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    • 3. 发明授权
    • Measuring element for a mass air flow sensor and mass air flow sensor
using the measuring element
    • 使用测量元件的质量空气流量传感器和质量空气流量传感器的测量元件
    • US5708205A
    • 1998-01-13
    • US649177
    • 1996-05-17
    • Masamichi YamadaKaoru UchiyamaIzumi WatanabeTadashi IsonoToshihiko Nakau
    • Masamichi YamadaKaoru UchiyamaIzumi WatanabeTadashi IsonoToshihiko Nakau
    • G01P5/12F02D35/00G01F1/68G01F1/692G01F1/698H01C13/00
    • G01F1/698G01F1/692H01C13/00
    • A measuring element for a mass air flow sensor formed on a substrate for measuring a flow rate of an objective fluid comprises a pair of heated resistors of thin films juxtaposed in the flowing direction of the objective fluid, formed at a thin film heated resistor forming part on the substrate, a pair of non-heated ambient temperature sensing resistors of thin films, formed at a thin film ambient temperature sensing resistor forming part on the substrate, and a plurality of electrode terminals of thin films formed at a supporting part at which the substrate is supported, being a part excluding the heated resistor thin film forming part and the thin film ambient temperature sensing resistor forming part, for taking out electrical signals from the heated resisters and the non-heated ambient temperature sensing resistors, wherein the thin film heated resistor forming part and the thin film ambient temperature sensing resistor forming part are shifted each other and arranged before and after in the flowing direction of the fluid, and shifted and arranged left and right in the direction perpendicular to the flowing direction so that the pair of the heated resistors and the pair of the non-heated do not superimpose each other in the viewing direction parallel to the flowing direction, and the supporting part is allocated at one end side of the substrate, at which the plurality of electrode terminals of thin films are formed.
    • 形成在用于测量物流的流量的基板上的质量空气流量传感器的测量元件包括一对加热的薄膜电阻,该薄膜并列在物流的流动方向上,形成在薄膜加热的电阻器形成部分 在衬底上,形成在薄膜环境温度感测电阻器上形成在衬底上的一部分薄膜的一对非加热环境温度感测电阻器,以及形成在支撑部分处的多个薄膜电极端子, 基板被支撑,除了加热的电阻器薄膜形成部分和薄膜环境温度感测电阻器形成部分之外的部分,用于从加热的电阻器和非加热的环境温度感测电阻器中取出电信号,其中薄膜被加热 电阻器形成部分和薄膜环境温度感测电阻器形成部分彼此相互偏移并且在之前和之后布置 并且沿垂直于流动方向的方向左右移动并布置,使得一对加热电阻器和一对未加热的电阻器在观察方向上不彼此叠置平行 并且支撑部分被分配在形成有多个薄膜电极端子的基板的一端侧。