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    • 3. 发明授权
    • Crystal unit having stacked structure
    • 具有堆叠结构的水晶单元
    • US07564177B2
    • 2009-07-21
    • US11964403
    • 2007-12-26
    • Masahiro YoshimatsuTamotsu KurosawaKozo Ono
    • Masahiro YoshimatsuTamotsu KurosawaKozo Ono
    • H01L41/047H01L41/053
    • H03H9/1035H03H9/0595
    • A stacked crystal unit includes: a first crystal plate in which a vibration member links to an outer circumferential frame portion, and a pair of extending electrode extends to the frame portion from excitation electrodes; and a second and third crystal plates which have a concave portion in an area opposite to the vibration member and whose open end surfaces are joined by direct bonding to both principal surfaces of the frame portion in the first crystal plate. The extending electrodes are electrically extended to an outer surface of at least one of the second and third crystal plates via electrode through-holes provided in the frame portion. The electrode through-hole includes: a first electrode through-hole penetrating through the frame portion from the principal surface of the frame portion where the extending electrode extends; and a second electrode through-hole provided in the second or third crystal plate.
    • 层叠晶体单元包括:第一晶体板,其中振动部件连接到外周框架部分,一对延伸电极从激励电极延伸到框架部分; 以及第二和第三晶体板,其在与振动部件相反的区域中具有凹部,并且其开口端面通过直接接合到第一晶体板的框架部分的两个主表面而接合。 延伸电极通过设置在框架部分中的电极通孔电延伸到第二和第三晶体板中的至少一个的外表面。 电极通孔包括:从延伸电极延伸的框架部分的主表面穿过框架部分的第一电极通孔; 以及设置在第二或第三晶体板中的第二电极通孔。
    • 4. 发明申请
    • Optical filter
    • 滤光片
    • US20110019296A1
    • 2011-01-27
    • US12804373
    • 2010-07-20
    • Takuji YamamotoNobuo HirumaMotoo TakadaKozo OnoMasahiro YoshimatsuTakehiro Takahashi
    • Takuji YamamotoNobuo HirumaMotoo TakadaKozo OnoMasahiro YoshimatsuTakehiro Takahashi
    • G02B5/22
    • G02B5/282G02B7/006
    • An object of the invention is to provide an optical filter that prevents an optical thin film formed on an optical plate from being partially removed, and prevents micro-cracks occurring in an outer peripheral edge section of a principle surface of the optical plate, and that has a high yield rate. An optical filter is provided with an optical plate which has a chamfered section formed on an outer peripheral edge section of one principle surface of the optical plate, and has isotropy with respect to wet-etching, and the chamfered section is of an arc shape which is cross-sectionally concave in an inward direction of the optical plate, and is formed by means of wet-etching. A crossing angle between the one principle surface and a concave surface where the chamfered section is formed, and a crossing angle between the concave surface and a side surface of the optical plate 3 where the chamfered section is formed, namely, crossing angles θG and θH are respectively 100° or greater and less than 180° .
    • 本发明的目的是提供一种滤光器,其防止形成在光学板上的光学薄膜被部分去除,并且防止在光学板的主表面的外周边缘部分中发生微裂纹,并且, 具有高产率。 滤光器设置有光学板,该光学板具有形成在光学板的一个主表面的外周边缘部分上的倒角部分,并且具有相对于湿蚀刻的各向同性,并且倒角部分为弧形, 在光学板的向内方向上具有横截面凹陷,并且通过湿蚀刻形成。 一个主表面与形成有倒角部的凹面之间的交叉角以及凹面与形成有倒角部的光学板3的侧面之间的交叉角,即交叉角度&G 和H;分别为100°以上且小于180°。
    • 5. 发明申请
    • Angular velocity sensor and method of fabrication thereof
    • 角速度传感器及其制造方法
    • US20060162449A1
    • 2006-07-27
    • US11338345
    • 2006-01-24
    • Hideryo MatsudoMasahiro YoshimatsuTakahiro InoueKenichi Kikuchi
    • Hideryo MatsudoMasahiro YoshimatsuTakahiro InoueKenichi Kikuchi
    • G01P15/08
    • G01C19/5628G01C19/5621
    • The present invention provides an angular velocity sensor and a method of fabrication thereof that facilitates the work of affixing a tuning-fork-type crystal element and adjusting the same, preventing waste caused by scrapping defective products and also encouraging miniaturization of components. The angular velocity sensor comprises: a tuning-fork-type crystal element which is provided with a drive electrode for exciting the vibration of the tuning fork and a sensor electrode for detecting an electrical charge that is generated in response to an angular velocity that is being detected; an independent pedestal to which a main surface of a tuning-fork base portion of the tuning-fork-type crystal element is previously affixed to form an integrated unit; a main package for surface mounting, in which the tuning-fork-type crystal element is hermetically sealed and which has a cavity with an inner base surface to which the pedestal integrated with the tuning-fork-type crystal element is affixed; and an IC having an oscillation circuit for driving the tuning-fork-type crystal element and a signal processing circuit for creating a signal in correspondence to the angular velocity corresponding to the electrical charge, and which is also disposed either inside or outside the package. The pedestal has a weight and/or shape that ensures that the center of gravity of the tuning-fork-type crystal element that is integrated therewith moves towards the tuning-fork base portion side, maintaining the horizontal alignment of the tuning-fork-type crystal element.
