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    • 7. 发明授权
    • Polycrystalline silicon-based substrate for liquid jet recording head,
process for producing said substrate, liquid jet recording head in
which said substrate is used, and liquid jet recording apparatus in
which said substrate is used
    • 用于液体喷射记录头的多晶硅基底,用于制造所述基底的方法,使用所述基底的液体喷射记录头,以及使用所述基底的液体喷射记录装置
    • US5661503A
    • 1997-08-26
    • US078267
    • 1993-10-25
    • Haruhiko Terai
    • Haruhiko Terai
    • B41J2/05B41J2/16G01D15/18
    • B41J2/1646B41J2/1604B41J2/1628B41J2/1631B41J2/1632B41J2/1637B41J2/1642B41J2202/03
    • A substrate for liquid jet recording head including an electrothermal converting body comprising a heat generating resistor capable of generating thermal energy and a pair of wirings electrically connected to said heat generating resistor, characterized in that said substrate includes a base member constituted by a polycrystalline material such as a polycrystalline silicon material or the like, a process for producing this substrate, a liquid jet recording head in which said substrate, and a liquid jet recording apparatus in which said recording head is used.A desirable recording head which is free of a warpage or a curved portion and which provides a high quality recorded image can be produced by using said base member. Further, a desirable recording apparatus which enables to record a high quality image at a high recording speed. In the process of producing said substrate, the surface of the polycrystalline base member is thermally oxidized to provide a surface excelling in flatness.
    • PCT No.PCT / JP92 / 01434 Sec。 371日期:1993年10月25日 102(e)日期1993年10月25日PCT 1992年11月6日PCT PCT。 出版物WO93 / 08989 日期:1993年5月13日一种液体喷射记录头用基板,包括具有能产生热能的发热电阻体和与所述发热电阻体电连接的一对配线的电热转换体,其特征在于,所述基板包括: 诸如多晶硅材料等的多晶材料,制造该基板的方法,其中使用所述基板的液体喷射记录头和使用所述记录头的液体喷射记录装置。 通过使用所述基底构件,可以制造出没有翘曲或弯曲部分并且提供高质量记录图像的期望的记录头。 此外,能够以高记录速度记录高质量图像的期望的记录装置。 在制造所述衬底的过程中,多晶基底构件的表面被热氧化以提供平坦度优异的表面。
    • 8. 发明授权
    • Polycrystalline silicon substrate having a thermally-treated surface,
and process of making the same
    • 具有热处理表面的多晶硅基板及其制造方法
    • US5469200A
    • 1995-11-21
    • US84264
    • 1993-11-16
    • Haruhiko Terai
    • Haruhiko Terai
    • B41J2/16B41J2/05
    • B41J2/1604B41J2/1631B41J2/1632B41J2/1642B41J2/1646B41J2202/03
    • A substrate for liquid jet recording head including an electrothermal converting body comprising a heat generating resistor capable of generating thermal energy and a pair of wirings electrically connected to said heat generating resistor, characterized in that said substrate includes a base member constituted by a polycrystalline material and said polycrystalline base member has a thermal oxide layer formed by subjecting the surface of said polycrystalline base member to thermal oxidation treatment and thermally softening treatment. A process for producing said substrate, a liquid jet recording head in which said substrate is used, and a liquid jet recording apparatus in which said substrate is used. By using the above specific substrate, there can be provided a desirable elongated recording head which is free of a warpage or a curved portion at a reduced production cost.
    • PCT No.PCT / JP92 / 01482 Sec。 371日期:1993年11月16日 102(e)日期1993年11月16日PCT 1991年11月12日PCT PCT。 公开号WO93 / 09953 日本专利日本:1993年5月27日。一种液体喷射记录头用基板,其包括电热转换体,该电热转换体包括能够产生热能的发热电阻体和与所述发热电阻体电连接的一对配线,其特征在于, 由多晶材料构成,所述多晶基材具有通过对所述多晶基材的表面进行热氧化处理和热软化处理而形成的热氧化层。 一种制造所述基材的方法,其中使用所述基材的液体喷射记录头和使用所述基材的液体喷射记录装置。 通过使用上述特定的基板,可以提供一种期望的细长记录头,其以降低的生产成本不会发生翘曲或弯曲部分。