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1. 发明授权

US5389954A Laser process apparatus for forming holes in a workpiece 失效
标题翻译：用于在工件中形成孔的激光加工装置
公开(公告)号：US5389954A
公开(公告)日：1995-02-14
申请号：US794862
申请日：1991-11-19
申请人： Masaki Inaba , Hiroshi Kohno , Fumio Ichikawa , Kazuaki Masuda , Takashi Watanabe , Tsuyoshi Orikasa , Masayuki Nishiwaki , Toshio Tsuda , Akira Goto
发明人： Masaki Inaba , Hiroshi Kohno , Fumio Ichikawa , Kazuaki Masuda , Takashi Watanabe , Tsuyoshi Orikasa , Masayuki Nishiwaki , Toshio Tsuda , Akira Goto
IPC分类号： B23K26/04 , B23K26/06 , B41J2/16 , B41J2/435
CPC分类号： B23K26/043 , B23K26/04 , B23K26/066 , B41J2/162 , B41J2/1634
摘要： In a laser process apparatus, a plurality of holes each having a predetermined shape are formed in a work upon radiation of light from an excimer laser. The apparatus is provided with a mask, in which a plurality of predetermined small holes are formed in correspondence with the plurality of holes to be formed in the work, and which allows laser light from the excimer laser to pass through the small holes thereof toward the work, a projection optical system for projecting optical images each having a predetermined shape onto the work through the small holes of the mask, a measurement optical system for measuring a work position, and a moving stage for moving the work on the basis of a measurement result form the measurement optical system.
摘要翻译：在激光加工装置中，在来自准分子激光的光的照射下，在工作中形成各具有规定形状的多个孔。该装置设置有掩模，其中与待形成的多个孔对应地形成多个预定的小孔，并且允许来自准分子激光器的激光穿过其小孔朝向投影光学系统，用于通过掩模的小孔将具有预定形状的光学图像投射到工件上，用于测量工作位置的测量光学系统和用于基于测量来移动工件的移动台结果形成测量光学系统。

2. 发明授权

US5828496A Illumination optical system 失效
标题翻译：照明光学系统
公开(公告)号：US5828496A
公开(公告)日：1998-10-27
申请号：US361042
申请日：1994-12-21
申请人： Masayuki Nishiwaki , Hiroshi Sugitani , Tsuyoshi Orikasa , Akira Goto
发明人： Masayuki Nishiwaki , Hiroshi Sugitani , Tsuyoshi Orikasa , Akira Goto
IPC分类号： G02B27/12 , G02B27/10
CPC分类号： G02B27/126
摘要： An illumination optical system includes a beam dividing device for dividing a radiation beam into plural illumination beams, and an optical arrangement for superposing the illumination beams one upon another on a surface to be illuminated, the optical arrangement having different focal distances in substantially orthogonal first and second directions, and the optical arrangement being adapted to focus each of the illumination beams on the surface in the first direction while defocusing the same in the second direction, whereby a linear illumination region is defined on the surface.
摘要翻译：照明光学系统包括用于将辐射束分割为多个照明光束的光束分割装置和用于在要被照射的表面上叠加照明光束的光学装置，该光学装置具有基本正交的第一和第第二方向，并且所述光学布置适于将所述照明光束在所述第一方向上的所述表面上聚焦，同时使所述照明光束在所述第二方向上散焦，由此在所述表面上限定线性照明区域。

3. 发明申请

US20060113287A1 Laser cutting method 有权
标题翻译：激光切割方法
公开(公告)号：US20060113287A1
公开(公告)日：2006-06-01
申请号：US11273730
申请日：2005-11-14
申请人： Genji Inada , Junichiro Iri , Masayuki Nishiwaki , Sadayuki Sugama
发明人： Genji Inada , Junichiro Iri , Masayuki Nishiwaki , Sadayuki Sugama
IPC分类号： B23K26/38
CPC分类号： B23K26/38 , B23K26/0853 , B23K26/364 , B23K26/40 , B23K26/53 , B23K2101/40 , B23K2103/50 , Y10T29/49401
摘要： At least one exemplary embodiment is directed to a laser cutting method where a laser beam is condensed at internal points inside a substrate forming processing regions, and where the laser is swept along a cutting line, where the cutting line is associated with a recess on the substrate and where the recess can be formed contemporaneously with the formation of the processing regions.
摘要翻译：至少一个示例性实施例涉及激光切割方法，其中激光束在衬底形成处理区域内部的内部点处被冷凝，并且其中激光沿着切割线扫掠，其中切割线与所述切割线上的凹部相关联衬底，并且可以在形成处理区域的同时形成凹部。

