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    • 6. 发明申请
    • Lead frame substrate and method of manufacturing the same
    • 引线框架基板及其制造方法
    • US20110169153A1
    • 2011-07-14
    • US13064314
    • 2011-03-17
    • Takehito TsukamotoSusumu ManiwaJunko Toda
    • Takehito TsukamotoSusumu ManiwaJunko Toda
    • H01L23/495H01L21/48
    • H01L21/4832H01L23/3121H01L24/73H01L2224/32245H01L2224/45144H01L2224/48247H01L2224/73265H01L2924/00012H01L2924/00
    • A method includes: forming a photoresist pattern to form each of a semiconductor element mounting section on which a semiconductor element is mounted, semiconductor element electrode connection terminals for connection with electrodes of the semiconductor element, and a first outer frame section on a first surface of a metal plate; forming a photoresist pattern to form each of external connection terminals, a second outer frame section, and grooves in at least a part of the second outer frame section on a second surface of the metal plate; etching a metal plate exposing section, in which the metal plate of the second surface is exposed, to form holes that do not pass through the metal plate exposing section and grooves that run from an inside to an outside of the second outer frame section; coating a pre-mold resin on the holes and the grooves, and heating the pre-mold resin under pressure using a flat-bed press to form a resin layer; and etching the first surface to form the semiconductor element mounting section, the semiconductor element electrode connection terminals electrically connected with the external connection terminals, and the first outer frame section.
    • 一种方法包括:形成光致抗蚀剂图案以形成其上安装有半导体元件的半导体元件安装部分,用于与半导体元件的电极连接的半导体元件电极连接端子和在第一表面上的第一外部框架部分 金属板; 形成光致抗蚀剂图案以在所述金属板的第二表面上形成外部连接端子,第二外部框架部分和所述第二外部框架部分的至少一部分中的凹槽中的每一个; 蚀刻金属板暴露部分,其中第二表面的金属板被暴露,以形成不穿过金属板暴露部分的孔和从第二外框架部分的内部延伸到外部的槽; 在孔和槽上涂覆预模制树脂,并使用平板压机在压力下加热预模制树脂以形成树脂层; 并且蚀刻所述第一表面以形成所述半导体元件安装部,所述半导体元件电极连接端子与所述外部连接端子电连接,所述第一外部框架部分。