    • 本发明提供了一种角速度传感器及其制造方法,其有利于固定音叉型晶体元件并进行调节,从而防止由于废品而产生的废弃物,并且也促进了部件的小型化。 角速度传感器包括:音叉型晶体元件,其设置有用于激发音叉的振动的驱动电极和用于检测响应于正在进行的角速度而产生的电荷的传感器电极 检测到 预先固定音叉型晶体元件的音叉基部的主表面的独立基座,以形成一体的单元; 用于表面安装的主要包装件,其中音叉型晶体元件被气密地密封,并且具有一个具有内基座表面的空腔,与该音叉型晶体元件集成的基座固定到该内表面; 以及IC,其具有用于驱动音叉型晶体元件的振荡电路和用于根据与电荷对应的角速度产生信号的信号处理电路,并且还配置在封装的内部或外部。 基座具有重量和/或形状,其确保与其一体的音叉型晶体元件的重心朝向音叉基座部分侧移动,保持音叉型的水平对准 水晶元素。
    • 7. 发明申请
    • PIEZOELECTRIC DEVICES AND METHODS FOR MANUFACTURING SAME
    • 压电元件及其制造方法
    • US20110187235A1
    • 2011-08-04
    • US13016893
    • 2011-01-28
    • Masahiro Yoshimatsu
    • Masahiro Yoshimatsu
    • H01L41/053H01L41/22H01L41/047
    • H03H9/1035H03H3/02H03H9/0595Y10T29/42Y10T29/49574Y10T29/49798
    • Methods are disclosed for manufacturing piezoelectric devices. In an exemplary method, a base wafer is prepared that defines an array of multiple bases. Between each base on the wafer is a through-hole defined in respective parts by the respective edge surfaces of adjacent bases. A piezoelectric wafer is prepared that defines an array of multiple piezoelectric frames each having a piezoelectric vibrating piece and a surrounding frame portion. The vibrating piece includes an excitation electrode and extraction electrode. The extraction electrode extends to the through-hole. An adhesive is applied to a surface of the frame portion including a surface of the extraction electrode. The adhesive bonds the piezoelectric wafer to the base wafer. Excess adhesive is removed from the through-hole to expose a portion of the extraction electrode in the through-hole. An external electrode is formed on the outer surface of the base and extends to the through-hole in which the external electrode covers the edge surface of the through-hole, an edge surface of the adhesive, and the exposed portion of the extraction electrode.
    • 公开了用于制造压电装置的方法。 在示例性方法中,准备限定多个基底阵列的基底晶片。 在晶片上的每个基底之间是由相邻基部的相应边缘表面限定在相应部分中的通孔。 准备了压电晶片,其限定了具有压电振动片和周围框架部分的多个压电框架的阵列。 振动片包括激励电极和引出电极。 引出电极延伸到通孔。 将粘合剂施加到包括提取电极的表面的框架部分的表面。 粘合剂将压电晶片连接到基底晶片。 从通孔中除去过多的粘合剂,以使通孔中的一部分引出电极露出。 外部电极形成在基体的外表面上并延伸到外部电极覆盖通孔的边缘表面的通孔,粘合剂的边缘表面和引出电极的暴露部分。
    • 8. 发明授权
    • Angular velocity sensor and method of fabrication thereof
    • 角速度传感器及其制造方法
    • US07456555B2
    • 2008-11-25
    • US11338345
    • 2006-01-24
    • Hideryo MatsudoMasahiro YoshimatsuTakahiro InoueKenichi Kikuchi
    • Hideryo MatsudoMasahiro YoshimatsuTakahiro InoueKenichi Kikuchi
    • H03H9/21
    • G01C19/5628G01C19/5621
    • The present invention provides an angular velocity sensor and a method of fabrication thereof that facilitates the work of affixing a tuning-fork-type crystal element and adjusting the same, preventing waste caused by scrapping defective products and also encouraging miniaturization of components. The angular velocity sensor comprises: a tuning-fork-type crystal element which is provided with a drive electrode for exciting the vibration of the tuning fork and a sensor electrode for detecting an electrical charge that is generated in response to an angular velocity that is being detected; an independent pedestal to which a main surface of a tuning-fork base portion of the tuning-fork-type crystal element is previously affixed to form an integrated unit; a main package for surface mounting, in which the tuning-fork-type crystal element is hermetically sealed and which has a cavity with an inner base surface to which the pedestal integrated with the tuning-fork-type crystal element is affixed; and an IC having an oscillation circuit for driving the tuning-fork-type crystal element and a signal processing circuit for creating a signal in correspondence to the angular velocity corresponding to the electrical charge, and which is also disposed either inside or outside the package. The pedestal has a weight and/or shape that ensures that the center of gravity of the tuning-fork-type crystal element that is integrated therewith moves towards the tuning-fork base portion side, maintaining the horizontal alignment of the tuning-fork-type crystal element.
