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1. 发明授权

US07092104B2 Speckle interferometer apparatus 失效
标题翻译：散斑干涉仪
公开(公告)号：US07092104B2
公开(公告)日：2006-08-15
申请号：US10779599
申请日：2004-02-18
申请人： Masatoshi Hizuka , Hideo Kanda , Takayuki Saito
发明人： Masatoshi Hizuka , Hideo Kanda , Takayuki Saito
IPC分类号： G01B11/02
CPC分类号： G01B9/02022 , G01B9/02007 , G01B9/02069 , G01B9/02095 , G01B9/02096 , G01B11/162
摘要： In a speckle interferometer apparatus 2, an optical member mounting device 10 mounted with optical members including a pair of luminous flux outputting devices 9a, 9b, 9c, 9d is disposed on the object side of a main unit of an imaging device 3 while being separated from the imaging device 3. A light-transmitting area 14 is formed between the pair of luminous flux outputting devices 9a, 9b, 9c, 9d so as to transmit therethrough interference light from an object surface.
摘要翻译：在散斑干涉仪装置2中，安装有包括一对光束输出装置9a，9b，9c，9d的光学构件的光学构件安装装置10设置在成像装置的主单元的物体侧同时与成像装置3分离。在一对光束输出装置9a，9b，9c，9d之间形成透光区域14，以便透射来自物体表面的干涉光。

2. 发明授权

US5694217A Interferometer for testing forms of surface and stress and strain 失效
标题翻译：用于测试表面和应力和应变形式的干涉仪
公开(公告)号：US5694217A
公开(公告)日：1997-12-02
申请号：US614939
申请日：1996-03-11
申请人： Masatoshi Hizuka
发明人： Masatoshi Hizuka
IPC分类号： G01B9/02 , G01B11/16 , G02B26/00
CPC分类号： G01B11/161 , G01B11/168 , G01B9/02024 , G01L1/24 , G01L5/0047 , G01B2290/70
摘要： A .lambda./4 plate is inserted into and retracted from an optical path of polarized light, thereby making it possible to select whether a noise component due to the stress strain within a test object is to be presented in fringes or not. As an operator operates an operation mechanism for a .lambda./4 plate (4), the .lambda./4 plate (4) is inserted into the optical path when a laser beam (2) should be turned into circularly polarized light, whereas the .lambda./4 plate (4) is retracted out of the optical path when the laser beam (2) should be turned into linearly polarized light.
摘要翻译：将λ/ 4板插入到偏振光的光路中并从其中缩回，从而可以选择是否以条纹呈现由于测试对象内的应力应变引起的噪声分量。作为操作者操作λ/ 4板（4）的操作机构，当激光束（2）应变成圆偏振光时，λ/ 4板（4）插入到光路中，而λ/ 当激光束（2）变为直线偏振光时，4板（4）从光路中退出。

3. 发明授权

US5786896A Oblique incidence interferometer with fringe scan drive 失效
标题翻译：倾斜入射干涉仪带边缘扫描驱动
公开(公告)号：US5786896A
公开(公告)日：1998-07-28
申请号：US650994
申请日：1996-05-21
申请人： Masatoshi Hizuka
发明人： Masatoshi Hizuka
IPC分类号： G01B9/02 , G01B11/30
CPC分类号： G01B9/02022 , G01B9/02032 , G01B2290/30 , G01N21/8806
摘要： An oblique incidence interferometer capable of fringe scanning by use of a fringe scan drive association with a first or second diffraction grating member of the interferometer to drive the associated grating member step by step over a micrometric distance in a direction perpendicular to a path of light in travel in a straightforward direction. Laser light from a light source 20 is diffracted into a zero order diffraction wave L1 in travel in a straightforward direction and a +1 order diffraction wave L2 by a first diffraction grating member 26 of a grating assembly 41. The grating assembly 41 is vertically movably supported on a surface plate 42 by a pair of level support members 43 each having a stratified leaf spring structure. The grating assembly 41 sits on a piezoelectric actuator 45 which serves as a fringe scan drive for driving the first diffraction grating member 26 over a micrometric distance in the vertical direction. As the first diffraction grating member 26 is moved in a direction perpendicular to the light path of incident light, +1 order diffraction wave incident on a specimen 28 is shifted in phase, causing a displacement of a predetermined extent to interference fringes as observed through an image sensor 32.
摘要翻译：一种倾斜入射干涉仪，其能够通过使用与干涉仪的第一或第二衍射光栅构件的边缘扫描驱动关联来边缘扫描，以在垂直于光路径的方向上逐步地在微米距离上驱动相关联的光栅构件行进在一个直接的方向。来自光源20的激光通过光栅组件41的第一衍射光栅构件26在直线方向行进和+1阶衍射波L2衍射成零级衍射波L1。光栅组件41可垂直移动通过一对具有层状板簧结构的水平支撑构件43支撑在平板42上。光栅组件41位于压电致动器45上，压电致动器45用作在垂直方向上以微米距离驱动第一衍射光栅元件26的边缘扫描驱动器。当第一衍射光栅元件26在与入射光的光路垂直的方向上移动时，入射到样本28上的+1级衍射波相位偏移，导致预定范围的位移与干涉条纹的位移，如通过图像传感器32。

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