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1. 发明专利

JP2013140153A Microelectromechanical system 有权
标题翻译：微电子系统
公开(公告)号：JP2013140153A
公开(公告)日：2013-07-18
申请号：JP2012281224
申请日：2012-12-25
申请人： Maxim Integrated Products Inc , マキシムインテグレーテッドプロダクツインコーポレーテッド
发明人： ROSSI ALESSANDRO , ADOLFO GIAMBASTIANI , LORENZO BERTINI
IPC分类号： G01P15/125 , B81B3/00 , G01C19/5783 , H01L29/84
CPC分类号： G01C19/5712
摘要： PROBLEM TO BE SOLVED: To make a driving mass and/or a detection mass as flat and undistorted as possible, at least in a region of sensor elements measuring the distance.SOLUTION: A microelectromechanical system for detecting acceleration about or along the X-axis, the Y-axis, and/or the Z-axis has: a substrate; and a driving mass and a detection mass (1) which are disposed parallel to the substrate in the X-Y plane and mounted displaceably relative to the substrate. At least one slit (5) is disposed in the driving and/or detection mass (1) for compensating for distortions due to residual material stresses in the driving and/or detection mass (1).
摘要翻译：要解决的问题：至少在测量距离的传感器元件的区域中尽可能使驱动质量和/或检测质量平坦且不失真。解决方案：用于检测围绕或沿着X轴的加速度的微机电系统，Y轴和/或Z轴具有：基板; 以及驱动质量块和检测质量块（1），它们在X-Y平面上平行于衬底设置，并相对于衬底可移动地安装。至少一个狭缝（5）设置在驱动和/或检测质量块（1）中，用于补偿由于驱动和/或检测质量块（1）中的残余材料应力引起的变形。

2. 发明专利

JP2013145232A Micro-gyroscope and method for controlling micro-gyroscope 审中-公开
标题翻译：微晶玻璃和控制微晶玻璃的方法
公开(公告)号：JP2013145232A
公开(公告)日：2013-07-25
申请号：JP2012279128
申请日：2012-12-21
申请人： Maxim Integrated Products Inc , マキシムインテグレーテッドプロダクツインコーポレーテッド
发明人： ROSSI ALESSANDRO , ADOLFO GIAMBASTIANI
IPC分类号： G01C19/5747 , B81B3/00 , H01L29/84
CPC分类号： G01C19/5712 , G01C19/56 , G01C19/5747 , G01C19/5762
摘要： PROBLEM TO BE SOLVED: To provide a reliably functioning, accurate and compact micro-gyroscope.SOLUTION: A first sensor unit 1 and a second sensor unit on a substrate each comprise: at least one drive mass 1.2 disposed parallel to the substrate; an anchor 40 by means of which the drive mass 1.2 is attached to the substrate; an anchor spring 1.3 disposed between the anchor 40 and the drive mass 1.2, by means of which the drive mass 1.2 is mounted linearly displaceably in the X-axis direction and rigidly in the Y-axis and Z-axis directions; drive means by means of which the drive mass 1.2 can be driven in an oscillatory manner in the X-axis direction; a sensor mass 1.5 coupled to the drive mass 1.2 by means of coupling springs 1.6 such that the sensor mass 1.5 is coupled displaceably in the Y-axis direction and rigidly in the X-axis and Z-axis directions to the drive mass 1.2; and sensor elements for detecting a deflection of the sensor mass 1.5 in the Y-axis direction.
摘要翻译：要解决的问题：提供可靠运行，精确和紧凑的微型陀螺仪。解决方案：基板上的第一传感器单元1和第二传感器单元包括：平行于基板设置的至少一个驱动块1.2; 锚固件40，通过该锚固件驱动质量块1.2附接到基板; 锚定弹簧1.3设置在锚固件40和驱动块1.2之间，借助于此，驱动块1.2沿X轴方向线性移位并且在Y轴和Z轴方向上刚性地安装; 驱动装置，驱动块1.2可以以X轴方向的振荡方式驱动; 通过联接弹簧1.6联接到驱动块1.2的传感器质量块1.5，使得传感器质量1.5在Y轴方向上可移动地并且在X轴和Z轴方向上刚性地联接到驱动块1.2; 以及用于检测传感器质量1.5在Y轴方向上的偏转的传感器元件。

3. 发明专利

JP2013140148A Mems acceleration sensor 审中-公开
标题翻译： MEMS加速传感器
公开(公告)号：JP2013140148A
公开(公告)日：2013-07-18
申请号：JP2012278514
申请日：2012-12-20
申请人： Maxim Integrated Products Inc , マキシムインテグレーテッドプロダクツインコーポレーテッド
发明人： ROSSI ALESSANDRO , ADOLFO GIAMBASTIANI
IPC分类号： G01P15/125 , B81B3/00 , H01L29/84
CPC分类号： G01P15/0802 , G01P15/08 , G01P15/125 , G01P15/18 , G01P2015/0834
摘要： PROBLEM TO BE SOLVED: To provide a MEMS acceleration sensor enabling reliable detection in spite of a small required area on a substrate.SOLUTION: A MEMS acceleration sensor includes: a sensor mass body 2 arranged in parallel with a substrate 7 in a X-Y plane and rotatably attached about a rotation axis 6 onto the substrate 7 and including a plurality of holes; and a sensor element 8 for detecting rotation about the rotation axis 6 of the sensor mass body 2 of which the weight is different on both sides on the basis of the rotation axis 6. In order to change the weight of the sensor mass body 2 on one side on the basis of the rotation axis 6 to the weight thereof on the other side on the basis of the rotation axis 6, a material of the sensor mass body 2 is partially removed in some areas of the holes to reduce the weight and/or is added especially to extension parts of the holes in a Z direction to increase the weight.
摘要翻译：要解决的问题：提供一种MEMS加速度传感器，尽管基板上的所需面积小，但能够进行可靠的检测。解决方案：MEMS加速度传感器包括：传感器质量体2，其在XY平面中与基板7平行布置，围绕旋转轴线6可旋转地附接到基板7上并且包括多个孔; 以及传感器元件8，用于基于旋转轴线6检测围绕传感器质量体2的旋转轴线6的旋转轴线6的重量不同的两侧。为了将传感器质量体2的重量改变为基于旋转轴线6在另一侧基于旋转轴线6的一侧，在孔的一些区域中部分地去除传感器质量体2的材料，以减小重量和/ 或者特别是在Z方向的孔的延伸部分上增加重量。

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