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    • 3. 发明授权
    • Rotary joint for fluid
    • 流体旋转接头
    • US06234815B1
    • 2001-05-22
    • US09331413
    • 1999-06-21
    • Junji OmiyaMasato Wada
    • Junji OmiyaMasato Wada
    • H01R460
    • F16L27/087B24B37/04B24B41/04B24B55/02
    • A rotary joint for fluids that provides a completely sealed path for the flow of polishing solution and which permits the supply of electricity to a polished surface detector. The rotary joint of the present invention is essentially made up of a joint block (1) and a rotator assembly (2). To the rotator assembly (2) rotatably held in the joint block (1) is attached a polishing pad shaft (104). Between the joint block (1) and the rotator assembly (2) is formed a seal space closed by a pair of seal units (5, 5), each comprising sealing rings (51, 52) which rotate in relation to each other. A fluid passage (7) continuous via a seal space (50) and running through the joint block (1) and the rotator assembly (2) is formed, and a wiring conduit running from an electric source unit (3) to the polished surface detector on the polishing pad (104) is also formed. The wiring conduit comprises a rotary connector unit (4) made up of a casing (40) and a first connector (41) supported by the rotator assembly (2) and a second connector (42) held by the joint block (1) with the two connectors (41, 42) electrically connected to each other and relatively rotatable, electric wiring (42a) running from the power unit (3) to the second connector (42), and electric wiring (41a) running from the first connector (41) to the polished surface detector (110) through a wiring conduit (24) formed in the rotator assembly (2).
    • 用于流体的旋转接头,其为抛光溶液的流动提供完全密封的路径,并允许向抛光表面检测器供电。 本发明的旋转接头主要由接头块(1)和转子组件(2)构成。 可旋转地保持在接头块(1)中的旋转体组件(2)安装有抛光垫轴(104)。 在关节块(1)和旋转体组件(2)之间形成有由一对密封单元(5,5)封闭的密封空间,每个密封单元包括相对于彼此旋转的密封环(51,52)。 形成了经由密封空间(50)连续通过接头块(1)和转子组件(2)的流体通道(7),以及从电源单元(3)延伸到抛光表面 还形成了抛光垫(104)上的检测器。 接线导管包括由壳体(40)和由转子组件(2)支撑的第一连接器(41)和由接头块(1)保持的第二连接器(42)构成的旋转连接器单元(4) 从电力单元(3)到第二连接器(42)相互电连接并相对旋转的电气配线(42a)的两个连接器(41,42)和从第一连接器( 41)通过形成在转子组件(2)中的布线导管(24)到抛光表面检测器(110)。
    • 5. 发明申请
    • Information Processing Device Having Securing Function
    • 具有安全功能的信息处理设备
    • US20090276585A1
    • 2009-11-05
    • US11887484
    • 2006-04-12
    • Masato Wada
    • Masato Wada
    • G06F12/14G06F12/00
    • H04W4/029G06F12/1441H04L12/66H04L63/10H04L63/107H04L67/18H04W48/04
    • An access information storage section (106) stores access information in which an effective area, used for determining whether access to a portion of or all of data stored in a data storage section (107) is permitted/not permitted, is defined. A position information acquisition section (101) acquires position information about the current position from a position information providing terminal (300). When access to specific data having the access information occurs, an access determination process section (102) determines whether the current position about which the position information is acquired by the position information acquisition section (101) is within or outside the effective area defined for the specific data. A data management section (105) performs control by which the access to the specific data stored in the data storage section (107) is permitted when the access determination process section (102) determines that the current position is within the effective area, and by which the access to the specific data is denied when the access determination process section (102) determines that the current position is outside the effective area.
    • 访问信息存储部分(106)存储访问信息,其中确定是否允许/不允许访问存储在数据存储部分(107)中的数据的一部分或全部的有效区域。 位置信息获取部(101)从位置信息提供终端(300)获取关于当前位置的位置信息。 当访问具有访问信息的特定数据时,访问确定处理部分(102)确定由位置信息获取部分(101)获取位置信息的当前位置是否在为 具体数据。 当访问确定处理部分(102)确定当前位置在有效区域内时,数据管理部分(105)执行对存储在数据存储部分(107)中的特定数据的访问的控制,并且通过 当访问确定处理部分(102)确定当前位置在有效区域之外时,对特定数据的访问被拒绝。
    • 7. 发明授权
    • Rotary joint
    • US06412822B1
    • 2002-07-02
    • US09403200
    • 1999-10-15
    • Junyi OmiyaMasato Wada
    • Junyi OmiyaMasato Wada
    • F16L2700
    • F16L27/087F16L27/0828Y10S277/937Y10S277/941
    • A mechanical seal rotary joint of the end-face contact type which permits slurry fluids, such as polishing solution, to pass through a fluid passage without leaking out of the relatively rotating contact area therein. The rotary joint of the present invention comprises: a first joint body (1); a second joint body (2) connected rotatably to the first joint body (1); a prime seal unit (3) provided between the opposed end portions (11, 21) of the two joint bodies (1, 2); and a continuous line of prime fluid passage (6). The prime seal unit (3) is a mechanical seal comprising: a stationary seal ring (30) fixed on the end portion (21) of the second joint body (2) concentrically with the axis of rotation as its center; a movable seal ring (31) held on the end portion (11) of the first joint body (1) and concentric with and opposite to the stationary seal ring (30); a rotation stopper (32a) provided on the outer circumferential side of the movable seal ring (31) for preventing the relative rotation of the seal ring (31) while allowing the seal ring (31) to move in the axial direction; and springs (33a) to thrust and press the movable seal ring (31) against the stationary seal ring (30). Thus, the prime seal unit (3) is constructed so as to provide a seal between the inner circumferential region (3a) and the outer circumferential region (3b) of the two seal rings (30, 31). The prime fluid passage (6) is made up of the inner circumferential regions (3a) of the two seal ring (30, 31), a first primary passage section (60) passing through the first joint body (1) and leading into the inner circumferential region (3a) and a second prime fluid passage section (61) passing through the second joint body (2) and leading into the inner circumferential region (3a). A slurry fluid (106), such as a polishing solution, flows through the prime fluid passage (6) without leaking out of the relatively rotating section of the joint bodies (1, 2).