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    • 5. 发明申请
    • METHOD FOR CONTROLLING THRESHOLD VOLTAGE OF SEMICONDUCTOR ELEMENT
    • 用于控制半导体元件的阈值电压的方法
    • US20110076790A1
    • 2011-03-31
    • US12992073
    • 2009-05-11
    • Masato OfujiYasuyoshi TakaiTakehiko KawasakiNorio KanekoRyo Hayashi
    • Masato OfujiYasuyoshi TakaiTakehiko KawasakiNorio KanekoRyo Hayashi
    • H01L21/66
    • H01L29/7869H01L29/66969
    • A method for controlling the threshold voltage of a semiconductor element having at least a semiconductor as a component is characterized in including a process to measure one of a threshold voltage and a characteristic value serving as an index for the threshold voltage; a process to determine one of the irradiation intensity, irradiation time, and wavelength of the light for irradiating the semiconductor based on one of the measured threshold voltage and the measured characteristic value serving as the index for the threshold voltage; and a process to irradiate light whose one of the irradiation intensity, irradiation time, and wavelength has been determined onto the semiconductor; wherein the light irradiating the semiconductor is a light having a longer wavelength than the wavelength of the absorption edge of the semiconductor, and the threshold voltage is changed by the irradiation of the light.
    • 用于控制具有至少半导体作为分量的半导体元件的阈值电压的方法的特征在于包括测量作为阈值电压的指标的阈值电压和特征值之一的处理; 基于所测量的阈值电压和作为阈值电压的指标的测量特征值之一来确定用于照射半导体的光的照射强度,照射时间和波长之一的处理; 以及将照射强度,照射时间和波长中的一个已经确定到半导体上的光照射的过程; 其中照射半导体的光是比半导体的吸收边缘的波长长的波长的光,并且通过光的照射来改变阈值电压。
    • 7. 发明授权
    • Method for controlling threshold voltage of semiconductor element
    • 半导体元件阈值电压控制方法
    • US08530246B2
    • 2013-09-10
    • US12992073
    • 2009-05-11
    • Masato OfujiYasuyoshi TakaiTakehiko KawasakiNorio KanekoRyo Hayashi
    • Masato OfujiYasuyoshi TakaiTakehiko KawasakiNorio KanekoRyo Hayashi
    • H01L21/00H01L21/336H01L21/331G01R31/26
    • H01L29/7869H01L29/66969
    • A method for controlling the threshold voltage of a semiconductor element having at least a semiconductor as a component is characterized in including a process to measure one of a threshold voltage and a characteristic value serving as an index for the threshold voltage; a process to determine one of the irradiation intensity, irradiation time, and wavelength of the light for irradiating the semiconductor based on one of the measured threshold voltage and the measured characteristic value serving as the index for the threshold voltage; and a process to irradiate light whose one of the irradiation intensity, irradiation time, and wavelength has been determined onto the semiconductor; wherein the light irradiating the semiconductor is a light having a longer wavelength than the wavelength of the absorption edge of the semiconductor, and the threshold voltage is changed by the irradiation of the light.
    • 用于控制具有至少半导体作为分量的半导体元件的阈值电压的方法的特征在于包括测量作为阈值电压的指标的阈值电压和特征值之一的处理; 基于所测量的阈值电压和作为阈值电压的指标的测量特征值之一来确定用于照射半导体的光的照射强度,照射时间和波长之一的处理; 以及将照射强度,照射时间和波长中的一个已经确定到半导体上的光照射的过程; 其中照射半导体的光是比半导体的吸收边缘的波长长的波长的光,并且通过光的照射来改变阈值电压。