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    • 10. 发明授权
    • Electronic component and manufacturing method thereof
    • 电子元器件及其制造方法
    • US07486160B2
    • 2009-02-03
    • US11484270
    • 2006-07-10
    • Toshimasa TsudaSeiji AbeMinoru SakaiNatsuhiko Sakairi
    • Toshimasa TsudaSeiji AbeMinoru SakaiNatsuhiko Sakairi
    • H03H9/00
    • H03H9/1085H01L2224/05001H01L2224/05008H01L2224/05024H01L2224/05144H01L2224/05644H01L2224/16225H01L2924/00014H03H3/08H03H9/02937H03H9/059H01L2224/05099
    • There is provided an electronic component excellent in moisture resistance capable of ensuring electrical connection between electrodes and hermeticity of a sealed region including a vibrating part and suppressing an increase in size. An electronic component including a piezoelectric element provided with a vibrating part and a first electrode on one face of a piezoelectric substrate and a printed circuit substrate having a second electrode is constituted by including: a bump provided in advance on one of the first electrode and the second electrode and connected to the other of the first electrode and the second electrode; an annular first metal layer surrounding the vibrating part; and a solder material with a solidus temperature lower than the bump, sealing a space between the first metal layer and the printed circuit substrate to make a placement region of the vibrating part a hermetic space, whereby moisture permeation into the hermetic space and the outward spread of the solder material can be suppressed, and a space for the bump to spread by being melted can be omitted. Moreover, the electrical connection between the electrodes and the sealing of the placement region can be performed in separate processes, so that high hermeticity can be obtained.
    • 提供了一种能够确保电极之间的电连接和包括振动部分的密封区域的密封性并且抑制尺寸增加的耐湿性优异的电子部件。 包括在压电基板的一个表面上设置有振动部分和第一电极的压电元件的电子部件和具有第二电极的印刷电路基板包括:预先设置在第一电极和第二电极之一上的凸块 第二电极,并连接到第一电极和第二电极中的另一个; 围绕所述振动部的环状的第一金属层; 以及固体线温度低于凸点的焊料,密封第一金属层与印刷电路基板之间的空间,使振动部的放置区域成为密封空间,由此水分渗入密封空间和向外扩展 可以抑制焊料材料,并且可以省略通过熔化扩散的凸起的空间。 此外,电极之间的电连接和放置区域的密封可以在单独的工艺中进行,从而可以获得高密封性。