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    • 1. 发明授权
    • Process for dicing a semiconductor wafer having a plated heat sink using
a temporary substrate
    • 使用临时基板对具有电镀散热片的半导体晶片进行切割的工序
    • US5457072A
    • 1995-10-10
    • US196757
    • 1994-02-15
    • Masahiro TamakiKouji AonoSinichi Sakamoto
    • Masahiro TamakiKouji AonoSinichi Sakamoto
    • H01L23/36B81C99/00H01L21/304H01L21/78H01L21/302
    • B81C1/00214H01L21/304H01L21/6835H01L21/6836H01L21/78H01L2221/68327Y10S438/977
    • A method for producing semiconductor chips includes preparing a semiconductor wafer having opposite front and rear surfaces and active semiconductor devices disposed in the semiconductor wafer at a part of the front surface, attaching a glass plate to the front surface of the semiconductor wafer, thinning the semiconductor wafer to a desired thickness from the rear surface, forming a first radiating layer over the rear surface of the semiconductor wafer, selectively forming a second radiating layer on the first radiating layer using, as a mask, a photoresist pattern covering portions of the first radiating layer opposite dicing regions, removing the semiconductor wafer from the glass plate, and cutting through the wafer and the first radiating layer with a dicing blade to produce a plurality of semiconductor chips. In this method, since the first radiating layer supports the thin wafer, the glass plate can be removed before the dicing process. Therefore, electrical testing of the semiconductor devices included in the wafer can be carried out before the wafer is divided into chips.
    • 一种制造半导体芯片的方法包括制备具有相对的前表面和后表面的半导体晶片和在前表面的一部分设置在半导体晶片中的有源半导体器件,将玻璃板附接到半导体晶片的前表面,使半导体 从后表面到期望的厚度,在半导体晶片的后表面上形成第一辐射层,在第一辐射层上选择性地形成第二辐射层,使用覆盖第一辐射层的部分的光刻胶图案作为掩模 层,相对的切割区域,从玻璃板去除半导体晶片,并用切割刀片切割晶片和第一辐射层,以产生多个半导体芯片。 在该方法中,由于第一辐射层支撑薄晶片,因此可以在切割处理之前去除玻璃板。 因此,在将晶片分成芯片之前,可以进行包括在晶片中的半导体器件的电气测试。
    • 2. 发明授权
    • Mold clamping apparatus for injection molding machine
    • 注塑机模具夹紧装置
    • US06537057B2
    • 2003-03-25
    • US09906767
    • 2001-07-18
    • Masahiro TamakiJun Koike
    • Masahiro TamakiJun Koike
    • B29C4564
    • B29C45/6707B29C45/67B29C45/68B29C45/683B29C2045/1793B29C2045/688
    • A mold clamping apparatus for an injection molding machine comprises a stationary platen fixedly holding the stationary mold, a movable platen fixedly holding the movable mold and disposed opposite to the stationary platen, tie bars for guiding the movable platen for movement toward and away from the stationary platen, a movable platen driving mechanism for moving the movable platen along the tie bars to close and open the mold, a movable platen fixing mechanism for fixing the movable platen to the tie bars at a set position immediately before a position where the movable mold is joined to the stationary mold, and a clamping force applying mechanism that includes a sealed hydraulic cylinder actuator capable of converting energy of a hydraulic fluid into an intensified mold clamping force and of applying the intensified mold clamping force to the stationary platen. In one embodiment, the apparatus includes an electrically driven toggle mechanism which brings the movable and stationary molds together, at which point the hydraulic clamping force applying means applies significant clamping force to clamp the mold shut.
    • 用于注射成型机的模具夹紧装置包括固定地固定固定模具的固定压板,固定地保持活动模具并与固定压板相对设置的活动压板,用于引导可动压板以朝向和远离静止状态运动的连杆 台板,用于沿着拉杆移动可移动压板以闭合和打开模具的可移动压板驱动机构;可动压板固定机构,用于在可动模具的位置之前的设定位置将可动压板固定到连接杆上 连接到固定模具,以及夹紧力施加机构,其包括密封的液压缸致动器,其能够将液压流体的能量转换成强化的合模力并且将增强的合模力施加到固定压板。 在一个实施例中,该装置包括电动肘节机构,其将可移动和固定的模具带到一起,此时液压夹紧力施加装置施加显着的夹紧力来夹紧模具闭合。
    • 4. 发明授权
    • Clamping apparatus for injection molding machine
    • 注塑机夹紧装置
    • US6050804A
    • 2000-04-18
    • US149103
    • 1998-09-08
    • Masahiro TamakiJun Koike
    • Masahiro TamakiJun Koike
    • B22D17/26B29C33/22B29C45/17B29C45/66B29C45/64
    • B29C45/66B29C45/1751
    • A threaded shaft (52) for operating toggle joint (44) is driven for rotation by a first servomotor (46). A bevel gear (56) is mounted on the threaded shaft (52) for rotation relative to the threaded shaft (52). The bevel gear (56) is driven for rotation by a second servomotor (57). Bevel gears (60) each having a threaded bore are supported on a rear plate (42) are engaged with threaded sections (40A) of tie bars (40), respectively. Power is transmitted from the bevel gear (56) through power transmitting mechanisms (61) to the bevel gears (60). Each power transmitting mechanism (61) comprises bevel gears (62, 63) engaged with the bevel gears (56, 60), respectively, and a clutch (64) interposed between the bevel gears (62, 63). The clutches (64) are engaged and disengaged selectively to adjust the parallelism of a movable mold (36) with respect to a stationary mold (32).
