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    • 4. 发明授权
    • Adhesive tape joining apparatus
    • 胶带接合装置
    • US07913735B2
    • 2011-03-29
    • US12390661
    • 2009-02-23
    • Masayuki YamamotoSaburo Miyamoto
    • Masayuki YamamotoSaburo Miyamoto
    • B29C65/50
    • H01L21/67132Y10T156/1168Y10T156/1195
    • An adhesive tape joining apparatus of this invention adopts an inverted “T”-shaped layout configured with a rectangular section that extends laterally when being viewed in a plane and a protrusion section that is coupled on a center of the rectangular section. An adhesive tape joining part is disposed in the protrusion section and joins an adhesive tape to a ring frame and a wafer. A transport mechanism is disposed in the rectangular section and transports the wafer, the ring frame, and the wafer held by the ring frame. An electronic substrate processing unit is disposed in at least one of two regions adjoining to the rectangular section with the protrusion section being interposed therebetween, and is coupled to the transport mechanism.
    • 本发明的胶带接合装置采用倒置的“T”形布置,其配置有在平面中横向延伸的矩形截面,以及连接在矩形部分中心的突出部分。 粘合带接合部分设置在突出部分中,并将粘合带连接到环形框架和晶片。 传送机构设置在矩形部分中并传送由环形框架保持的晶片,环形框架和晶片。 电子基板处理单元设置在与矩形部分相邻的两个区域中的至少一个中,其中插入有突出部分,并且联接到输送机构。