4. 发明授权

US5946024A Illuminating apparatus and device manufacturing method 失效
标题翻译：照明装置及装置制造方法
公开(公告)号：US5946024A
公开(公告)日：1999-08-31
申请号：US576459
申请日：1995-12-21
申请人： Masayuki Nishiwaki
发明人： Masayuki Nishiwaki
IPC分类号： B41J2/135 , B23K26/06 , B23K26/067 , B41J2/16 , G02B13/08 , G02B27/09 , G02B27/12 , G03F7/20 , B41J2/14 , H04N5/225
CPC分类号： B41J2/1634 , B23K26/06 , B23K26/0608 , B23K26/064 , B23K26/0648 , B23K26/0652 , B23K26/0665 , B23K26/067 , B41J2/162 , G02B13/08 , G02B27/106 , G02B27/1073 , G02B27/126 , G03F7/70083 , G03F7/7035
摘要： A laser beam from an excimer laser is split into three beams along a first plane by a pair of prisms and the three beams are caused to intersect each other at the position of the object side focal point of a first cylindrical lens and be incident upon the first cylindrical lens. The three beams are respectively focused independently from each other by the first cylindrical lens. The above focused three beams are then focused along a second plane perpendicular to the first plane by a second cylindrical lens; then, the three beams are caused to superimpose each other on a mask and at the same time are brought to a defocus along the first plane and into focus again along the second plane by an anamorphic optical system containing a third cylindrical lens and a lens having a rotation symmetry, thereby a line-like illumination area extended in the first direction is formed on the mask. The linear illumination area and an area containing a pattern of a series of openings arranged in the first direction or a rectangular pattern extended in the first direction are caused to coincide on the mask to efficiently illuminate the pattern. An image of the illuminated pattern is projected onto a workpiece for an orifice plate by a projection lens system to process the workpiece in accordance with the pattern.
摘要翻译：来自准分子激光器的激光束通过一对棱镜沿着第一平面被分成三个光束，并且使三个光束在第一柱面透镜的物体侧焦点的位置彼此相交并且入射到第一柱面透镜。三个光束分别通过第一柱面透镜彼此独立地聚焦。然后通过第二柱面透镜将上述聚焦的三个光束沿着垂直于第一平面的第二平面聚焦; 然后使三个光束彼此叠加在掩模上，并且同时沿着第一平面被引入散焦并且再次通过包含第三柱面透镜和透镜的变形光学系统沿第二平面聚焦旋转对称，从而在掩模上形成沿第一方向延伸的线状照明区域。线性照明区域和包含在第一方向上排列的一系列开口的图案或沿第一方向延伸的矩形图案的区域的区域在掩模上重合以有效地照亮图案。通过投影透镜系统将照明图案的图像投影到用于孔板的工件上，以根据图案处理工件。

5. 发明授权

US08108998B2 Laser cutting method 有权
标题翻译：激光切割方法
公开(公告)号：US08108998B2
公开(公告)日：2012-02-07
申请号：US11273730
申请日：2005-11-14
申请人： Genji Inada , Junichiro Iri , Masayuki Nishiwaki , Sadayuki Sugama
发明人： Genji Inada , Junichiro Iri , Masayuki Nishiwaki , Sadayuki Sugama
IPC分类号： H01L21/78 , H01L21/30 , H01L21/301
CPC分类号： B23K26/38 , B23K26/0853 , B23K26/364 , B23K26/40 , B23K26/53 , B23K2101/40 , B23K2103/50 , Y10T29/49401
摘要： At least one exemplary embodiment is directed to a laser cutting method where a laser beam is condensed at internal points inside a substrate forming processing regions, and where the laser is swept along a cutting line, where the cutting line is associated with a recess on the substrate and where the recess can be formed contemporaneously with the formation of the processing regions.
摘要翻译：至少一个示例性实施例涉及激光切割方法，其中激光束在衬底形成处理区域内部的内部点处被冷凝，并且其中激光沿着切割线扫掠，其中切割线与所述切割线上的凹部相关联衬底，并且可以在形成处理区域的同时形成凹部。

