会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Positive-working photosensitive resin precursor composition
    • 正性感光性树脂前体组合物
    • US06723484B1
    • 2004-04-20
    • US09567106
    • 2000-05-08
    • Masao TomikawaNaoyo OkamotoSatoshi YoshidaRyoji Okuda
    • Masao TomikawaNaoyo OkamotoSatoshi YoshidaRyoji Okuda
    • G03F7023
    • G03F7/0233C08G73/1025C08L79/08
    • The present invention relates to a positive-working photosensitive resin precursor composition which is characterized in that it contains (a) polymer in which the chief component comprises structural units of the kind where the bonding between structural units is represented by general formula (1) and (b) photoacid generator, and it can form a pattern by light irradiation and subsequent developing, and the total carboxyl groups contained in said polymer is from 0.02 to 2.0 mmol/g, and it provides a photosensitive resin composition of high sensitivity which can be developed by alkali. (R1 is an organic group of valency from 3 to 8 having at least 2 carbon atoms, R2 is an organic group of valency from 2 to 6 having at least 2 carbon atoms, R3 is hydrogen or an organic group with from 1 to 10 carbons. n is an integer of value from 3 to 100,000, m is 1 or 2, p and q are integers of value from 0 to 4 and p+q>0).
    • 本发明涉及一种正性感光性树脂前体组合物,其特征在于,其含有(a)主要成分包含结构单元之间的结合由通式(1)表示的结构单元和 (b)光致酸发生剂,可以通过光照射和随后的显影形成图案,所述聚合物中所含的总羧基为0.02〜2.0mmol / g,提供高灵敏度的感光性树脂组合物,其可以是 (R 1是具有至少2个碳原子的3至8价的有机基团,R 2是具有至少2个碳原子的2至6价的有机基团,R 3 是氢或1〜10个碳的有机基团,n为3〜100,000的整数,m为1或2,p和q为0〜4的整数,p + q> 0)。