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1. 发明授权

US08268660B2 Process for fabricating micromachine 有权
标题翻译：微机械制造工艺
公开(公告)号：US08268660B2
公开(公告)日：2012-09-18
申请号：US10551271
申请日：2004-04-02
申请人： Masahiro Tada , Takashi Kinoshita , Masahiro Tanaka , Masanari Yamaguchi , Shun Mitarai , Koji Naniwada
发明人： Masahiro Tada , Takashi Kinoshita , Masahiro Tanaka , Masanari Yamaguchi , Shun Mitarai , Koji Naniwada
IPC分类号： H01L21/00
CPC分类号： H03H3/0072 , B81B7/0012
摘要： A method for manufacturing a micromachine is provided which can remove a sacrifice layer and can perform sealing without using a specific packaging technique. In a method for manufacturing a micromachine (1) including an oscillator (4), a step of forming a sacrifice layer around a movable portion of the oscillator (4); a step of covering a sacrifice layer with an overcoat film (8), followed by the formation of a penetrating hole (10) reaching the sacrifice layer in the overcoat layer (8); a step of performing sacrifice-layer etching for removing the sacrifice layer using the penetrating hole (10) in order to form a space around the movable portion; and a step of performing a film-formation treatment at a reduced pressure following the sacrifice-layer etching so as to seal the penetrating hole (10).
摘要翻译：提供了一种制造微机械的方法，其可以去除牺牲层并且可以在不使用特定包装技术的情况下进行密封。在制造包括振荡器（4）的显微机械（1）的方法中，在振荡器（4）的可移动部分周围形成牺牲层的步骤; 用覆盖膜（8）覆盖牺牲层的步骤，然后形成到达覆盖层（8）中的牺牲层的穿透孔（10）; 使用所述贯通孔（10）进行牺牲层蚀刻去除所述牺牲层以在所述可动部分周围形成空间的步骤; 以及在牺牲层蚀刻之后在减压下进行成膜处理以密封穿透孔（10）的步骤。

2. 发明申请

US20060216847A1 Process for fabricating micromachine 有权
标题翻译：微机械制造工艺
公开(公告)号：US20060216847A1
公开(公告)日：2006-09-28
申请号：US10551271
申请日：2004-04-02
申请人： Masahiro Tada , Takashi Kinoshita , Masahiro Tanaka , Masanari Yamaguchi , Shun Mitarai , Koji Naniwada
发明人： Masahiro Tada , Takashi Kinoshita , Masahiro Tanaka , Masanari Yamaguchi , Shun Mitarai , Koji Naniwada
IPC分类号： H01L21/00
CPC分类号： H03H3/0072 , B81B7/0012
摘要： A method for manufacturing a micromachine is provided which can remove a sacrifice layer and can perform sealing without using a specific packaging technique. In a method for manufacturing a micromachine (1) including an oscillator (4), a step of forming a sacrifice layer around a movable portion of the oscillator (4); a step of covering a sacrifice layer with an overcoat film (8), followed by the formation of a penetrating hole (10) reaching the sacrifice layer in the overcoat layer (8); a step of performing sacrifice-layer etching for removing the sacrifice layer using the penetrating hole (10) in order to form a space around the movable portion; and a step of performing a film-formation treatment at a reduced pressure following the sacrifice-layer etching so as to seal the penetrating hole (10).
摘要翻译：提供了一种制造微机械的方法，其可以去除牺牲层并且可以在不使用特定包装技术的情况下进行密封。在制造包括振荡器（4）的显微机械（1）的方法中，在振荡器（4）的可移动部分周围形成牺牲层的步骤; 用覆盖膜（8）覆盖牺牲层的步骤，然后形成到达覆盖层（8）中的牺牲层的穿透孔（10）; 使用所述贯通孔（10）进行牺牲层蚀刻去除所述牺牲层以在所述可动部分周围形成空间的步骤; 以及在牺牲层蚀刻之后在减压下进行成膜处理以密封穿透孔（10）的步骤。