    • 用于操作肘节(44)的螺纹轴(52)由第一伺服电机(46)驱动旋转。 伞形齿轮(56)安装在螺纹轴(52)上以相对于螺纹轴(52)旋转。 锥齿轮(56)由第二伺服电机(57)驱动旋转。 分别在后板(42)上支撑有螺纹孔的锥齿轮(60)分别与连杆(40)的螺纹部分(40A)接合。 动力通过动力传递机构(61)从伞齿轮(56)传递到伞齿轮(60)。 每个动力传递机构(61)分别包括与锥齿轮(56,60)啮合的锥齿轮(62,63)和插入在锥齿轮(62,63)之间的离合器(64)。 离合器(64)被选择性地接合和分离以调节可动模具(36)相对于固定模具(32)的平行度。
    • 8. 发明授权
    • Injection apparatus for injection molding machine
    • 注塑机注塑机
    • US6059556A
    • 2000-05-09
    • US116585
    • 1998-07-16
    • Jun KoikeMasahiro Tamaki
    • Jun KoikeMasahiro Tamaki
    • B29C45/03B29C45/50B29C45/58B29C45/76B29C45/54
    • B29C45/5008B29C2045/5028B29C2045/504B29C2045/5048
    • An injection apparatus of an injection molding machine, for easy control of the charging motor and the injection motor and highly precise control of the back pressure of a screw thereby enabling performance of the proper charging operation, has an injection motor with a rotor adapted to act as a ball screw nut and which is secured to an injection carriage having mounted thereon a heating barrel of the injection apparatus. The injection motor has a shaft forming a ball screw in one end portion of the shaft connected to a screw of the injection molding machine. The ball screw is screwed into the rotor of the injection motor. The other end of the shaft forms a spline portion, and is connected to a charging motor that has a hollow drive shaft whose inside-diameter portion is spline-fitted onto the spline portion of the shaft.
    • 一种注射成型机的注射装置,用于容易地控制充电马达和注射马达,并且高精度地控制螺杆的背压,从而使得能够执行适当的充电操作,具有注射马达,其具有适于作用的转子 作为滚珠丝杠螺母,并且固定到注射装置上,注射装置安装有注射装置的加热筒。 注射马达具有在连接到注射成型机的螺杆的轴的一个端部中形成滚珠丝杠的轴。 滚珠丝杠拧入注射马达的转子。 轴的另一端形成花键部,并且连接到具有中空驱动轴的充电电动机,其内径部分花键配合到轴的花键部分上。
    • 10. 发明授权
    • Apparatus for electroplating a semiconductor substrate
    • 用于电镀半导体衬底的装置
    • US5853559A
    • 1998-12-29
    • US891870
    • 1997-07-09
    • Masahiro TamakiKatsuya Kosaki
    • Masahiro TamakiKatsuya Kosaki
    • C25D5/00C25D5/08C25D7/12C25D17/00B05B5/025C25B9/00
    • C25D7/123C25D17/02C25D21/04C25D5/003C25D5/08
    • An electroplating apparatus includes an electroplating tank having a generally flat base on which a semiconductor substrate may be placed with a surface to be electroplated oriented upwardly. A first seal seals a tank body to the flat base and a second seal seals the tank body to a peripheral portion of the surface of the semiconductor substrate. A substantially sealed volume adjacent the surface of the semiconductor substrate is produced. A gas supply tube for pressurizing the volume and an electrolyte discharge arrangement for discharging electrolyte from the volume when pressurized by a gas introduced through the gas supply tube are also provided. The discharge tube extends through a wall of the tank body to a position immediately above the surface of the semiconductor substrate within the volume.
    • 电镀设备包括具有大致平坦的基底的电镀槽,半导体衬底可以放置在其上,电镀表面向上取向。 第一密封件将罐体密封到平坦基部,并且第二密封件将罐体密封到半导体基板的表面的周边部分。 产生与半导体衬底的表面相邻的基本上密封的体积。 还提供了用于对体积加压的气体供给管和用于通过气体供给管引入的气体加压时从体积排出电解质的电解液排出装置。 放电管延伸穿过容器本体的壁直到体积内的半导体衬底的表面上方的位置。