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    • 6. 发明授权
    • Thin film fabrication method and thin film fabrication apparatus
    • 薄膜制造方法和薄膜制造装置
    • US06348238B1
    • 2002-02-19
    • US09453883
    • 2000-02-15
    • Shigeru MizunoMakoto SatouManabu TagamiHideki Satou
    • Shigeru MizunoMakoto SatouManabu TagamiHideki Satou
    • C23C1432
    • H01J37/32706C23C14/354H01J37/3405
    • A thin film is fabricated while causing ions in a plasma P to be incident by effecting biasing relative to the space potential of the plasma P by imparting a set potential to the surface of a substrate 9. A bias system 6 causes the substrate surface potential Vs to vary in pulse form by imposing an electrode imposed voltage Ve in pulse form on a bias electrode 23 which is in a dielectric block 22. The pulse frequency is lower than the oscillation frequency of ions in the plasma P, and the pulse period T, pulse width t and pulse height h are controlled by a control section 62 in a manner such that the incidence of ions is optimized. The imposed pulses are controlled in a manner such that the substrate surface potential Vs recovers to a floating potential Vf at the end of a pulse period T, and that the ion incidence energy temporarily crosses a thin film sputtering threshold value in a pulse period T.
    • 制造薄膜,同时使等离子体P中的离子通过相对于等离子体P的空间电位施加偏置而入射,通过给基板9的表面赋予设定电位。偏置系统6使基板表面电位Vs 通过在介质块22中的偏置电极23上施加脉冲形式的电极施加的电压Ve来改变脉冲形式。脉冲频率低于等离子体P中的离子的振荡频率,脉冲周期T, 脉冲宽度t和脉冲高度h由控制部分62以使得离子的入射被优化的方式控制。 施加的脉冲以使得在脉冲周期T结束时基板表面电位Vs恢复到浮动电位Vf的方式被控制,并且离子入射能量在脉冲周期T中暂时跨越薄膜溅射阈值。
    • 9. 发明授权
    • Thin film fabrication method and thin film fabrication apparatus
    • 薄膜制造方法和薄膜制造装置
    • US06872289B2
    • 2005-03-29
    • US09799609
    • 2001-03-07
    • Shigeru MizunoMakoto SatouManabu TagamiHideki Satou
    • Shigeru MizunoMakoto SatouManabu TagamiHideki Satou
    • C23C14/34C23C14/35C23C16/52H01J37/34H01L21/285C23C16/00
    • H01J37/32706C23C14/354H01J37/3405
    • A thin film is fabricated while causing ions in a plasma P to be incident by effecting biasing relative to the space potential of the plasma P by imparting a set potential to the surface of a substrate 9. A bias system 6 causes the substrate surface potential Vs to vary in pulse form by imposing an electrode imposed voltage Ve in pulse form on a bias electrode 23 which is in a dielectric block 22. The pulse frequency is lower than the oscillation frequency of ions in the plasma P, and the pulse period T, pulse width t and pulse height h are controlled by a control section 62 in a manner such that the incidence of ions is optimized. The imposed pulses are controlled in a manner such that the substrate surface potential Vs recovers to a floating potential Vf at the end of a pulse period T, and that the ion incidence energy temporarily crosses a thin film sputtering threshold value in a pulse period T.
    • 制造薄膜,同时使等离子体P中的离子通过相对于等离子体P的空间电位施加偏置而入射,通过赋予衬底9的表面设定电位。偏置系统6使衬底表面电位Vs 通过在介质块22中的偏置电极23上施加脉冲形式的电极施加的电压Ve来改变脉冲形式。脉冲频率低于等离子体P中的离子的振荡频率,脉冲周期T, 脉冲宽度t和脉冲高度h由控制部分62以使得离子的入射被优化的方式控制。 施加的脉冲以使得在脉冲周期T结束时基板表面电位Vs恢复到浮动电位Vf的方式被控制,并且离子入射能量在脉冲周期T中暂时跨越薄膜溅射阈值。
    • 10. 发明授权
    • Bearing device for miniature motors
    • 微型电机轴承装置
    • US5405199A
    • 1995-04-11
    • US983832
    • 1992-12-01
    • Kazuichi MabuchiYoshiaki EgawaMakoto Satou
    • Kazuichi MabuchiYoshiaki EgawaMakoto Satou
    • F16C23/04F16C27/02H02K5/16H02K5/167F16C11/06
    • F16C23/045F16C27/02H02K5/1672Y10T403/32778
    • A bearing device for miniature motors comprising a stator formed by fitting an end plate to an open end of a housing formed into a bottomed hollow cylindrical shape. A rotor rotatably supported by bearings is provided on the housing and the end plate. A bearing retaining body is provided formed of a resin material into a basket shape. The bearing retaining body has such a construction that a flange and a bottom member, both formed into a ring shape, are connected by a plurality of axially extending and circumferentially disposed connecting members. A plurality of axially extending support columns are disposed in the circumferential direction on the inner edge surface of the bottom member. The bearing retaining body is fitted to a retaining part provided on the housing and/or the end plate, and a ball bearing is supported via the supporting claims.
    • 一种用于微型电动机的轴承装置,其包括定子,该定子通过将端板安装到形成为有底的中空圆柱形的壳体的开口端而形成。 由轴承可转动地支撑的转子设置在壳体和端板上。 轴承保持体由树脂材料形成为篮状。 轴承保持体具有通过多个沿轴向延伸且周向设置的连接部件连接而形成环状的凸缘和底部部件的结构。 多个轴向延伸的支撑柱在圆周方向上设置在底部构件的内边缘表面上。 轴承保持体安装在设置在壳体和/或端板上的保持部件上,并且球轴承通过支撑件支撑。