3. 发明授权

US07893796B2 High frequency device, power supply device and communication apparatus 有权
标题翻译：高频装置，电源装置及通讯装置
公开(公告)号：US07893796B2
公开(公告)日：2011-02-22
申请号：US11570642
申请日：2005-06-07
申请人： Masahiro Tanaka , Shun Mitarai , Masahiro Tada , Koji Naniwada
发明人： Masahiro Tanaka , Shun Mitarai , Masahiro Tada , Koji Naniwada
IPC分类号： H03H9/46
CPC分类号： H03H9/2463 , H03H3/0073 , H03H3/0075 , H03H9/2426 , H03H9/505 , H03H9/525
摘要： A high frequency device including an electrostatic type vibrator, a pad, and a circuit. The electrostatic type vibrator is operable via a DC bias voltage. The pad is configured to supply the DC bias voltage. The circuit is positioned electrically between the pad and the vibrator. The circuit is configured to stabilize the DC bias voltage. The circuit and the high frequency signal device are on a common substrate.
摘要翻译：包括静电型振动器，衬垫和电路的高频装置。静电型振动器可通过DC偏置电压工作。该焊盘被配置为提供DC偏置电压。该电路电气位于垫和振动器之间。电路配置为稳定直流偏置电压。电路和高频信号装置在公共基板上。

4. 发明授权

US07498901B2 Filter device and transmitter-receiver utilizing beam-structured micro-resonators 有权
标题翻译：滤波器装置和采用光束结构的微谐振器的发射器 - 接收器
公开(公告)号：US07498901B2
公开(公告)日：2009-03-03
申请号：US11568324
申请日：2005-03-25
申请人： Koji Naniwada , Shun Mitarai , Masahiro Tanaka , Masahiro Tada
发明人： Koji Naniwada , Shun Mitarai , Masahiro Tanaka , Masahiro Tada
IPC分类号： H03H9/70 , H03H9/46
CPC分类号： H03H9/525 , H03H9/2463
摘要： A filter device configured with a plurality of micro-resonators and having a wide specific bandwidth. The filter device is configured as having a plurality of beam-structured, micro-resonators (15), (16), (17), (18) electrically connected in a lattice-forming manner between two input terminals (11), (12) for balanced input and two output terminals (13), (14) for balanced output, each of the plurality of micro-resonators (15), (16), (17), (18) being composed of a resonator group including a plurality of resonators differed in resonance frequency.
摘要翻译：一种配置有多个微谐振器并且具有宽的特定带宽的滤波器装置。滤波器装置被配置为在两个输入端（11），（12）之间以格子形式电连接的多个束结构的微谐振器（15），（16），（17），（18））和用于平衡输出的两个输出端子（13），（14），所述多个微谐振器（15），（16），（17），（18）中的每一个由包括多个谐振器的谐振频率不同。

5. 发明申请

US20070171001A1 Filter device and transmitter-receiver 有权
标题翻译：过滤装置和发射器 - 接收器
公开(公告)号：US20070171001A1
公开(公告)日：2007-07-26
申请号：US11568324
申请日：2005-03-25
申请人： Koji Naniwada , Shun Mitarai , Masahiro Tanaka , Masahiro Tada
发明人： Koji Naniwada , Shun Mitarai , Masahiro Tanaka , Masahiro Tada
IPC分类号： H03H9/24
CPC分类号： H03H9/525 , H03H9/2463
摘要： A filter device configured with a plurality of micro-resonators and having a wide specific bandwidth. The filter device is configured as having a plurality of beam-structured, micro-resonators (15),(16),(17),(18) electrically connected in a lattice-forming manner between two input terminals (11),(12) for balanced input and two output terminals (13),(14) for balanced output, each of the plurality of micro-resonators (15),(16),(17),(18) being composed of a resonator group including a plurality of resonators differed in resonance frequency.
摘要翻译：一种配置有多个微谐振器并且具有宽的特定带宽的滤波器装置。滤波器装置被配置为在两个输入端（11），（12）之间以格子形式电连接的多个束结构的微谐振器（15），（16），（17），（18））和用于平衡输出的两个输出端子（13），（14），所述多个微谐振器（15），（16），（17），（18）中的每一个由包括多个谐振器的谐振频率不同。

