymeric lubricants onto disc-shaped substrates in the manufacture of magnetic and MO recording media.
    • 均匀厚度的润滑剂薄膜在衬底的至少一个表面上的气相沉积包括以下步骤:(a)提供一种装置,包括:(i)具有保持在大气压以下的内部空间的室;(ii) 用于向内部空间供应至少一个基板并用于从内部空间抽出至少一个基板;(iii)至少一个润滑剂蒸汽源,用于向内部空间供应润滑剂蒸汽流; (iv)用于从至少一个润滑剂蒸汽源连续地移动至少一个基板通过蒸汽流的基底输送器/输送器;(b)向内部空间供应具有至少一个表面的基底;(c)连续地 将衬底移动通过润滑剂蒸汽流并在该至少一个表面上沉积均匀厚度的润滑剂薄膜; 并且(d)从内部空间中取出润滑剂涂覆的基材。本发明在将磁性和MO记录介质的制造中将聚合物润滑剂的薄膜沉积到盘形基材上具有特别的用途。