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    • 1. 发明授权
    • Time base comprising an integrated micromechanical tuning fork resonator
    • 时基包括集成微机械音叉谐振器
    • US06831531B1
    • 2004-12-14
    • US10451070
    • 2003-06-20
    • Metin GiousoufHeinz KückRainer Platz
    • Metin GiousoufHeinz KückRainer Platz
    • H03H902
    • H03H9/2484H03H9/21H03H2009/02299
    • There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical tuning fork resonator (4) supported above a substrate (2) and adapted to oscillate in a plane substantially parallel to the substrate. The tuning fork resonator comprises a base member (5) extending substantially perpendicularly from the substrate, a free-standing oscillating structure (6) connected to the base member and including at least a first pair of substantially parallel fork tines (7, 8) and an electrode structure (9) disposed adjacent to the fork tines and connected to the integrated electronic circuit.
    • 描述了包括谐振器(4)和集成电子电路(3)的时基,用于将谐振器驱动到振荡中,并且响应于该振荡而产生具有确定频率的信号。 谐振器是支撑在衬底(2)上并且适于在基本上平行于衬底的平面中振荡的集成微机械音叉谐振器(4)。 音叉谐振器包括从基板基本上垂直延伸的基座构件(5),连接到基座构件并包括至少第一对基本上平行的叉齿(7,8)的独立摆动结构(6)和 电极结构(9),其布置成与叉齿相邻并连接到集成电子电路。
    • 3. 发明授权
    • Temperature compensation mechanism for a micromechanical ring resonator
    • 微机械环谐振器的温度补偿机制
    • US06859113B2
    • 2005-02-22
    • US10650811
    • 2003-08-29
    • Metin GiousoufHeinz KückRainer Platz
    • Metin GiousoufHeinz KückRainer Platz
    • G04G3/00B81B3/00G01C19/56G01C19/5684G01C19/5712G04F5/04H03B5/30H03B5/32H03H9/24
    • G01C19/5712H03B5/30
    • A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate in a first oscillation mode. The ring resonator includes a free-standing oscillating structure (6). Electrodes (100, 120; 130, 150) are positioned under the free-standing oscillating structure in such a way as to drive and sense a second oscillation mode in a plane substantially perpendicular to the substrate and having a resonant frequency which is different from the resonant frequency of the first oscillation mode, a frequency difference between the resonant frequencies of both oscillation modes being used for compensating for the effect of temperature on the frequency of the signal produced by the time base.
    • 包括谐振器(4)和用于将谐振器驱动到振荡中并用于响应于振荡产生具有确定频率的信号的集成电子电路(3)的时基。 谐振器是支撑在衬底(2)上并适于以第一振荡模式振荡的集成微机械环谐振器。 环形谐振器包括独立的振荡结构(6)。 电极(100,120,130,150)位于自立式振荡结构下面,以便在基本上垂直于衬底的平面中驱动和感测第二振荡模式,并且具有不同于 第一振荡模式的谐振频率,两个振荡模式的谐振频率之间的频率差被用于补偿温度对由时基产生的信号的频率的影响。
    • 4. 发明授权
    • Time base comprising an integrated micromechanical ring resonator
    • 时基包括集成的微机械环谐振器
    • US06686807B1
    • 2004-02-03
    • US10129193
    • 2002-05-02
    • Metin GiousoufHeinz KückRainer Platz
    • Metin GiousoufHeinz KückRainer Platz
    • H03B530
    • G01C19/5712H03B5/30
    • A time base having a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator (4) supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator has a central post (5) extending from the substrate along the axis of rotation, and a free-standing oscillating structure (6) including an outer ring (60) coaxial with the axis of rotation, and a plurality of spring elements (62) disposed symmetrically around the central post and connecting the outer ring to the central post.
    • 具有谐振器(4)和用于将谐振器驱动到振荡中并用于响应于该振荡而产生具有确定频率的信号的集成电子电路(3)的时基。 谐振器是支撑在衬底(2)上并适于围绕基本上垂直于衬底的旋转轴线(O)摆动的集成微机械环谐振器(4)。 环形谐振器具有沿着旋转轴线从基板延伸的中心柱(5)和包括与旋转轴线同轴的外环(60)的独立摆动结构(6),以及多个弹簧元件 (62)围绕所述中心柱对称设置并将所述外环连接到所述中心柱。
    • 6. 发明授权
    • Phase-modulating microstructures for highly integrated surface light modulators
    • 高度集成的表面光调制器的相位调制微结构
    • US06259550B1
    • 2001-07-10
    • US09202694
    • 1999-08-20
    • Ralf Gottfried-GottfriedHeinz KückDetlef Kunze
    • Ralf Gottfried-GottfriedHeinz KückDetlef Kunze
    • G02B2600
    • G02B26/06
    • A structure for the phase modulation of light (32) incident upon said structure comprises a mirror (40), a deformable and transparent dielectric (36) disposed on the mirror (40), at least two electrodes (41; 42; 41a, 41b, 42; 50, 50′) having one or several fixed potentials and being adapted to have one or more control voltages applied thereto for generating an electric field (58) in at least a partial region of said dielectric (36), thereby changing the optical path length of the light passing through said dielectric (36) with respect to a state of the dielectric (36) in which the electric field is not applied thereto. An arrangement of a plurality of such phase-modulating structures applied on a CMOS active matrix constitutes a very large scale integrated spatial light modulator.
    • 入射到所述结构上的光(32)的相位调制结构包括反射镜(40),设置在反射镜(40)上的可变形和透明电介质(36),至少两个电极(41; 42; 41a,41b ,42; 50,50'),其具有一个或几个固定电位并且适于具有施加到其上的一个或多个控制电压以在所述电介质(36)的至少部分区域中产生电场(58),从而改变 相对于不施加电场的电介质(36)的状态,穿过所述电介质(36)的光的光路长度。 施加在CMOS有源矩阵上的多个这种相位调制结构的布置构成非常大规模的集成空间光调制器。