6. 发明申请

US20050199592A1 Laser based splitting method, object to be split, and semiconductor element chip 有权
标题翻译：基于激光的分裂方法，待分裂的物体和半导体元件芯片
公开(公告)号：US20050199592A1
公开(公告)日：2005-09-15
申请号：US11058163
申请日：2005-02-16
申请人： Junichiro Iri , Genji Inada , Sadayuki Sugama , Masayuki Nishiwaki , Hiroyuki Morimoto
发明人： Junichiro Iri , Genji Inada , Sadayuki Sugama , Masayuki Nishiwaki , Hiroyuki Morimoto
IPC分类号： B28D5/00 , B23K26/06 , B23K26/38 , B23K26/40 , B23K101/40 , H01L21/301 , B23K26/00
CPC分类号： B23K26/0676 , B23K26/0617 , B23K26/40 , B23K26/53 , B23K2103/50 , B28D5/0011 , H01L21/67092 , H01L21/78
摘要： A laser splitting method for splitting off a segment from an object to be split using a laser beam, includes a surface processing step of processing the object by forming a linear recessed portion in a surface of the object, the linear recessed portion being effective to cause a stress concentration at the surface of the object; an internal processed-region forming step of forming an internal processed-regions at a depth of the object in a line along which a laser beam scans the surface of the object by a relative motion therebetween, the laser beam being converged adjacent the depth, wherein the thus formed internal processed-regions extend in a direction substantially perpendicular to the surface of the object; and an external force applying step of applying an external force to the object to form cracks between the recessed portion and the internal processed-regions.
摘要翻译：一种激光分割方法，用于使用激光束从待分割的物体上分割出一段，包括：通过在物体表面形成线状的凹陷部分来处理物体的表面处理步骤，该线性凹入部分有效地引起物体表面的应力集中; 内部处理区域形成步骤，在物体的深度处沿着激光束通过它们之间的相对运动扫描物体的表面的行中形成内部加工区域，激光束在相邻深度处会聚，其中，因此形成的内部加工区域在基本上垂直于物体表面的方向上延伸; 以及向所述物体施加外力以在所述凹部与所述内部加工区域之间形成裂纹的外力施加工序。

7. 发明授权

US06239914B1 Method of manufacturing nozzle member, and work apparatus 有权
标题翻译：制造喷嘴构件的方法和工作装置
公开(公告)号：US06239914B1
公开(公告)日：2001-05-29
申请号：US09305201
申请日：1999-05-05
申请人： Masayuki Nishiwaki
发明人： Masayuki Nishiwaki
IPC分类号： G02B2710
CPC分类号： B41J2/1634 , B23K26/066 , B23K26/067 , B23K26/389 , B41J2/162 , Y10T29/49401
摘要： An ink jet printer comprises a nozzle member manufactured by a method including the step of splitting light from a light source by amplitude splitting to form a plurality of illumination beams, and the step of illuminating a plurality of mask patterns formed on a mask with corresponding split illumination beams so as to expose a workpiece via the mask patterns.
摘要翻译：喷墨打印机包括喷嘴构件，该喷嘴构件通过包括以下步骤制造的喷嘴构件：包括通过振幅分裂来分离来自光源的光以形成多个照明光束的步骤，以及将形成在掩模上的多个掩模图案以相应的分割照明光束以经由掩模图案曝光工件。

