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    • 3. 发明公开
    • Filter using piezoelectric resonator
    • 过滤器mit piezoelektrischem谐振器
    • EP1533897A2
    • 2005-05-25
    • EP04026155.4
    • 2004-11-04
    • MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
    • Yamakawa, TakehikoYamaguchi, HiroshiNakatsuka, HiroshiNakamura, HiroyukiOnishi, KeijiIshizaki, Toshio
    • H03H9/64H03H9/58
    • H03H9/605H03H9/6433
    • A series piezoelectric resonator (11) is connected in series between an input terminal (15a) and an output terminal (15b). A first electrode of a first parallel piezoelectric resonator (12a) is connected to a connection point between the input terminal (15a) and the series piezoelectric resonator (11), and a second electrode of the first parallel piezoelectric resonator (12a) is connected to a first terminal of a first inductor (13a). A first electrode of a a second parallel piezoelectric resonator (12b) is connected to a connection point between the series piezoelectric resonator (11) and the output terminal (15b), and a second electrode of the second parallel piezoelectric resonator (12b) is connected to a first terminal of a second inductor (13b). Second terminals of the inductors (13a,13b) are grounded. An additional piezoelectric resonator (14) is connected between the second electrode of the first parallel piezoelectric resonator (12a) and the second electrode of the second parallel piezoelectric resonator (12b).
    • 串联压电谐振器(11)串联连接在输入端子(15a)和输出端子(15b)之间。 第一并联压电谐振器(12a)的第一电极连接到输入端子(15a)和串联压电谐振器(11)之间的连接点,第一并联压电谐振器(12a)的第二电极连接到 第一电感器(13a)的第一端子。 第二并联压电谐振器(12b)的第一电极连接到串联压电谐振器(11)和输出端子(15b)之间的连接点,并且第二并联压电谐振器(12b)的第二电极连接到 第二电感器(13b)的第一端子。 电感器(13a,13b)的第二端接地。 附加的压电谐振器(14)连接在第一并联压电谐振器(12a)的第二电极和第二并联压电谐振器(12b)的第二电极之间。
    • 6. 发明公开
    • Piezoelectric resonator, production method thereof, filter, duplexer, and communication device
    • Piezoelektrischer谐振器,压电滤波器,双工器,Kommunikationsgerätund Herstellungsverfahren des piezoelektrischen谐振器
    • EP1530291A2
    • 2005-05-11
    • EP04026193.5
    • 2004-11-04
    • MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
    • Yamaguchi, HiroshiNakatsuka, HiroshiOnishi, KeijiYamakawa, TakehikoNakamura, Hiroyuki
    • H03H9/17
    • H03H9/173H03H3/04H03H2003/021
    • The present invention relates to a piezoelectric resonator including: a substrate; a lower electrode (103) provided on or above the substrate; a piezoelectric member (101) provided on or above the lower electrode; an upper electrode (102) provided on or above the piezoelectric member; and a cavity (104) provided below a vibration member consisting of the lower electrode, the piezoelectric member, and the upper electrode. In the case where a resonance frequency of vibration with a thickness of the vibration member being a half of a wavelength is taken as fr1, an average of ultrasonic velocity in a material forming the cavity is taken as Vc2, and a value determined based on the resonance frequency fr1 and the average of ultrasonic velocity Vc2 is λc (=Vc2/fr1), a depth t2 of the cavity is set as shown below, (2n-1) × λc 4 - λc 8 ≦ t 2 ≦ (2n-1) × λc 4 + λc 8 , where n is an arbitrary natural number.
    • 压电谐振器技术领域本发明涉及一种压电谐振器,包括:基板; 设置在所述基板上或上方的下电极(103) 设置在所述下电极上或上方的压电体(101) 设置在压电元件上或上方的上电极(102) 以及设置在由下电极,压电部件和上电极构成的振动部件的下方的空腔(104)。 在将振动部件的厚度为波长的一半的振动的共振频率作为fr1的情况下,将形成空腔的材料的超声波速度的平均值作为Vc2,将基于 谐振频率fr1和超声速度Vc2的平均值为λc(= Vc2 / fr1),空腔的深度t2如下所示设置:(2n-1)×λc DIVIDED 4-λc DIVIDED 8
    • 10. 发明公开
    • Piezoelectric resonator, filter, and duplexer
    • 压电谐振器,滤波器和双工器
    • EP1517444A3
    • 2005-08-31
    • EP04021697.0
    • 2004-09-13
    • MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
    • Nakatsuka, HiroshiOnishi, KeijiNakamura, HiroyukiYamakawa, Takehiko
    • H03H9/17
    • H03H9/588H03H9/02094H03H9/02102H03H9/0211H03H9/173H03H9/174H03H9/175H03H9/585H03H9/589
    • A piezoelectric resonator of the present invention is structured such that on a substrate (5) having a cavity (4) formed therein, a lower electrode (3), a piezoelectric body (1), a spurious component control layer (16) , and an upper electrode (2) are formed in this order frombottomup. The spurious component control layer (16) is a layer for controlling a spurious frequency, and composed of, for example, a metallic material, a dielectric material, or a piezoelectric material. By additionally providing the spurious component control layer (16), it is made possible to cause variation of the spurious frequency due to unwanted variation to become greater than variation in resonance frequency of the main resonance of the piezoelectric resonator. Thus, it is possible to realize a piezoelectric resonator having an admittance frequency response where no spurious component occurs between resonance frequency fr and antiresonance frequency fa.
    • 本发明的压电谐振器是这样构成的,即在其中形成有空腔(4)的衬底(5)上形成下电极(3),压电体(1),寄生成分控制层(16)和 从下方起依次形成上部电极(2)。 寄生成分控制层(16)是用于控制寄生频率的层,并且由例如金属材料,电介质材料或压电材料构成。 通过附加地提供寄生成分控制层(16),可以使由不希望的变化引起的寄生频率的变化变得大于压电谐振器的主谐振的谐振频率的变化。 因此,可以实现具有导纳频率响应的压电谐振器,其中谐振频率fr和反谐振频率fa之间不产生寄生分量。