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1. 发明申请

US20110262580A1 STAMPER AND METHOD OF MANUFACTURING THE SAME 失效
标题翻译：冲压件及其制造方法
公开(公告)号：US20110262580A1
公开(公告)日：2011-10-27
申请号：US13077537
申请日：2011-03-31
申请人： Masatoshi SAKURAI , Takuya SHIMADA , Shinobu SUGIMURA , Satoshi SHIROTORI
发明人： Masatoshi SAKURAI , Takuya SHIMADA , Shinobu SUGIMURA , Satoshi SHIROTORI
IPC分类号： B32B3/30 , B29C59/02
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , G11B5/858
摘要： According to one embodiment, a stamper manufacturing method comprises electroless plating by using a master includes a substrate, a conductive underlayer formed on the substrate and having catalytic activity, projecting patterns having no catalytic activity and partially formed on a surface of the conductive underlayer having catalytic activity, and regions in which the conductive underlayer having catalytic activity is exposed between the projecting patterns to deposite selectively an amorphous conductive layer between the projecting patterns and in the regions in which the conductive underlayer is exposed, and forming stamper projections, electroplating on the stamper projections includes the projecting patterns and the amorphous conductive layer by using the amorphous conductive layer and the conductive underlayer as electrodes to form a stamper main body made of a crystalline metal, and releasing a stamper includes the stamper projections and the stamper main body from the master.
摘要翻译：根据一个实施例，压模制造方法包括使用主体的无电镀，其包括基板，形成在基板上的具有催化活性的导电底层，具有催化活性的突出图案，并部分地形成在具有催化作用的导电底层的表面上活性和其中具有催化活性的导电底层在突出图案之间暴露的区域，以选择性地沉积在突出图案之间的非晶导体层和导电底层暴露的区域中，并且形成压模突起，在压模上电镀突起包括通过使用非晶导体层和导电底层作为电极形成由结晶金属制成的压模主体的突出图案和非晶导体层，并且释放压模包括压模主体和压模主体。

2. 发明申请

US20100186877A1 METHOD OF MANUFACTURING STAMPER 有权
标题翻译：制造冲压件的方法
公开(公告)号：US20100186877A1
公开(公告)日：2010-07-29
申请号：US12691491
申请日：2010-01-21
申请人： Takuya SHIMADA , Shinobu SUGIMURA , Yoshiyuki KAMATA , Masatoshi SAKURAI
发明人： Takuya SHIMADA , Shinobu SUGIMURA , Yoshiyuki KAMATA , Masatoshi SAKURAI
IPC分类号： B32B37/02
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a stamper includes forming a first stamper from a master plate having lands and grooves through electroforming, forming a second stamper, a width of which is GW, from the first stamper through electroforming, forming a lamination film with a thickness of LLT on the second stamper, forming, on the lamination film, a second releasing layer, a transfer layer with a thickness of TLT and a third electroforming layer with a thickness of ELT, peeling off the transfer layer and the third electroforming layer from the second stamper to form a third stamper, and isotropically etching the transfer layer on the third stamper in an etching thickness of ET to reduce a width of lands of the third stamper, in which the following relations are satisfied: 10 nm≦ELT and ET≦TLT.
摘要翻译：根据一个实施例，制造压模的方法包括通过电铸从具有焊盘和槽的母板形成第一压模，通过电铸从第一压模形成其宽度为GW的第二压模，形成层压膜在第二压模上具有LLT的厚度，在层压膜上形成第二释放层，厚度为TLT的转印层和具有ELT厚度的第三电铸层，剥离转印层和第三电铸从而形成第三压模，并且以蚀刻厚度的ET对第三压模上的转印层进行各向同性蚀刻，以减小第三压模的焊盘的宽度，其中满足以下关系：10nm＆nlE; ELT 和ET＆nlE; TLT。

