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1. 发明授权

US06786810B2 Abrasive article having a window system for polishing wafers, and methods 有权
标题翻译：具有用于抛光晶片的窗口系统的磨料制品及方法
公开(公告)号：US06786810B2
公开(公告)日：2004-09-07
申请号：US10253559
申请日：2002-09-24
申请人： Michael J. Muilenburg , Chong-Yong J. Kim , Jerry J. Fizel , Richard J. Webb , John J. Gagliardi , Daniel B. Pendergrass, Jr. , Robert J. Streifel , Wesley J. Bruxvoort
发明人： Michael J. Muilenburg , Chong-Yong J. Kim , Jerry J. Fizel , Richard J. Webb , John J. Gagliardi , Daniel B. Pendergrass, Jr. , Robert J. Streifel , Wesley J. Bruxvoort
IPC分类号： B24B500
CPC分类号： B24D11/005 , B24B37/013 , B24B37/205
摘要： A process for planarizing, polishing, or providing other modification of a wafer surface or other workpiece. The process includes using an abrasive article having a textured abrasive coating affixed to a backing. The abrasive article includes a monitoring element, such as a window, to allow transmission of radiation therethrough. The radiation level is monitored throughout the planarization process to determine the approach of the desired endpoint. The window in the abrasive coating can be an area devoid of abrasive coating or having minimal or a thinned abrasive coating.
摘要翻译：用于对晶片表面或其它工件进行平面化，抛光或提供其它修改的工艺。该方法包括使用具有附着在背衬上的纹理磨料涂层的磨料制品。研磨制品包括诸如窗口的监测元件，以允许辐射透过其中。在整个平坦化过程中监测辐射水平以确定所需端点的方法。研磨涂层中的窗口可以是没有研磨涂层或具有最小或变薄的磨料涂层的区域。

2. 发明授权

US06604985B2 Abrasive article having a window system for polishing wafers, and methods 有权
公开(公告)号：US06604985B2
公开(公告)日：2003-08-12
申请号：US10289750
申请日：2002-11-07
申请人： Michael J. Muilenburg , Chong-Yong J. Kim , Jerry J. Fizel , Richard J. Webb , John J. Gagliardi , Daniel B. Pendergrass, Jr. , Robert J. Streifel , Wesley J. Bruxvoort
发明人： Michael J. Muilenburg , Chong-Yong J. Kim , Jerry J. Fizel , Richard J. Webb , John J. Gagliardi , Daniel B. Pendergrass, Jr. , Robert J. Streifel , Wesley J. Bruxvoort
IPC分类号： B24B4900
CPC分类号： B24D11/005 , B24B37/013 , B24B37/205
摘要： A process for planarizing, polishing, or providing other modification of a wafer surface or other workpiece. The process includes using an abrasive article having a textured abrasive coating affixed to a backing. The abrasive article includes a monitoring element, such as a window, to allow transmission of radiation therethrough. The radiation level is monitored throughout the planarization process to determine the approach of the desired endpoint. The window in the abrasive coating can be an area devoid of abrasive coating or having minimal or a thinned abrasive coating.

3. 发明授权

US06264533B1 Abrasive processing apparatus and method employing encoded abrasive product 失效
标题翻译：磨料加工设备和采用编织磨料产品的方法
公开(公告)号：US06264533B1
公开(公告)日：2001-07-24
申请号：US09322559
申请日：1999-05-28
申请人： Charles R. Kummeth , Michael J. Muilenburg , Gary B. Forsberg , Robert J. Streifel , Daniel B. Pendergrass, Jr.
发明人： Charles R. Kummeth , Michael J. Muilenburg , Gary B. Forsberg , Robert J. Streifel , Daniel B. Pendergrass, Jr.
IPC分类号： B24B4900
CPC分类号： B24B37/205 , B24B49/00 , B24D11/00 , B24D13/12 , G05B2219/49302 , G05B2219/49305
摘要： An apparatus and method for abrasively processing an article involves the use of an abrasive product provided with a machine discernable pattern representative of information of varying types. The pattern is read while the abrasive product moves relative to the article, and is used to control the movement of the abrasive product relative to the article. The pattern may include one or more of a machine discernable electrical characteristic, optical characteristic, topographic characteristic or magnetic characteristic. Reading the pattern may involve one or more of electrically, optically, mechanically or magnetically reading the machine discernable pattern provided on the abrasive product. The pattern may include one or more of indicia, protrusions, depressions, holes, voids, color or pigment variations, bar codes, magnetic transitions or periodic markings. The pattern may include one or more of indexing information, servo information, alignment information or abrasive product identification information. Closed-loop servo control of abrasive product movement may be effected using the servo/indexing pattern information. The abrasive product may constitute a movable pad and an abrasive slurry. The pad may be moved in a controlled manner relative to the article such that the pad and the abrasive slurry abrasively contact the article. The pattern provided on the pad may be read subsequent to a cleaning operation. An information system may be used to store various types of data derived, in part, from use of the abrasive product pattern information. The stored data may be used for a variety of identification, tracking, accounting, inventory, handling, and statistical purposes.
摘要翻译：用于研磨物品的设备和方法涉及使用具有表示不同类型的信息的机器可辨别图案的磨料产品。当研磨产品相对于制品移动时，读取图案，并且用于控制研磨产品相对于制品的移动。该图案可以包括机器可识别的电特性，光学特性，地形特征或磁特性中的一个或多个。读取图案可以涉及一种或多种电学，光学，机械或磁性读取在磨料产品上提供的机器可辨别图案。图案可以包括标记，突起，凹陷，孔，空隙，颜色或颜料变化，条形码，磁转变或周期性标记中的一个或多个。该图案可以包括索引信息，伺服信息，对准信息或研磨产品识别信息中的一个或多个。研磨产品运动的闭环伺服控制可以使用伺服/分度模式信息来实现。磨料产品可以构成可动衬垫和磨料浆料。衬垫可以相对于制品以受控的方式移动，使得衬垫和磨料浆料与制品相接触地接触。提供在垫上的图案可以在清洁操作之后被读取。可以使用信息系统来存储导致部分地不使用磨料产品图案信息的各种类型的数据。存储的数据可用于各种识别，跟踪，记帐，库存，处理和统计目的。

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