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    • 4. 发明授权
    • Spatial light modulator having a germanium oxide light shielding layer
containing additive material or laminated with SiO.sub.2
    • 空间光调制器具有包含添加剂材料或层叠有SiO 2的锗氧化物遮光层
    • US5648861A
    • 1997-07-15
    • US595029
    • 1996-01-31
    • Hiroyuki Natsuhori
    • Hiroyuki Natsuhori
    • G02F1/1335G02B5/00G02F1/135G02F1/1333G02F1/133
    • G02F1/135G02F2001/1351
    • The present invention provides a spatial light modulator having a light shielding layer having a high resistivity and a high light shielding characteristic capable of improving a contrast ratio without causing image defects. The spatial light modulator has at least a first transparent electrode 14, a photoconductive layer 18, a light shielding layer 12, a light reflecting layer 11, a photomodulation layer 10, and a second transparent electrode 16 stacked in this order. A driving power source 18 is connected across the pair of the transparent electrodes. the light shielding layer is made of a germanium oxide containing an amount of oxygen from 25 to 50 at % or a germanium oxide containing at least one additive selected from a group consisting of Cu, Ag, Au, Fe, Co and Ni within 20 at % defined as an atomic ratio of the additive to a combination of the additive and germanium. Further, a laminated structure composed of germanium oxide layers and SiO.sub.2 layers are adopted as the light shielding layer.
    • 本发明提供一种空间光调制器,其具有能够提高对比度而不引起图像缺陷的具有高电阻率和高遮光特性的遮光层。 空间光调制器至少具有按顺序堆叠的第一透明电极14,光电导层18,遮光层12,光反射层11,光调制层10和第二透明电极16。 驱动电源18跨越该对透明电极连接。 遮光层由含有25〜50原子%的氧的氧化锗或含有至少一种选自Cu,Ag,Au,Fe,Co和Ni的添加剂的氧化锗在20℃以内 %定义为添加剂与添加剂和锗的组合的原子比。 此外,采用由氧化锗层和SiO 2层组成的叠层结构作为遮光层。