3. 发明申请

US20100314253A1 STAMPER MANUFACTURING METHOD 审中-公开
标题翻译：冲压器制造方法
公开(公告)号：US20100314253A1
公开(公告)日：2010-12-16
申请号：US12814415
申请日：2010-06-11
申请人： Takuya SHIMADA , Shinobu SUGIMURA , Yoshiyuki KAMATA , Masatoshi SAKURAI
发明人： Takuya SHIMADA , Shinobu SUGIMURA , Yoshiyuki KAMATA , Masatoshi SAKURAI
IPC分类号： C25D1/10
CPC分类号： C25D1/10
摘要： According to one embodiment, a three dimensional structure of a stamper is subject to etch by supplying a pulsed electric currentelectric current to the surface of the stamper.
摘要翻译：根据一个实施例，通过向压模的表面提供脉冲电流电流来对压模的三维结构进行蚀刻。

4. 发明申请

US20100155365A1 STAMPER MANUFACTURING METHOD 有权
标题翻译：冲压器制造方法
公开(公告)号：US20100155365A1
公开(公告)日：2010-06-24
申请号：US12641135
申请日：2009-12-17
申请人： Takuya SHIMADA , Shinobu SUGIMURA , Yoshiyuki KAMATA , Masatoshi SAKURAI
发明人： Takuya SHIMADA , Shinobu SUGIMURA , Yoshiyuki KAMATA , Masatoshi SAKURAI
IPC分类号： G11B5/84 , C23C14/34
CPC分类号： G11B5/855 , C23C14/04 , C23C14/185 , C23C14/34
摘要： According to one embodiment, when forming first, second, and third stampers by transferring three-dimensional patterns of a master, a height adjusting layer having a film thickness greater on the upper surface of a projection than on the bottom surface of a recess is formed between the second stamper and a second release layer, and the surface of the third stamper is etched with an acidic solution having a pH of less than 3.
摘要翻译：根据一个实施例，当通过传送主机的三维图案来形成第一，第二和第三压模时，形成在突起的上表面上比在凹部的底表面上具有更大的膜厚度的高度调节层在第二压模和第二剥离层之间，并且用pH小于3的酸性溶液蚀刻第三压模的表面。

5. 发明申请

US20110049089A1 ULTRAVIOLET-CURABLE RESIN MATERIAL FOR PATTERN TRANSFER AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD USING THE SAME 有权
标题翻译：用于图案转印和磁记录介质制造方法的超紫外线固化树脂材料
公开(公告)号：US20110049089A1
公开(公告)日：2011-03-03
申请号：US12872440
申请日：2010-08-31
申请人： Kazuyo MORITA , Seiji MORITA , Shinobu SUGIMURA , Masatoshi SAKURAI
发明人： Kazuyo MORITA , Seiji MORITA , Shinobu SUGIMURA , Masatoshi SAKURAI
IPC分类号： C23F1/00 , C08J3/28
CPC分类号： H01L21/02288 , B82Y10/00 , B82Y40/00 , C08F220/18 , G03F7/0002 , G03F7/027 , G11B5/855 , H01L21/0212 , H01L21/02348
摘要： According to one embodiment, an ultraviolet curing curable resin material for pattern transfer is provided. The resin contains isobornyl acrylate, an acrylate having a fluorene skeleton, a polyfunctional acrylate, and a polymerization initiator.
摘要翻译：根据一个实施例，提供了用于图案转印的紫外线固化树脂材料。树脂含有丙烯酸异冰片酯，具有芴骨架的丙烯酸酯，多官能丙烯酸酯和聚合引发剂。

