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1. 发明授权

US6062810A Turbomolecular pump 失效
标题翻译：涡轮分子泵
公开(公告)号：US6062810A
公开(公告)日：2000-05-16
申请号：US133332
申请日：1998-08-13
申请人： Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa , Atsushi Shiokawa , Junichi Arami
发明人： Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa , Atsushi Shiokawa , Junichi Arami
IPC分类号： F04D29/10 , F04D17/16 , F04D19/04 , F04D15/00 , F04B17/00 , F04B49/22
CPC分类号： F04D19/04 , F04D17/168
摘要： A turbomolecular pump evacuates gas in an apparatus (or a chamber) by means of a rotor having blades and/or spiral grooves which rotates at a high speed. The turbomolecular pump includes a casing housing a rotor and a stator therein, a pumping section comprising the rotor and the stator, a valve element capable of opening or closing an intake port of the casing, and a supporting member for supporting the valve element. The supporting member extends through at least one of the rotor and the stator. The turbomolecular pump further includes an actuating mechanism for actuating the valve element, and the actuating mechanism is provided at a side opposite to the intake port with respect to the rotor.
摘要翻译：涡轮分子泵通过具有高速旋转的叶片和/或螺旋槽的转子在装置（或室）中排出气体。涡轮分子泵包括壳体，壳体中包括转子和定子，泵体部分包括转子和定子，能够打开或关闭壳体的进气口的阀元件和用于支撑阀元件的支撑构件。支撑构件延伸穿过转子和定子中的至少一个。涡轮分子泵还包括用于致动阀元件的致动机构，并且致动机构设置在相对于转子的与进气口相对的一侧。

2. 发明授权

US06220831B1 Turbomolecular pump 有权
标题翻译：涡轮分子泵
公开(公告)号：US06220831B1
公开(公告)日：2001-04-24
申请号：US09133331
申请日：1998-08-13
申请人： Atsushi Shiokawa , Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa
发明人： Atsushi Shiokawa , Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa
IPC分类号： F04B1704
CPC分类号： F04D17/168 , F04D19/04
摘要： A turbomolecular pump comprising a rotor and a stator housed in a casing and forming an exhaust channel therebetween, and a suction port and a discharge port formed in the casing; wherein the turbomolecular pump has a valve body for opening and closing the suction port, the valve body is movable in an axial direction of the turbomolecular pump, a valve driving mechanism for driving the valve body via a valve body supporting member which extends through a throughhole formed in the rotor and/or the stator and magnetic bearing units for non-contactingly supporting the valve body supporting member within the throughhole, whereby a turbomolecular pump having a compact overall construction including valve units can be provided.
摘要翻译：一种涡轮分子泵，包括转子和定子，其容纳在壳体中并在其间形成排气通道，以及形成在所述壳体中的吸入口和排出口。其中所述涡轮分子泵具有用于打开和关闭所述吸入口的阀体，所述阀体可在所述涡轮分子泵的轴向方向上移动;阀驱动机构，其经由阀体支撑构件驱动所述阀体，所述阀体支撑构件延伸穿过通孔形成在转子和/或定子和磁轴承单元中，用于在通孔内非接触地支撑阀体支撑构件，由此可以提供具有包括阀单元的紧凑整体结构的涡轮分子泵。

3. 发明授权

US06589009B1 Turbo-molecular pump 有权
标题翻译：涡轮分子泵
公开(公告)号：US06589009B1
公开(公告)日：2003-07-08
申请号：US09592411
申请日：2000-06-13
申请人： Atsushi Shiokawa , Matsutaro Miyamoto , Hiroyuki Kawasaki , Hiroshi Sobukawa , Hiroaki Ogamino
发明人： Atsushi Shiokawa , Matsutaro Miyamoto , Hiroyuki Kawasaki , Hiroshi Sobukawa , Hiroaki Ogamino
IPC分类号： F04D1904
CPC分类号： F04D19/042 , F04D29/522 , F04D29/701
摘要： A turbo-molecular pump includes a casing having an intake port, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. The stator and the rotor make up a turbine blade pumping section and a groove pumping section for evacuating gas. A scattering prevention member is provided for preventing fragments of the rotor from being scattered through the intake port.
摘要翻译：涡轮分子泵包括壳体，其具有进气口，固定地安装在壳体中的定子和支撑在壳体中以相对于定子旋转的转子。定子和转子构成涡轮叶片泵送部分和用于抽空气体的槽泵送部分。提供防止转子碎片通过进气口散射的防散射构件。