    • 本发明提供了一种角速度传感器及其制造方法,其有利于固定音叉型晶体元件并进行调节,从而防止由于废品而产生的废弃物,并且也促进了部件的小型化。 角速度传感器包括:音叉型晶体元件,其设置有用于激发音叉的振动的驱动电极和用于检测响应于正在进行的角速度而产生的电荷的传感器电极 检测到 预先固定音叉型晶体元件的音叉基部的主表面的独立基座,以形成一体的单元; 用于表面安装的主要包装件,其中音叉型晶体元件被气密地密封,并且具有一个具有内基座表面的空腔,与该音叉型晶体元件集成的基座固定到该内表面; 以及IC,其具有用于驱动音叉型晶体元件的振荡电路和用于根据与电荷对应的角速度产生信号的信号处理电路,并且还配置在封装的内部或外部。 基座具有重量和/或形状,其确保与其一体的音叉型晶体元件的重心朝向音叉基座部分侧移动,保持音叉型的水平对准 水晶元素。
    • 9. 发明授权
    • Piezoelectric vibrating piece with extended supporting arms
    • 压电振动片带延伸支撑臂
    • US07982374B2
    • 2011-07-19
    • US12332160
    • 2008-12-10
    • Masahiro YoshimatsuHiroki Iwai
    • Masahiro YoshimatsuHiroki Iwai
    • H01L41/04H03H9/215H03H9/19
    • H03H9/21G01C19/5621H03H3/02H03H9/0519H03H2003/026Y10T29/42
    • Piezoelectric vibrating pieces are disclosed made of a piezoelectric material to be mounted in a package. A representative piece includes a base formed of a piezoelectric material, having first and second ends, extending between the ends in a length direction, and having a designated width. The piece includes at least a pair of vibrating arms extending in the length direction from one end of the base, and a pair of supporting arms extending partially in a width direction from between the first and second ends of the base. The supporting arms further extend in the length direction outboard of the base and vibrating arms, and include an adhesive region at the tips of the supporting arms. The adhesive regions are used for mounting the piece to a package. Whereas the tips of the supporting arms do not extend beyond the tips of the vibrating arms, the axial length of supporting arms is greater than the length of the vibrating arms.
    • 压电振动片由压电材料制成,以安装在封装中。 代表件包括由压电材料形成的基座,其具有在长度方向上在端部之间延伸并具有指定宽度的第一端和第二端。 所述件包括至少一对在所述基座的一端沿所述长度方向延伸的振动臂,以及一对支撑臂,所述一对支撑臂从所述基座的所述第一和第二端之间在宽度方向上部分地延伸。 支撑臂进一步在基座和振动臂外侧的长度方向上延伸,并且在支撑臂的尖端处包括粘合剂区域。 粘合剂区域用于将零件安装到包装上。 而支撑臂的尖端不延伸超过振动臂的尖端,支撑臂的轴向长度大于振动臂的长度。
    • 10. 发明申请
    • PIEZOELECTRIC VIBRATING PIECES, PIEZOELECTRIC DEVICES, AND METHODS FOR MANUFACTURING SAME
    • 压电振动片,压电元件及其制造方法
    • US20090167118A1
    • 2009-07-02
    • US12332160
    • 2008-12-10
    • Masahiro YoshimatsuHiroki Iwai
    • Masahiro YoshimatsuHiroki Iwai
    • H01L41/04H01L41/22
    • H03H9/21G01C19/5621H03H3/02H03H9/0519H03H2003/026Y10T29/42
    • Piezoelectric vibrating pieces are disclosed made of a piezoelectric material to be mounted in a package. A representative piece includes a base formed of a piezoelectric material, having first and second ends, extending between the ends in a length direction, and having a designated width. The piece includes at least a pair of vibrating arms extending in the length direction from one end of the base, and a pair of supporting arms extending partially in a width direction from between the first and second ends of the base. The supporting arms further extend in the length direction outboard of the base and vibrating arms, and include an adhesive region at the tips of the supporting arms. The adhesive regions are used for mounting the piece to a package. Whereas the tips of the supporting arms do not extend beyond the tips of the vibrating arms, the axial length of supporting arms is greater than the length of the vibrating arms.
    • 压电振动片由压电材料制成,以安装在封装中。 代表件包括由压电材料形成的基座,其具有在长度方向上在端部之间延伸并具有指定宽度的第一端和第二端。 所述件包括至少一对在所述基座的一端沿所述长度方向延伸的振动臂,以及一对在所述基座的第一和第二端之间沿宽度方向部分延伸的支撑臂。 支撑臂进一步在基座和振动臂外侧的长度方向上延伸,并且在支撑臂的尖端处包括粘合剂区域。 粘合剂区域用于将零件安装到包装上。 而支撑臂的尖端不延伸超过振动臂的尖端,支撑臂的轴向长度大于振动臂的长度。