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    • 7. 发明申请
    • MANUFACTURING APPARATUS
    • 制造设备
    • US20110132260A1
    • 2011-06-09
    • US13024984
    • 2011-02-10
    • Shunpei YAMAZAKIMasakazu MURAKAMI
    • Shunpei YAMAZAKIMasakazu MURAKAMI
    • C23C16/448
    • H01L21/67745C23C14/12C23C14/243C23C14/568H01L21/67276H01L51/001Y10S414/135Y10S438/908
    • A manufacturing apparatus is provided, which can improve a utilization efficiency of an evaporation material, reduce manufacturing costs of a light emitting device having an organic light emitting element, and shorten manufacturing time necessary to manufacture a light emitting device. According to the present invention, a multi-chamber manufacturing apparatus having plural film forming chambers includes a first film forming chamber for subjecting a first substrate to evaporation and a second film forming chamber for subjecting a second substrate to evaporation. In each film forming chamber, plural organic compound layers are laminated, thereby improving the throughput. Further, it is possible that the respective substrates in the plural film forming chambers are subjected to evaporation in the same manner in parallel, while another film forming chamber undergoes cleaning.
    • 提供一种制造装置,其可以提高蒸发材料的利用效率,降低具有有机发光元件的发光装置的制造成本,并缩短制造发光装置所需的制造时间。 根据本发明,具有多个成膜室的多室制造装置包括用于使第一基板蒸发的第一成膜室和用于使第二基板蒸发的第二成膜室。 在每个成膜室中层叠多个有机化合物层,从而提高生产量。 此外,可以以相同的方式平行地对多个成膜室中的各个基板进行蒸发,而另一个成膜室进行清洁。
    • 9. 发明申请
    • EVAPORATION METHOD, EVAPORATION DEVICE AND METHOD OF FABRICATING LIGHT EMITTING DEVICE
    • 蒸发方法,蒸发装置和制造发光装置的方法
    • US20090269486A1
    • 2009-10-29
    • US12487843
    • 2009-06-19
    • Shunpei YAMAZAKIMasakazu MURAKAMI
    • Shunpei YAMAZAKIMasakazu MURAKAMI
    • B05D5/12C23C16/54
    • C23C14/00C23C14/042C23C14/12C23C14/24C23C14/243C23C14/246C23C14/505C23C14/564C23C14/568H01L51/001H05B33/10
    • The invention provides an evaporation system which is one of deposition devices promoting an efficiency of utilizing an EL material and excellent in uniformity and throughput of forming an EL layer and an evaporation method therefor. Further, the invention provides a method of efficiently vapor-depositing an EL material to a large area substrate. Further, the invention provides a system capable of avoiding an impurity from mixing to the EL material.An evaporation system of the invention is featured in moving a substrate and an evaporation source relative to each other. That is, the invention is featured in that in the evaporation system, an evaporation source holder installed with a vessel filled with an evaporation material is moved by a certain pitch relative to a substrate or the substrate is moved by a certain pitch relative to the evaporation source. Further, the invention is featured in that a vessel is filled with a refined evaporation material and carried and thereafter, the vessel is directly installed to the evaporation system which is a deposition device to carry out evaporation.
    • 本发明提供了一种蒸发系统,其是促进EL材料的利用效率和在形成EL层的均匀性和通过量方面优异的沉积装置及其蒸发方法之一。 此外,本发明提供了一种有效地将EL材料气相沉积到大面积基板的方法。 此外,本发明提供一种能够避免杂质混入EL材料的系统。 本发明的蒸发系统的特征在于相对于彼此移动衬底和蒸发源。 也就是说,本发明的特征在于,在蒸发系统中,安装有填充有蒸发材料的容器的蒸发源保持器相对于基板移动一定的间距,或者基板相对于蒸发物移动一定的间距 资源。 此外,本发明的特征在于,容器中填充有精制蒸发材料并承载,然后将容器直接安装到作为沉积装置进行蒸发的蒸发系统。
    • 10. 发明申请
    • MANUFACTURING APPARATUS
    • 制造设备
    • US20090075411A1
    • 2009-03-19
    • US12203802
    • 2008-09-03
    • Shunpei YAMAZAKIMasakazu MURAKAMI
    • Shunpei YAMAZAKIMasakazu MURAKAMI
    • H01L21/00H01L51/40
    • H01L21/67745C23C14/12C23C14/243C23C14/568H01L21/67276H01L51/001Y10S414/135Y10S438/908
    • A manufacturing apparatus is provided, which can improve a utilization efficiency of an evaporation material, reduce manufacturing costs of a light emitting device having an organic light emitting element, and shorten manufacturing time necessary to manufacture a light emitting device. According to the present invention, a multi-chamber manufacturing apparatus having plural film forming chambers includes a first film forming chamber for subjecting a first substrate to evaporation and a second film forming chamber for subjecting a second substrate to evaporation. In each film forming chamber, plural organic compound layers are laminated, thereby improving the throughput. Further, it is possible that the respective substrates in the plural film forming chambers are subjected to evaporation in the same manner in parallel, while another film forming chamber undergoes cleaning.
    • 提供一种制造装置,其可以提高蒸发材料的利用效率,降低具有有机发光元件的发光装置的制造成本,并缩短制造发光装置所需的制造时间。 根据本发明,具有多个成膜室的多室制造装置包括用于使第一基板蒸发的第一成膜室和用于使第二基板蒸发的第二成膜室。 在每个成膜室中层叠多个有机化合物层,从而提高生产量。 此外,可以以相同的方式平行地对多个成膜室中的各个基板进行蒸发,而另一个成膜室进行清洁。