6. 发明申请

US20090277574A1 PATTERN TRANSFER METHOD 审中-公开
标题翻译：图案转移方法
公开(公告)号：US20090277574A1
公开(公告)日：2009-11-12
申请号：US12463860
申请日：2009-05-11
申请人： Shinobu SUGIMURA , Seiji MORITA , Akiko YUZAWA , Masatoshi SAKURAI
发明人： Shinobu SUGIMURA , Seiji MORITA , Akiko YUZAWA , Masatoshi SAKURAI
IPC分类号： B32B37/10
CPC分类号： B29C59/022 , B29C35/0888 , B29C2035/0827 , B29C2059/023 , B29C2791/006 , B29D17/005 , B29L2017/005 , G11B7/263
摘要： According to one embodiment, a pattern transfer method includes spin-coating one surface of a medium substrate with photopolymer having viscosity of 10 cps or less to form an photopolymer layer having a thickness of 200 nm or less, bonding the one surface of the medium substrate and the patterned surface of the first transparent stamper under vacuum with the photopolymer layer sandwiched therebetween, applying an ultraviolet ray to the photopolymer layer through the first transparent stamper to cure the photopolymer layer, and peeling off the first transparent stamper to form the photopolymer layer to which patterns of protrusions and recesses are transferred on the one surface of the medium substrate to control a thickness of the photopolymer layer remaining in recesses to 100 nm or less.
摘要翻译：根据一个实施方案，图案转印方法包括用粘度为10cps或更低的光聚合物旋涂介质基质的一个表面以形成厚度为200nm或更小的光聚合物层，将介质基材的一个表面和第一透明压模的图案化表面，其中夹在其间的光聚合物层，通过第一透明压模向光聚合物层施加紫外线以固化光聚合物层，并剥离第一透明压模以形成光聚合物层在介质基板的一个表面上转移突起和凹槽的图案，以将保留在凹槽中的光聚合物层的厚度控制在100nm以下。

7. 发明申请

US20090243152A1 IMPRINTING METHOD AND STAMPER 有权
标题翻译：印刷方法和印章
公开(公告)号：US20090243152A1
公开(公告)日：2009-10-01
申请号：US12413366
申请日：2009-03-27
申请人： Akiko YUZAWA , Seiji MORITA , Shinobu SUGIMURA , Masatoshi SAKURAI
发明人： Akiko YUZAWA , Seiji MORITA , Shinobu SUGIMURA , Masatoshi SAKURAI
IPC分类号： B29C59/02
CPC分类号： B29C59/022 , B29C37/0003 , B29C2059/023 , B29L2017/005 , G11B5/855 , G11B7/263
摘要： According to one embodiment, an imprinting method includes applying a resist to a substrate, imprinting a stamper on which protruded patterns are formed against the resist applied to the substrate, forcing a distal end of a peeling wedge into a part between the substrate and the stamper, and introducing a gas between the substrate and the stamper to peel off the stamper from the substrate, in which a gap between the substrate and the stamper is made larger than a thickness of the resist at a part into which the distal end of the peeling wedge is forced.
摘要翻译：根据一个实施例，压印方法包括将抗蚀剂施加到基板上，对施加到基板上的抗蚀剂印刷形成突出图案的压模，迫使剥离楔的远端进入基板和压模之间的部分并且在衬底和压模之间引入气体以从衬底剥离压模，其中衬底和压模之间的间隙大于在剥离的远端处的抗蚀剂的厚度楔被迫。

8. 发明申请

US20100207302A1 STAMPER MOLDING DIE AND METHOD FOR MOLDING STAMPER USING THE SAME 审中-公开
标题翻译：冲压模具和使用该模具的冲压机的方法
公开(公告)号：US20100207302A1
公开(公告)日：2010-08-19
申请号：US12709206
申请日：2010-02-19
申请人： Yasuaki OOTERA , Shinobu SUGIMURA , Seiji MORITA , Masatoshi SAKURAI
发明人： Yasuaki OOTERA , Shinobu SUGIMURA , Seiji MORITA , Masatoshi SAKURAI
IPC分类号： B29C45/56
CPC分类号： B29C45/2632 , B29C33/3842 , B29C45/38 , B29C45/43
摘要： According to one embodiment, in a die for manufacturing a resin stamper, the following are defined the sizes of a resin injection hole and a cut punch receiving portion of a fixed-side template, areas in which a vacuum suction hole and an air-blow hole, respectively, are formed, the diameter of a cut punch on a moving-side template, and the taper angle of the peripheral portion of a cavity.
摘要翻译：根据一个实施例，在用于制造树脂压模的模具中，定义了固定侧模板的树脂注射孔和切割冲头承受部的尺寸，真空吸入孔和吹气的区域分别形成移动侧模板上的切割冲孔的直径和腔的周边部的锥角。

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