8. 发明授权

US5841101A Method used in manufacturing a workpiece using a plurality of spaced apart mask patterns 失效
标题翻译：用于使用多个间隔开的掩模图案制造工件的方法
公开(公告)号：US5841101A
公开(公告)日：1998-11-24
申请号：US575679
申请日：1995-12-19
申请人： Masayuki Nishiwaki
发明人： Masayuki Nishiwaki
IPC分类号： B41J2/135 , B23K26/06 , B23K26/067 , B23K26/073 , B41J2/16 , G02B13/08 , G02B27/18
CPC分类号： B41J2/1634 , B23K26/066 , B23K26/0738 , B41J2/162
摘要： A method used in manufacturing a workpiece using a plurality of spaced apart mask patterns includes two dividing steps and two focusing steps. The first step divides a light beam emitted from a light source into a plurality of light beams on a first plane including a first axis. A second step divides each of the plurality of light beams into a plurality of light beams on a second plane perpendicular to the first plane, the second plane including a second axis perpendicular to the first axis. A third step focuses the plurality of light beams produced by the second step only in the first direction. A fourth step focuses the plurality of light beams focused in this third step in the first direction at a position beyond the plurality of mask patterns in the second direction so that the light beams focused in the third step overlap each other to perform a plurality of spaced apart images, each of which illuminate one of the plurality of spaced apart mask patterns.
摘要翻译：使用多个间隔开的掩模图案来制造工件的方法包括两个分割步骤和两个聚焦步骤。第一步骤将从光源发射的光束分成包括第一轴线的第一平面上的多个光束。第二步骤将多个光束中的每个光束分成与第一平面垂直的第二平面上的多个光束，第二平面包括垂直于第一轴线的第二轴线。第三步骤仅在第一方向上聚焦由第二步骤产生的多个光束。第四步骤将第三步骤中聚焦在该第三步骤中的多个光束沿着第二方向聚焦在多个掩模图案之外的位置处，使得在第三步骤中聚焦的光束彼此重叠，以执行多个间隔分开的图像，其中的每一个照亮多个间隔开的掩模图案中的一个。

9. 发明授权

US07791001B2 Automatic focusing apparatus, laser processing apparatus, and laser cutting apparatus 有权
标题翻译：自动聚焦装置，激光加工装置和激光切割装置
公开(公告)号：US07791001B2
公开(公告)日：2010-09-07
申请号：US11280886
申请日：2005-11-15
申请人： Masayuki Nishiwaki , Junichiro Iri , Genji Inada , Sadayuki Sugama
发明人： Masayuki Nishiwaki , Junichiro Iri , Genji Inada , Sadayuki Sugama
IPC分类号： B23K26/00 , B23K26/04
CPC分类号： H01L21/67092 , B23K26/046 , B23K26/048 , B23K26/361 , B23K26/40 , B23K26/53 , B23K2103/50 , B23K2103/52
摘要： At least one exemplary embodiment is directed to a laser processing apparatus that can use the shape of a plurality of reflected light fluxes to adjust the position of workpiece relative to an optical system, where the laser processing apparatus facilitates both the viewing of the workpiece and a focusing of a processing laser into the workpiece.
摘要翻译：至少一个示例性实施例涉及可以使用多个反射光束的形状来调节工件相对于光学系统的位置的激光加工设备，其中激光加工设备有助于工件的观察和将加工激光聚焦到工件上。

10. 发明申请

US20060109757A1 Automatic focusing apparatus, laser processing apparatus, and laser cutting apparatus 有权
标题翻译：自动聚焦装置，激光加工装置和激光切割装置
公开(公告)号：US20060109757A1
公开(公告)日：2006-05-25
申请号：US11280886
申请日：2005-11-15
申请人： Masayuki Nishiwaki , Junichiro Iri , Genji Inada , Sadayuki Sugama
发明人： Masayuki Nishiwaki , Junichiro Iri , Genji Inada , Sadayuki Sugama
IPC分类号： G11B7/00
CPC分类号： H01L21/67092 , B23K26/046 , B23K26/048 , B23K26/361 , B23K26/40 , B23K26/53 , B23K2103/50 , B23K2103/52
摘要： At least one exemplary embodiment is directed to a laser processing apparatus that can use the shape of a plurality of reflected light fluxes to adjust the position of workpiece relative to an optical system, where the laser processing apparatus facilitates both the viewing of the workpiece and a focusing of a processing laser into the workpiece.
摘要翻译：至少一个示例性实施例涉及可以使用多个反射光束的形状来调节工件相对于光学系统的位置的激光加工设备，其中激光加工设备有助于工件的观察和将加工激光聚焦到工件上。

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