4. 发明授权

US06217278B1 Turbomolecular pump 失效
标题翻译：涡轮分子泵
公开(公告)号：US06217278B1
公开(公告)日：2001-04-17
申请号：US09120469
申请日：1998-07-23
申请人： Atsushi Shiokawa , Matsutaro Miyamoto , Hirosi Sobukawa
发明人： Atsushi Shiokawa , Matsutaro Miyamoto , Hirosi Sobukawa
IPC分类号： F03B500
CPC分类号： F04D17/168 , F04D19/04
摘要： A turbomolecular pump comprising a rotor and a stator housed in a casing and an exhaust mechanism is formed between the rotor and the stator; wherein the turbomolecular pump has a valve body for opening and closing a suction port provided in the casing, and a valve driving mechanism for opening/closing-driving the valve body, wherein the valve driving mechanism is provided integrally with the turbomolecular pump.
摘要翻译：涡轮分子泵包括转子和收纳在壳体中的定子和排气机构，形成在转子和定子之间; 其中，所述涡轮分子泵具有用于打开和关闭设置在所述壳体中的吸入口的阀体和用于打开/关闭驱动所述阀体的阀驱动机构，其中所述阀驱动机构与所述涡轮分子泵一体设置。

5. 发明授权

US06307294B1 Magnetic suspending device controlled by temperature of controlled object 有权
标题翻译：受控对象温度控制的磁悬浮装置
公开(公告)号：US06307294B1
公开(公告)日：2001-10-23
申请号：US09522471
申请日：2000-03-09
申请人： Atsusi Ooyama , Hiroyuki Chino , Toshiharu Nakazawa , Atsushi Shiokawa
发明人： Atsusi Ooyama , Hiroyuki Chino , Toshiharu Nakazawa , Atsushi Shiokawa
IPC分类号： H02K709
CPC分类号： F16C32/0451 , F16C32/0446
摘要： A magnetic suspending device which can detect the temperature of a controlled object and assure a safe operation thereof without any need for any special construction or work to the device and any special maintenance is disclosed. In the magnetic suspending device comprising a pair of electromagnets (11, 13) disposed opposite to each other, a magnetizable controlled object (15) disposed between the pair of electromagnets (11, 13) and position displacement detection sensors (12, 14) disposed opposite to each other for detecting a position displacement of the controlled object (15), wherein detection signals from the position displacement detection sensors (12, 14) are inputted to a control circuit unit (20) for performing phase compensation and gain adjustment, wherein control outputs from the control circuit unit (20) control magnetic attractive or repulsive forces of the pair of electromagnets (11, 13), and wherein the controlled object is magnetically suspended by the pair of electromagnets without contact at an arbitrary position, a temperature operational circuit unit (30) is provided for detecting the size and temperature of the controlled object (15) using the detection signals from the position displacement detection sensors (12, 14).
摘要翻译：公开了一种能够检测受控对象的温度并确保其安全操作而不需要对设备进行任何特殊构造或工作以及任何特殊维护的磁悬浮装置。在包括彼此相对设置的一对电磁体（11,13）的磁悬浮装置中，设置在所述一对电磁体（11,13）之间的可磁化受控对象（15）和位置偏移检测传感器（12,14）彼此相对地检测受控物体的位置偏移，其中来自位置检测传感器（12,14）的检测信号被输入到用于执行相位补偿和增益调整的控制电路单元（20），其中来自控制电路单元（20）的控制输出控制该对电磁体（11,13）的吸引力或排斥力，并且其中受控对象由一对电磁铁磁性地悬挂在任意位置处没有接触，提供电路单元（30），用于使用来自位置位移的检测信号来检测受控对象（15）的尺寸和温度 nt检测传感器（12,14）。

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