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2. 发明申请

US20050258835A1 Method of measuring contact resistance of probe and method of testing semiconductor device 审中-公开
标题翻译：测量探头接触电阻的方法和半导体器件测试方法
公开(公告)号：US20050258835A1
公开(公告)日：2005-11-24
申请号：US11165216
申请日：2005-06-24
申请人： Masakatsu Saijyo , Toshiaki Kato
发明人： Masakatsu Saijyo , Toshiaki Kato
IPC分类号： G01R31/26 , G01R1/06 , G01R1/073 , G01R3/00 , H01L21/66 , G01R31/00 , G01R31/02
CPC分类号： G01R3/00
摘要： A measuring method of the contact resistance of a probe includes bringing a plurality of probes including a first and second probes into contact with a plurality of electrode pads that is disposed on a semiconductor device to be electrically tested and connected each other with a conductive wiring; connecting a power supply to at least one predetermined first probe of the plurality of probes and supplying a current or a voltage from the first probe through the electrode pad and the wiring to the second probe to the semiconductor device; measuring the contact resistance between the electrode pad and the probe based on the current or the voltage supplied to the semiconductor device; judging whether the measured contact resistance is equal to or more than a predetermined value or not; and when the contact resistance is equal to or more than the predetermined value, the probes are cleansed.
摘要翻译：探针的接触电阻的测量方法包括使包括第一和第二探针的多个探针与设置在半导体器件上的多个电极焊盘接触以进行电测试并且用导电布线彼此连接; 将电源连接到所述多个探针中的至少一个预定的第一探针，并将来自所述第一探针的电流或电压通过所述电极焊盘和所述布线提供给所述半导体器件; 基于提供给半导体器件的电流或电压来测量电极焊盘和探针之间的接触电阻; 判断测量的接触电阻是否等于或大于预定值; 并且当接触电阻等于或大于预定值时，探针被清洁。

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