6. 发明申请

US20080272749A1 High Frequency Device, Power Supply Device and Communication Apparatus 有权
标题翻译：高频设备，电源设备和通信设备
公开(公告)号：US20080272749A1
公开(公告)日：2008-11-06
申请号：US11570642
申请日：2005-06-07
申请人： Masahiro Tanaka , Shun Mitarai , Masahiro Tada , Koji Naniwada
发明人： Masahiro Tanaka , Shun Mitarai , Masahiro Tada , Koji Naniwada
IPC分类号： G05F3/08
CPC分类号： H03H9/2463 , H03H3/0073 , H03H3/0075 , H03H9/2426 , H03H9/505 , H03H9/525
摘要： The present invention provides a high frequency device in which stabilization of a DC bias voltage applied to an electrostatic drive type vibrator is attempted and a power supply device which can supply a stable DC bias voltage.Also, the present invention provides a communication apparatus including a filter by means of aforesaid high frequency device.The high frequency device of the present invention has a high frequency signal device which includes an electrostatic type vibrator operated by being applied with a DC bias voltage and is formed by being added with a circuit having a function of stabilizing the DC bias voltage between a pad supplying the DC bias voltage and the vibrator.The power supply device is a power supply device serving for a drive of a high frequency vibration device and is formed by being added with a circuit having a function of stabilizing a DC bias voltage.The communication apparatus of the present invention is formed by using a filter according to aforesaid high frequency device as a filter.
摘要翻译：本发明提供了一种高频器件，其中尝试施加到静电驱动型振动器的DC偏置电压的稳定化，以及可以提供稳定的DC偏置电压的电源装置。此外，本发明提供一种通过上述高频装置包括滤波器的通信装置。本发明的高频装置具有高频信号装置，该高频信号装置包括通过施加直流偏置电压而工作的静电型振动器，并且通过添加具有使垫片之间的直流偏置电压稳定的功能的电路而形成提供直流偏置电压和振动器。电源装置是用于高频振动装置的驱动的电源装置，并且通过添加具有稳定DC偏置电压的功能的电路而形成。本发明的通信装置通过使用根据上述高频装置的滤波器作为滤波器来形成。

7. 发明授权

US07286027B2 Microresonator, manufacturing method, and electronic apparatus 有权
标题翻译：微谐振器，制造方法和电子设备
公开(公告)号：US07286027B2
公开(公告)日：2007-10-23
申请号：US11264344
申请日：2005-10-04
申请人： Masahiro Tada , Masahiro Tanaka , Shun Mitarai , Koji Naniwada
发明人： Masahiro Tada , Masahiro Tanaka , Shun Mitarai , Koji Naniwada
IPC分类号： H03H9/24 , H03H9/46 , H03H3/007
CPC分类号： H03H3/0072 , H03H9/02259 , H03H9/02433 , H03H9/2463 , H03H9/462 , H03H9/525 , H03H2009/02511
摘要： The present invention provides a microresonator including a plurality of resonator elements arranged on a plurality of columns on a substrate. The resonator elements each have an input electrode, an output electrode, and a diaphragm that extends in a certain direction, and each pass a signal of a certain frequency. The plurality of resonator elements includes a plurality of first resonator elements arranged on first columns that are located on every other column of the plurality of columns, and having a first phase, and a plurality of second resonator elements arranged on second columns that are located on every other column, other than the first columns, of the plurality of columns, and having a second phase that is an opposite phase of the first phase.
摘要翻译：本发明提供一种微谐振器，其包括布置在基板上的多个列上的多个谐振元件。谐振器元件各自具有沿一定方向延伸的输入电极，输出电极和隔膜，并且每个通过特定频率的信号。多个谐振器元件包括布置在第一列上的多个第一谐振器元件，该第一谐振器元件位于多个列的每隔一列上并且具有第一相位，以及布置在位于第二列上的第二列上的多个第二谐振元件多个列中除了第一列之外的每隔一列，并且具有与第一相位相反的相位的第二相位。

