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    • 2. 发明授权
    • Method for fabricating hybrid optical integrated circuit
    • 制造混合光集成电路的方法
    • US4735677A
    • 1988-04-05
    • US38127
    • 1987-04-02
    • Masao KawachiYasufumi YamadaMitsuho YasuHiroshi TeruiMorio Kobayashi
    • Masao KawachiYasufumi YamadaMitsuho YasuHiroshi TeruiMorio Kobayashi
    • G02B6/12G02B6/28G02B6/30G02B6/34G02B6/42G02B6/43H01L21/306B44C1/22C03C15/00C03C25/06
    • G02B6/12007G02B6/12004G02B6/28G02B6/30G02B6/4214G02B6/423G02B6/4246G02B2006/12109G02B6/43
    • A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a silicon substrate, an optical fiber and an optical device coupled optically to the optical waveguide, and an optical fiber guide and an optical device guide on the substrate for aligning the optical fiber and the optical device at predetermined positions, respectively, relative to the optical waveguide. Islands carrying electrical conductors are disposed on the substrate. A first electrical conductor film is formed on the substrate. Second electrical conductor films are formed on the top surfaces of the optical waveguide, the optical fiber guide, the optical device guide and the islands and are electrically isolated from the first electrical conductor film. An electrical conductor member is provided to feed electric power from the first and second electric conductor films to the optical device which needs the power supply. The optical waveguide, the optical fiber guide, the optical device guide and the islands are formed from the same high-silica glass optical waveguide film. Alignment of various portions is facilitated when assembling the circuit. A high coupling efficiency is realized with a low cost.
    • 一种制造具有在硅衬底上形成的高石英玻璃光波导的混合光集成电路的方法,光纤和光学器件耦合到光波导的光学器件,以及光纤引导件和衬底上的光学器件引导件 用于将光纤和光学装置分别相对于光波导对准在预定位置。 携带电导体的群岛设置在基板上。 在基板上形成第一导电膜。 第二电导体膜形成在光波导,光纤引导件,光学器件引导件和岛的顶表面上,并与第一导电膜电隔离。 提供电导体构件以将电力从第一和第二导电膜馈送到需要电源的光学装置。 光波导,光纤引导件,光学器件引导件和岛由相同的高石英玻璃光波导膜形成。 当组装电路时,各部分的对准是有利的。 以低成本实现高耦合效率。