8. 发明申请

US20060103491A1 Microresonator, manufacturing method, and electronic apparatus 有权
标题翻译：微谐振器，制造方法和电子设备
公开(公告)号：US20060103491A1
公开(公告)日：2006-05-18
申请号：US11264344
申请日：2005-10-04
申请人： Masahiro Tada , Masahiro Tanaka , Shun Mitarai , Koji Naniwada
发明人： Masahiro Tada , Masahiro Tanaka , Shun Mitarai , Koji Naniwada
IPC分类号： H03H9/00
CPC分类号： H03H3/0072 , H03H9/02259 , H03H9/02433 , H03H9/2463 , H03H9/462 , H03H9/525 , H03H2009/02511
摘要： The present invention provides a microresonator including a plurality of resonator elements arranged on a plurality of columns on a substrate. The resonator elements each have an input electrode, an output electrode, and a diaphragm that extends in a certain direction, and each pass a signal of a certain frequency. The plurality of resonator elements includes a plurality of first resonator elements arranged on first columns that are located on every other column of the plurality of columns, and having a first phase, and a plurality of second resonator elements arranged on second columns that are located on every other column, other than the first columns, of the plurality of columns, and having a second phase that is an opposite phase of the first phase.
摘要翻译：本发明提供一种微谐振器，其包括布置在基板上的多个列上的多个谐振元件。谐振器元件各自具有沿一定方向延伸的输入电极，输出电极和隔膜，并且每个通过特定频率的信号。多个谐振器元件包括布置在第一列上的多个第一谐振器元件，该第一谐振器元件位于多个列的每隔一列上并且具有第一相位，以及布置在位于第二列上的第二列上的多个第二谐振元件多个列中除了第一列之外的每隔一列，并且具有与第一相位相反的相位的第二相位。

9. 发明授权

US07489212B2 Microresonator, band-pass filter, semiconductor device, and communication apparatus 有权
标题翻译：微谐振器，带通滤波器，半导体器件和通信设备
公开(公告)号：US07489212B2
公开(公告)日：2009-02-10
申请号：US11425080
申请日：2006-06-19
申请人： Shinya Morita , Takashi Kinoshita , Masahiro Tanaka , Masahiro Tada , Shun Mitarai
发明人： Shinya Morita , Takashi Kinoshita , Masahiro Tanaka , Masahiro Tada , Shun Mitarai
IPC分类号： H03H9/54 , H03H3/02
CPC分类号： H03H3/0073 , H03H3/0072 , H03H9/02244 , H03H9/02433 , H03H9/2463 , H03H2009/02511
摘要： A microresonator includes a beam-type resonator element in which a beam that is an oscillating portion of the resonator element has a high-resistance portion or an insulating portion.
摘要翻译：微谐振器包括波束型谐振元件，其中作为谐振器元件的振荡部分的光束具有高电阻部分或绝缘部分。

10. 发明申请

US20070001784A1 MICRORESONATOR, BAND-PASS FILTER, SEMICONDUCTOR DEVICE, AND COMMUNICATION APPARATUS 有权
标题翻译：微型计算机，带通滤波器，半导体器件和通信设备
公开(公告)号：US20070001784A1
公开(公告)日：2007-01-04
申请号：US11425080
申请日：2006-06-19
申请人： Shinya Morita , Takashi Kinoshita , Masahiro Tanaka , Masahiro Tada , Shun Mitarai
发明人： Shinya Morita , Takashi Kinoshita , Masahiro Tanaka , Masahiro Tada , Shun Mitarai
IPC分类号： H03H9/00
CPC分类号： H03H3/0073 , H03H3/0072 , H03H9/02244 , H03H9/02433 , H03H9/2463 , H03H2009/02511
摘要： A microresonator includes a beam-type resonator element in which a beam that is an oscillating portion of the resonator element has a high-resistance portion or an insulating portion.
摘要翻译：微谐振器包括波束型谐振元件，其中作为谐振器元件的振荡部分的光束具有高电阻部分或绝缘部分。

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